JPH01139093U - - Google Patents

Info

Publication number
JPH01139093U
JPH01139093U JP3396288U JP3396288U JPH01139093U JP H01139093 U JPH01139093 U JP H01139093U JP 3396288 U JP3396288 U JP 3396288U JP 3396288 U JP3396288 U JP 3396288U JP H01139093 U JPH01139093 U JP H01139093U
Authority
JP
Japan
Prior art keywords
diaphragm
thickness
central part
main body
radius
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3396288U
Other languages
English (en)
Japanese (ja)
Other versions
JP2528778Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988033962U priority Critical patent/JP2528778Y2/ja
Publication of JPH01139093U publication Critical patent/JPH01139093U/ja
Application granted granted Critical
Publication of JP2528778Y2 publication Critical patent/JP2528778Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP1988033962U 1988-03-15 1988-03-15 ポンプのダイヤフラムの構造 Expired - Lifetime JP2528778Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988033962U JP2528778Y2 (ja) 1988-03-15 1988-03-15 ポンプのダイヤフラムの構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988033962U JP2528778Y2 (ja) 1988-03-15 1988-03-15 ポンプのダイヤフラムの構造

Publications (2)

Publication Number Publication Date
JPH01139093U true JPH01139093U (US20030204162A1-20031030-M00001.png) 1989-09-22
JP2528778Y2 JP2528778Y2 (ja) 1997-03-12

Family

ID=31260681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988033962U Expired - Lifetime JP2528778Y2 (ja) 1988-03-15 1988-03-15 ポンプのダイヤフラムの構造

Country Status (1)

Country Link
JP (1) JP2528778Y2 (US20030204162A1-20031030-M00001.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000265945A (ja) * 1998-11-10 2000-09-26 Uct Kk 薬液供給ポンプ、薬液供給装置、薬液供給システム、基板洗浄装置、薬液供給方法、及び基板洗浄方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102073119B1 (ko) * 2018-06-28 2020-02-04 조성암 압출 펌핑모듈 및 이를 이용한 다아이프램 도료공급장치
CN111102176A (zh) * 2018-10-29 2020-05-05 日本电产株式会社 隔膜泵用隔膜片和隔膜泵

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4998804U (US20030204162A1-20031030-M00001.png) * 1972-12-14 1974-08-26
JPS578379A (en) * 1980-05-16 1982-01-16 Wagner Gmbh Josef Diaphragm for high pressure booster pump, compressor and others

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4998804U (US20030204162A1-20031030-M00001.png) * 1972-12-14 1974-08-26
JPS578379A (en) * 1980-05-16 1982-01-16 Wagner Gmbh Josef Diaphragm for high pressure booster pump, compressor and others

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000265945A (ja) * 1998-11-10 2000-09-26 Uct Kk 薬液供給ポンプ、薬液供給装置、薬液供給システム、基板洗浄装置、薬液供給方法、及び基板洗浄方法

Also Published As

Publication number Publication date
JP2528778Y2 (ja) 1997-03-12

Similar Documents

Publication Publication Date Title
JPH01139093U (US20030204162A1-20031030-M00001.png)
JPS63122529U (US20030204162A1-20031030-M00001.png)
JPS6161340U (US20030204162A1-20031030-M00001.png)
JPS63178686U (US20030204162A1-20031030-M00001.png)
JPS6324483U (US20030204162A1-20031030-M00001.png)
JPH0447367U (US20030204162A1-20031030-M00001.png)
JPS6319084U (US20030204162A1-20031030-M00001.png)
JPS6340598U (US20030204162A1-20031030-M00001.png)
JPH0276233U (US20030204162A1-20031030-M00001.png)
JPS61116175U (US20030204162A1-20031030-M00001.png)
JPH045519U (US20030204162A1-20031030-M00001.png)
JPS6318629U (US20030204162A1-20031030-M00001.png)
JPS63136296U (US20030204162A1-20031030-M00001.png)
JPS6435552U (US20030204162A1-20031030-M00001.png)
JPS6340630U (US20030204162A1-20031030-M00001.png)
JPS6212753U (US20030204162A1-20031030-M00001.png)
JPH03104150U (US20030204162A1-20031030-M00001.png)
JPS63101309U (US20030204162A1-20031030-M00001.png)
JPS6384487U (US20030204162A1-20031030-M00001.png)
JPS62130101U (US20030204162A1-20031030-M00001.png)
JPH01136711U (US20030204162A1-20031030-M00001.png)
JPS62156136U (US20030204162A1-20031030-M00001.png)
JPS6266248U (US20030204162A1-20031030-M00001.png)
JPH01176770U (US20030204162A1-20031030-M00001.png)
JPH0323954U (US20030204162A1-20031030-M00001.png)