JPH01132027A - Cleaning device for seal surface of cathode-ray tube panel - Google Patents

Cleaning device for seal surface of cathode-ray tube panel

Info

Publication number
JPH01132027A
JPH01132027A JP28969587A JP28969587A JPH01132027A JP H01132027 A JPH01132027 A JP H01132027A JP 28969587 A JP28969587 A JP 28969587A JP 28969587 A JP28969587 A JP 28969587A JP H01132027 A JPH01132027 A JP H01132027A
Authority
JP
Japan
Prior art keywords
panel
cleaning
seal surface
conveyor
vacuum cup
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28969587A
Other languages
Japanese (ja)
Inventor
Tetsuji Taguchi
田口 哲司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP28969587A priority Critical patent/JPH01132027A/en
Publication of JPH01132027A publication Critical patent/JPH01132027A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve cleaning effect of a panel seal surface by arranging a vacuum cup above a cleaning conveyor, holding the panel with the vacuum cup, and rubbing the panel seal surface with rollers wetted with cleaning liquid. CONSTITUTION:A vacuum cup 15 is lowered relative to the surface of a panel P supported with conveying and cleaning rollers 12 of a cleaning conveyor 13. While sucking the panel P with the vacuum cup 15, a seal surface of the panel P is pressed against the rollers 12 by means of a specified load. Under this condition, the seal surface of the panel P is rubbed with rollers 12 by reciprocating the vacuum cup 15 in both same and opposite directions of the conveyor while rotating the rollers 12. This makes it possible to effectively clean the seal surface of the panel P.

Description

【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) 本発明は、陰極線管の製造に際して、ファンネルに対し
てシールするパネルのシール面を洗浄する陰極線管のパ
ネルのシール面の洗浄装置に関するものである。
Detailed Description of the Invention [Objective of the Invention] (Industrial Application Field) The present invention provides a method for cleaning the sealing surface of a panel of a cathode ray tube, which is used to clean the sealing surface of a panel that seals against a funnel during the manufacture of cathode ray tubes. This invention relates to a cleaning device.

(従来の技術) 陰極線管たとえばカラーブラウン管の製造に際しては、
ファンネルとともにバルブを構成するパネルの内面に、
黒色の光吸収ストライブ、赤、緑及び青の3色の蛍光体
ストライプやこれらの上に平滑な面を得るために形成し
たフィルム層等から成る蛍光面を形成した後、このパネ
ルとファンネルを封着する(気密状に一体化する)前に
、ファンネルに対して封着するパネルのシール面に付看
した黒色のアクアダグ、赤、緑及び青の3色の蛍光体を
洗浄する必要がある。
(Prior art) When manufacturing cathode ray tubes, such as color cathode ray tubes,
On the inner surface of the panel that forms the valve together with the funnel,
After forming a phosphor screen consisting of black light-absorbing stripes, three-color phosphor stripes of red, green, and blue, and a film layer formed on top of these to obtain a smooth surface, this panel and funnel are assembled. Before sealing (airtight integration), it is necessary to clean the black Aquadag and the three colors of red, green, and blue phosphors attached to the sealing surface of the panel to be sealed to the funnel. .

そのため、従来は、第3図に示すように、薬液や純水等
の洗浄液の入った複数の洗浄液槽1の上部に、ローラ2
を並設した洗浄コンベア3を設け、この洗浄コンベア3
のローラ2の下側部を洗浄液槽1内の洗浄液に浸漬して
おき、この洗浄コンベア3のローラ2にパネルPのシー
ル面を支持してローラ2の回転によりパネルPを搬送し
、搬送とともにパネルPのシール面に洗浄液が付着した
ローラ2を接触させることによって、パネルPのシール
面を洗浄していた。
Therefore, conventionally, as shown in FIG.
A cleaning conveyor 3 with
The lower part of the roller 2 is immersed in the cleaning liquid in the cleaning liquid tank 1, and the sealed surface of the panel P is supported by the roller 2 of the cleaning conveyor 3, and the panel P is conveyed by the rotation of the roller 2. The sealed surface of the panel P was cleaned by bringing the roller 2 coated with cleaning liquid into contact with the sealed surface of the panel P.

