JPH01129257U - - Google Patents

Info

Publication number

JPH01129257U

JPH01129257U JP2556588U JP2556588U JPH01129257U JP H01129257 U JPH01129257 U JP H01129257U JP 2556588 U JP2556588 U JP 2556588U JP 2556588 U JP2556588 U JP 2556588U JP H01129257 U JPH01129257 U JP H01129257U

Authority

JP

Japan

Prior art keywords

vapor deposition

thin film

power supply

evaporation source

deposition chamber

Prior art date

1988-02-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000007740 vapor deposition Methods 0.000 claims description 7
• 230000008020 evaporation Effects 0.000 claims description 5
• 238000001704 evaporation Methods 0.000 claims description 5
• 239000000758 substrate Substances 0.000 claims description 4
• 239000010409 thin film Substances 0.000 claims 4
• 238000010438 heat treatment Methods 0.000 claims 2
• 239000000463 material Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2