JPH01129258U - - Google Patents

Info

Publication number
JPH01129258U
JPH01129258U JP2483688U JP2483688U JPH01129258U JP H01129258 U JPH01129258 U JP H01129258U JP 2483688 U JP2483688 U JP 2483688U JP 2483688 U JP2483688 U JP 2483688U JP H01129258 U JPH01129258 U JP H01129258U
Authority
JP
Japan
Prior art keywords
side bearing
bearing body
drive shaft
drive
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2483688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0538054Y2 (US06272168-20010807-M00014.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988024836U priority Critical patent/JPH0538054Y2/ja
Publication of JPH01129258U publication Critical patent/JPH01129258U/ja
Application granted granted Critical
Publication of JPH0538054Y2 publication Critical patent/JPH0538054Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1988024836U 1988-02-25 1988-02-25 Expired - Lifetime JPH0538054Y2 (US06272168-20010807-M00014.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988024836U JPH0538054Y2 (US06272168-20010807-M00014.png) 1988-02-25 1988-02-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988024836U JPH0538054Y2 (US06272168-20010807-M00014.png) 1988-02-25 1988-02-25

Publications (2)

Publication Number Publication Date
JPH01129258U true JPH01129258U (US06272168-20010807-M00014.png) 1989-09-04
JPH0538054Y2 JPH0538054Y2 (US06272168-20010807-M00014.png) 1993-09-27

Family

ID=31245036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988024836U Expired - Lifetime JPH0538054Y2 (US06272168-20010807-M00014.png) 1988-02-25 1988-02-25

Country Status (1)

Country Link
JP (1) JPH0538054Y2 (US06272168-20010807-M00014.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62102029U (US06272168-20010807-M00014.png) * 1985-12-19 1987-06-29

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62102029U (US06272168-20010807-M00014.png) * 1985-12-19 1987-06-29

Also Published As

Publication number Publication date
JPH0538054Y2 (US06272168-20010807-M00014.png) 1993-09-27

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