(発明が解決しようとする問題点) 上述した従来の装置の場合、パネルPのシール面に洗浄
液が付着したローラ2を単純に接触させるだけなので、
洗浄効果が低く、パネルPのシール面に汚れが残ること
があり、後の工程で、パネルPとファンネルを封着し、
パネルPとファンネルから成るバルブのネック部に電子
銃を封止し、バルブ内の排気を行なった際に、パネルP
のシール面の汚れが原因で封着が不十分となっていたバ
ルブが爆縮するという不良が発生することがあった。
(Problems to be Solved by the Invention) In the case of the conventional device described above, the roller 2 coated with the cleaning liquid is simply brought into contact with the sealing surface of the panel P.
The cleaning effect is low and dirt may remain on the sealing surface of the panel P, so in a later process, the panel P and funnel are sealed.
An electron gun is sealed in the neck of a valve consisting of a panel P and a funnel, and when the inside of the valve is evacuated, the panel P
In some cases, valves with insufficient sealing implosion due to dirt on the sealing surface of the valve.

なお、このバルブの爆縮の原因としては、ファンネルの
シール面の汚れもあるが、ファンネルの内面にはインナ
ーダグを塗布するだけなので、ファンネルのシール面に
汚れが残ることはほと/vど無く、パネルPのシール面
の汚れが爆縮の原因と考えられる。
Note that one of the causes of valve implosion is dirt on the sealing surface of the funnel, but since Inner Dag is only applied to the inner surface of the funnel, there is very little dirt left on the sealing surface of the funnel. It is thought that dirt on the sealing surface of panel P was the cause of the implosion.

本発明は、このような点に鑑み成されたもので、パネル
Pのシール面の洗浄を効果的に行なうことを目的とする
ものである。
The present invention has been made in view of these points, and an object of the present invention is to effectively clean the sealing surface of the panel P.

〔発明の構成〕[Structure of the invention]

(問題点を解決するための手段) 本発明は、陰極線管の製造工程において、パネルのシー
ル面を洗浄する@極線管のパネルのシール面の洗浄装置
に関するものであって、パネルのシール面を支持して搬
送するとともにパネルのシール面を洗浄する複数の搬送
用及び洗浄用のローラを並設した洗浄コンベアと、この
洗浄コンベアの上方に昇降可能に形成されかつこの洗浄
コンベアの搬送方向と同方向及び逆方向に移動可能に形
成され上記パネルの表面を吸引するバキュームカップと
を具備したものである。
(Means for Solving the Problems) The present invention relates to a cleaning device for cleaning the sealing surface of a cathode ray tube panel, which cleans the sealing surface of the panel in the manufacturing process of a cathode ray tube. a cleaning conveyor in which a plurality of conveying and cleaning rollers are arranged in parallel to support and convey the panels and to clean the sealing surfaces of the panels; It is equipped with a vacuum cup that is movable in the same direction and in the opposite direction and sucks the surface of the panel.

(作用) 本発明の陰極線管のパネルのシール面の洗浄装置は、洗
浄コンベアの搬送用及び洗浄用のローラに支持したパネ
ルの表面に対してバキュームカップを下降し、このバキ
ュームカップでパネルを吸着するとともに、パネルのシ
ール面をO−ラに対して所定の荷重で当接させ、この状
態で、0−ラを回転させるとともに、バキュームカップ
をローラによる搬送方向と同方向及び逆方向に進退させ
、パネルのシール面をローラで擦るものである。
(Function) The device for cleaning the sealed surface of a cathode ray tube panel of the present invention lowers a vacuum cup to the surface of the panel supported by the transport and cleaning rollers of a cleaning conveyor, and sucks the panel with the vacuum cup. At the same time, the sealing surface of the panel is brought into contact with the O-ra with a predetermined load, and in this state, the O-ra is rotated and the vacuum cup is advanced and retreated in the same direction and in the opposite direction to the conveyance direction by the rollers. , the sealing surface of the panel is rubbed with a roller.

(実施例) 本発明の陰極線管のパネルのシール面の洗浄装置の一実
施例を第1図及び第2図を参照して説明する。
(Embodiment) An embodiment of the apparatus for cleaning the sealing surface of a panel of a cathode ray tube according to the present invention will be described with reference to FIGS. 1 and 2.

