JPH01145123U - - Google Patents
Info
- Publication number
- JPH01145123U JPH01145123U JP4056188U JP4056188U JPH01145123U JP H01145123 U JPH01145123 U JP H01145123U JP 4056188 U JP4056188 U JP 4056188U JP 4056188 U JP4056188 U JP 4056188U JP H01145123 U JPH01145123 U JP H01145123U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- hawk
- sic
- groove
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4056188U JPH01145123U (zh) | 1988-03-28 | 1988-03-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4056188U JPH01145123U (zh) | 1988-03-28 | 1988-03-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01145123U true JPH01145123U (zh) | 1989-10-05 |
Family
ID=31267030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4056188U Pending JPH01145123U (zh) | 1988-03-28 | 1988-03-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01145123U (zh) |
-
1988
- 1988-03-28 JP JP4056188U patent/JPH01145123U/ja active Pending