JPH01140626U - - Google Patents

Info

Publication number

JPH01140626U

JPH01140626U JP3708888U JP3708888U JPH01140626U JP H01140626 U JPH01140626 U JP H01140626U JP 3708888 U JP3708888 U JP 3708888U JP 3708888 U JP3708888 U JP 3708888U JP H01140626 U JPH01140626 U JP H01140626U

Authority

JP

Japan

Prior art keywords

pattern

photodetection

photodetector

reflected light

optical axis

Prior art date

1988-03-23

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000003287 optical effect Effects 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims 1
• 238000001514 detection method Methods 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1