第1図及び第2図に示すように、本発明の装置も、第3
図に示した従来の¥N置と同様に、養液や純水等の洗浄
液11の入った図示しない複数の洗浄液槽の上部に、複
数の搬送用及び洗浄用のローラ12を軸架並設した洗浄
コンベア13を設け、この洗浄コンベア13のO−ラ1
2の下側部を洗浄液槽内の洗浄液11に浸漬しておき、
この洗浄コンベア13のローラ12にパネルPのシール
面を支持してローラ12の図示反時計方向の回転により
パネルPを図示左方に搬送し、パネルPのシール面を洗
浄液が付着したローラ12で洗浄するもので、ローラ1
2はスポンジで形成され、洗浄液11を含浸するように
なっている。
As shown in FIGS. 1 and 2, the device of the present invention also has a third
Similar to the conventional ¥N arrangement shown in the figure, a plurality of rollers 12 for conveyance and cleaning are installed in parallel on a shaft rack above a plurality of cleaning liquid tanks (not shown) containing cleaning liquid 11 such as nutrient solution or pure water. A cleaning conveyor 13 is provided, and an O-ra 1 of this cleaning conveyor 13 is provided.
2 is immersed in the cleaning liquid 11 in the cleaning liquid tank,
The sealing surface of the panel P is supported by the roller 12 of this cleaning conveyor 13, and the panel P is conveyed to the left in the drawing by rotation of the roller 12 in the counterclockwise direction in the drawing, and the sealing surface of the panel P is touched by the roller 12 to which the cleaning liquid is attached. Roller 1
2 is made of a sponge and is impregnated with the cleaning liquid 11.

そして、本発明では、上記洗浄コンベア13の上方にバ
キュームカップ15を配設し、このバキュームカップ1
5によって、パネルPを保持し、パネルPのシール面を
洗浄液11を含浸したロー512で擦るようにしている
In the present invention, a vacuum cup 15 is disposed above the cleaning conveyor 13, and this vacuum cup 1
5, the panel P is held and the sealing surface of the panel P is rubbed with a row 512 impregnated with the cleaning liquid 11.

すなわち、複数の図示しない洗浄液槽のそれぞれに対応
し、て洗浄コンベア13の一側方に架台21を設け、こ
の架台21上にレール22を介して移動棒23を洗浄コ
ンベア13のO−ラ12による搬送方向と同方向及び逆
方向に移動自在に支持するとともに、この移動枠23を
一対のエアシリンダ24.25でレール22に沿って移
動するように形成し、さらに、この移動枠23にレール
26を介して昇降枠27を洗浄コンベア13に対して昇
降自在に支持するとともに、この昇降枠21をエアシリ
ンダ28でレール26に沿って昇降するように形成し、
この昇降枠27に上記バキュームカップ15を支持しで
ある。
That is, a pedestal 21 is provided on one side of the cleaning conveyor 13 corresponding to each of a plurality of cleaning liquid tanks (not shown), and a movable rod 23 is mounted on the pedestal 21 via a rail 22 on the O-ra 12 of the cleaning conveyor 13. The movable frame 23 is supported so as to be movable in the same direction and in the opposite direction to the conveyance direction, and the movable frame 23 is formed so as to be movable along the rails 22 by a pair of air cylinders 24 and 25. The lifting frame 27 is supported so as to be able to rise and fall freely with respect to the cleaning conveyor 13 via the air cylinder 26, and the lifting frame 21 is formed so as to be moved up and down along the rail 26 by an air cylinder 28.
The vacuum cup 15 is supported on this elevating frame 27.

