JPH01141359U - - Google Patents

Info

Publication number
JPH01141359U
JPH01141359U JP3815888U JP3815888U JPH01141359U JP H01141359 U JPH01141359 U JP H01141359U JP 3815888 U JP3815888 U JP 3815888U JP 3815888 U JP3815888 U JP 3815888U JP H01141359 U JPH01141359 U JP H01141359U
Authority
JP
Japan
Prior art keywords
case body
gas inlet
chamber
diaphragm
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3815888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3815888U priority Critical patent/JPH01141359U/ja
Publication of JPH01141359U publication Critical patent/JPH01141359U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Fluid Pressure (AREA)
JP3815888U 1988-03-23 1988-03-23 Pending JPH01141359U (US06623731-20030923-C00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3815888U JPH01141359U (US06623731-20030923-C00012.png) 1988-03-23 1988-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3815888U JPH01141359U (US06623731-20030923-C00012.png) 1988-03-23 1988-03-23

Publications (1)

Publication Number Publication Date
JPH01141359U true JPH01141359U (US06623731-20030923-C00012.png) 1989-09-28

Family

ID=31264724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3815888U Pending JPH01141359U (US06623731-20030923-C00012.png) 1988-03-23 1988-03-23

Country Status (1)

Country Link
JP (1) JPH01141359U (US06623731-20030923-C00012.png)

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