JPH01143122U - - Google Patents

Info

Publication number

JPH01143122U

JPH01143122U JP3940188U JP3940188U JPH01143122U JP H01143122 U JPH01143122 U JP H01143122U JP 3940188 U JP3940188 U JP 3940188U JP 3940188 U JP3940188 U JP 3940188U JP H01143122 U JPH01143122 U JP H01143122U

Authority

JP

Japan

Prior art keywords

substrate

power source

photoresist

photolithography

rotation

Prior art date

1988-03-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 3
• 238000004519 manufacturing process Methods 0.000 claims 2
• 229920002120 photoresistant polymer Polymers 0.000 claims 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 238000000576 coating method Methods 0.000 claims 1
• 238000000206 photolithography Methods 0.000 claims 1