そうして、この構成によって、所定のインデックスタイ
ムで洗浄コンベア13によって各洗浄液槽の上部を間歇
搬送されるパネルPが各洗浄液槽の上部において静止す
る間を利用し、エアシリンダ28で昇降枠27を下降し
、バキュームカップ15を所定の圧力でパネルPの表面
に当接させてパネルPのシール面を所定の荷重でローラ
12に当接させるとともに、バキュームカップ15でパ
ネルPの表面を吸着し、この状態で、洗浄コンベア13
のローラ12を再び図示反時計方向に回動するとともに
、エアシリンダ24.25で移動枠23を洗浄コンベア
13のローラ12による搬送方向と同方向及び逆方向に
進)υ移動し、これによって、パネルPのシール面を洗
浄液11を含浸したローラ12で擦るようになっており
、この進退動作を所定の回数行なった後、パネルPがエ
アシリンダ24.25で進退動作の開始前の原点位置に
戻って停止し、この後、バキュームカップ15がパネル
Pの吸着を解除し、ついで、エアシリンダ28で昇降枠
27が上昇して、バキュームカップ15がパネルPから
離れた後、所定のインデックスタイムにしたがって、洗
浄コンベア13のローラ12が駆動し、パネルPが次の
洗浄液槽の上部に搬送され、次の洗浄液槽の上部で静止
すると、再び同じ動作が行なわれる。
With this configuration, the panel P, which is conveyed intermittently over the upper part of each cleaning liquid tank by the cleaning conveyor 13 at a predetermined index time, is stationary at the upper part of each cleaning liquid tank, and the air cylinder 28 moves the elevator frame 2 is lowered, the vacuum cup 15 is brought into contact with the surface of the panel P with a predetermined pressure, the sealing surface of the panel P is brought into contact with the roller 12 with a predetermined load, and the surface of the panel P is sucked with the vacuum cup 15. , In this state, the cleaning conveyor 13
The rollers 12 of the washing conveyor 13 are rotated counterclockwise in the drawing again, and the moving frame 23 is moved by the air cylinders 24 and 25 in the same direction and in the opposite direction to the conveyance direction by the rollers 12 of the cleaning conveyor 13. The sealing surface of the panel P is rubbed by a roller 12 impregnated with a cleaning liquid 11, and after this forward and backward movement is performed a predetermined number of times, the panel P is returned to the original position before the start of the forward and backward movement using air cylinders 24 and 25. After that, the vacuum cup 15 releases the adsorption of the panel P, and then the elevating frame 27 is raised by the air cylinder 28, and after the vacuum cup 15 is separated from the panel P, at a predetermined index time. Therefore, when the roller 12 of the cleaning conveyor 13 is driven and the panel P is conveyed to the upper part of the next cleaning liquid tank and comes to rest at the upper part of the next cleaning liquid tank, the same operation is performed again.

したがって、パネルPのシール面を効果的に洗浄するこ
とができ、後の工程で、パネルPとファンネルを封着し
、パネルPとファンネルから成るバルブのネック部に電
子銃を封止し、バルブ内の排気を行なった際に、パネル
Pのシール面の汚れが原因で封着が不十分になっていた
バルブが爆縮するという不良の発生を防止することがで
き、不良率を0.1%減らすことができた。
Therefore, the sealing surface of the panel P can be effectively cleaned, and in a later process, the panel P and the funnel are sealed, the electron gun is sealed in the neck of the valve consisting of the panel P and the funnel, and the valve is sealed. It is possible to prevent the occurrence of defects such as implosion of valves with insufficient sealing due to dirt on the sealing surface of panel P when the inside is evacuated, and the defective rate can be reduced to 0.1. % could be reduced.

なお、パネルPの洗浄に際して、この実施例では、ff
i11fJg程度のパネルPの場合、18Kg程度の荷
重でローラ12に当接させ、また、直径が90amのO
−ラ12を用い、ローラ12を11rl)1強で回転さ
せ、パネルPの進退距離を240m、パネルPの進退速
度を0.24m/sec 、パネルPの進退回数を1回
とした。
In addition, when cleaning the panel P, in this embodiment, ff
In the case of a panel P of about i11fJg, it is brought into contact with the roller 12 with a load of about 18 kg, and an O
- The roller 12 was rotated at a little over 11rl)1, the advancing and retreating distance of the panel P was 240 m, the advancing and retreating speed of the panel P was 0.24 m/sec, and the number of advancing and retreating times of the panel P was set to 1.

