JPH01139830U - - Google Patents

Info

Publication number
JPH01139830U
JPH01139830U JP3670188U JP3670188U JPH01139830U JP H01139830 U JPH01139830 U JP H01139830U JP 3670188 U JP3670188 U JP 3670188U JP 3670188 U JP3670188 U JP 3670188U JP H01139830 U JPH01139830 U JP H01139830U
Authority
JP
Japan
Prior art keywords
processing apparatus
plasma processing
hollow tube
plasma
honeycomb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3670188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0517151Y2 (US20090163788A1-20090625-C00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3670188U priority Critical patent/JPH0517151Y2/ja
Publication of JPH01139830U publication Critical patent/JPH01139830U/ja
Application granted granted Critical
Publication of JPH0517151Y2 publication Critical patent/JPH0517151Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP3670188U 1988-03-18 1988-03-18 Expired - Lifetime JPH0517151Y2 (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3670188U JPH0517151Y2 (US20090163788A1-20090625-C00002.png) 1988-03-18 1988-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3670188U JPH0517151Y2 (US20090163788A1-20090625-C00002.png) 1988-03-18 1988-03-18

Publications (2)

Publication Number Publication Date
JPH01139830U true JPH01139830U (US20090163788A1-20090625-C00002.png) 1989-09-25
JPH0517151Y2 JPH0517151Y2 (US20090163788A1-20090625-C00002.png) 1993-05-10

Family

ID=31263291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3670188U Expired - Lifetime JPH0517151Y2 (US20090163788A1-20090625-C00002.png) 1988-03-18 1988-03-18

Country Status (1)

Country Link
JP (1) JPH0517151Y2 (US20090163788A1-20090625-C00002.png)

Also Published As

Publication number Publication date
JPH0517151Y2 (US20090163788A1-20090625-C00002.png) 1993-05-10

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