そして、この洗浄に際しての、パネルPの荷重、O−ラ
12の回転速度、パネルPの進退回数等は、変えること
ができ、たとえば、大きなパネルPの場合には、ローラ
12の回転を速くし、小さなパネルPの場合には、ロー
512の回転を遅くすることができ、さらに、この制御
をシーケンサで行ない、プログラムにより、洗浄コンベ
ア13の始端部にパネルPが搬入されたときから、パネ
ルPの大きさ等をデータとして残しておき、各洗浄液槽
において、そのパネルPが到着したとき、そのデータに
より、パネルPを最適の条件で洗浄することができる。
During this cleaning, the load on the panel P, the rotation speed of the O-ra 12, the number of times the panel P advances and retreats, etc. can be changed. For example, in the case of a large panel P, the rotation of the roller 12 may be made faster. , in the case of a small panel P, the rotation of the row 512 can be slowed down.Furthermore, this control is performed by a sequencer, and the panel P The size, etc. of the panel P can be left as data, and when the panel P arrives in each cleaning liquid tank, the panel P can be cleaned under optimal conditions using that data.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、洗浄コンベアの搬送用及び洗浄用のロ
ーラに支持したパネルの表面に対してバキュームカップ
を下降し、このバキュームカップでパネルを吸着すると
ともに、パネルのシール面をローラに対して所定の荷重
で当接させ、この状態で、ローラを回転させるとともに
、バキュームカップをO−ラによる搬送方向と同方向及
び逆方向に進退させ、パネルのシール面を0−ラで擦る
ことができるので、パネルのシール面を効果的に洗浄す
ることができ、前の■稈でパネルのシール面に句着した
ダグや蛍光体をきれいに落とすことができ、後の工程で
、バルブの排気を行なった際にバルブが爆縮する不良を
減らすことができる。
According to the present invention, a vacuum cup is lowered against the surface of the panel supported by the transport and cleaning rollers of the cleaning conveyor, and the vacuum cup adsorbs the panel, and the sealing surface of the panel is placed against the roller. They are brought into contact with a predetermined load, and in this state, the roller is rotated and the vacuum cup is advanced and retreated in the same direction and in the opposite direction to the conveyance direction by the O-ra, so that the sealing surface of the panel can be rubbed with the O-ra. Therefore, the sealing surface of the panel can be effectively cleaned, and the dust and phosphor that have formed on the sealing surface of the panel with the previous culm can be removed, and in the later process, the valve can be exhausted. It is possible to reduce defects such as valve implosion when the valve implodes.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の陰極I!ii管のパネルのシール面の
洗浄装置の一実施例を示す斜視図、第2図はその側面図
、第3図は従来の装置の平面図である。 P−・パネル、11・・洗浄液、12・・ローラ、13
・・洗浄コンベア、15・・バキュームカップ。 $ t (gJ
FIG. 1 shows the cathode I! of the present invention. 2 is a perspective view showing an embodiment of a device for cleaning the sealing surface of a panel of a tube, FIG. 2 is a side view thereof, and FIG. 3 is a plan view of a conventional device. P-・Panel, 11・・Cleaning liquid, 12・・Roller, 13
...Washing conveyor, 15...Vacuum cup. $t (gJ

Claims (3)

【特許請求の範囲】[Claims] (1)陰極線管の製造工程において、パネルのシール面
を洗浄する陰極線管のパネルのシール面の洗浄装置であ
つて、 パネルのシール面を支持して搬送するとともにパネルの
シール面を洗浄する複数の搬送用及び洗浄用のローラを
並設した洗浄コンベアと、この洗浄コンベアの上方に昇
降可能に形成されかつこの洗浄コンベアの搬送方向と同
方向及び逆方向に移動可能に形成され上記パネルの表面
を吸引するバキュームカップとを 具備したことを特徴とする陰極線管のパネルのシール面
の洗浄装置。
(1) A cathode ray tube panel seal surface cleaning device that cleans the panel seal surface in the cathode ray tube manufacturing process, which includes a plurality of cathode ray tube panel seal surface cleaning devices that support and transport the panel seal surface and also clean the panel seal surface. a cleaning conveyor with conveying and cleaning rollers arranged in parallel, and a cleaning conveyor formed above the cleaning conveyor so as to be movable up and down, and movable in the same direction and opposite direction to the conveyance direction of the cleaning conveyor, and a surface of the panel. A device for cleaning a sealing surface of a cathode ray tube panel, comprising: a vacuum cup for suctioning a vacuum cup;
(2)上記洗浄コンベアのローラは、その下側部を洗浄
液に浸漬したことを特徴とする特許請求の範囲第1項記
載の陰極線管のパネルのシール面の洗浄装置。
(2) The apparatus for cleaning the sealing surface of a cathode ray tube panel as set forth in claim 1, wherein the roller of the cleaning conveyor has its lower side immersed in a cleaning liquid.
(3)上記洗浄コンベアのローラは、洗浄液を含浸した
ことを特徴とする特許請求の範囲第1項または第2項記
載の陰極線管のパネルのシール面の洗浄装置。
(3) The apparatus for cleaning the sealing surface of a cathode ray tube panel according to claim 1 or 2, wherein the roller of the cleaning conveyor is impregnated with a cleaning liquid.
JP28969587A 1987-11-17 1987-11-17 Cleaning device for seal surface of cathode-ray tube panel Pending JPH01132027A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28969587A JPH01132027A (en) 1987-11-17 1987-11-17 Cleaning device for seal surface of cathode-ray tube panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28969587A JPH01132027A (en) 1987-11-17 1987-11-17 Cleaning device for seal surface of cathode-ray tube panel

Publications (1)

Publication Number Publication Date
JPH01132027A true JPH01132027A (en) 1989-05-24

Family

ID=17746548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28969587A Pending JPH01132027A (en) 1987-11-17 1987-11-17 Cleaning device for seal surface of cathode-ray tube panel

Country Status (1)

Country Link
JP (1) JPH01132027A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9876609B2 (en) 2003-12-01 2018-01-23 Qualcomm Incorporated Method and apparatus for providing an efficient control channel structure in a wireless communication system
US9967005B2 (en) 2002-10-25 2018-05-08 Qualcomm Incorporated Pilots for MIMO communication systems

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9967005B2 (en) 2002-10-25 2018-05-08 Qualcomm Incorporated Pilots for MIMO communication systems
US9876609B2 (en) 2003-12-01 2018-01-23 Qualcomm Incorporated Method and apparatus for providing an efficient control channel structure in a wireless communication system
US10742358B2 (en) 2003-12-01 2020-08-11 Qualcomm Incorporated Method and apparatus for providing an efficient control channel structure in a wireless communication system

Similar Documents

Publication Publication Date Title
CN105374725A (en) Joint device, joint system, and joint method
KR100837849B1 (en) Processing solution supplying method and processing solution supplying apparatus
JPH01132027A (en) Cleaning device for seal surface of cathode-ray tube panel
TWI417497B (en) Reduced-pressure drying device and reduced-pressure drying method
JP4768001B2 (en) ORGANIC EL DEVICE MANUFACTURING APPARATUS, ITS MANUFACTURING METHOD, FILM-FORMING APPARATUS, AND FILM-FORMING METHOD
CN1333292C (en) Method for producing liquid crystal display
US3746020A (en) Sealing land cleaning machine
CN115870295A (en) Full-automatic cleaning device and cleaning method for lower surface of glass lens in carrier
US3759735A (en) Panel method for cleaning the sealing land of a cathode ray tube faceplate
CN104415884B (en) Apparatus for coating and coating method
JP2000031106A (en) Substrate treating device
JPH0150058B2 (en)
JPH0940111A (en) Method and device for transfer of lcd glass substrate
US3832211A (en) Method of lacquering cathode ray tube panels
JP3346823B2 (en) Substrate wet processing equipment
JP2001044118A (en) Substrate treating device
JPS6063852A (en) Device for washing sealing surface of panel
KR200147976Y1 (en) Panel loader
JPH06289625A (en) Developing device
KR100189838B1 (en) A panel cleaning apparatus of c.r.t.
JP2004174385A (en) Method and equipment for cleaning substrate
CN100356242C (en) Method for making liquid crystal display device
CN1263064C (en) Seat for fixing glass base plate
KR20140080775A (en) Manufacture Apparatus of Plat Display Panel
JPH07169394A (en) Thin film forming apparatus for cathode-ray tube