JPH01128216A - Manufacture of thin film magnetic head - Google Patents
Manufacture of thin film magnetic headInfo
- Publication number
- JPH01128216A JPH01128216A JP28586887A JP28586887A JPH01128216A JP H01128216 A JPH01128216 A JP H01128216A JP 28586887 A JP28586887 A JP 28586887A JP 28586887 A JP28586887 A JP 28586887A JP H01128216 A JPH01128216 A JP H01128216A
- Authority
- JP
- Japan
- Prior art keywords
- slider
- bearing surface
- thin film
- magnetic pole
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 24
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000010408 film Substances 0.000 claims abstract description 29
- 238000000034 method Methods 0.000 claims abstract description 24
- 230000001681 protective effect Effects 0.000 claims description 16
- 238000005260 corrosion Methods 0.000 claims description 10
- 230000007797 corrosion Effects 0.000 claims description 9
- 238000003754 machining Methods 0.000 claims description 5
- 238000005498 polishing Methods 0.000 claims description 5
- 238000000926 separation method Methods 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 11
- 239000000758 substrate Substances 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 2
- 238000004544 sputter deposition Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 235000010149 Brassica rapa subsp chinensis Nutrition 0.000 description 1
- 235000000536 Brassica rapa subsp pekinensis Nutrition 0.000 description 1
- 241000499436 Brassica rapa subsp. pekinensis Species 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- AJCDFVKYMIUXCR-UHFFFAOYSA-N oxobarium;oxo(oxoferriooxy)iron Chemical compound [Ba]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O AJCDFVKYMIUXCR-UHFFFAOYSA-N 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/40—Protective measures on heads, e.g. against excessive temperature
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
この発明は磁気記録再生装量に用いろ薄膜磁気ヘッドの
製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention This invention relates to a method of manufacturing a thin film magnetic head for use in magnetic recording and reproducing equipment.
従来の技術
従来の薄膜磁気ヘッドは第４図の要部断面図に示すよう
に、スライダ］に薄膜トランデエ、−サ−２がスライダ
トレーリングエツジ部に形成されており、３は薄膜トラ
ンデューサー２を保護するための保護膜、４はスライダ
気体軸受面であって、記録媒体の起動停止時にスライダ
はこの面を介して記録媒体と直接摺動接触する。このよ
うな方式はコンタクトスタートストップ方式（以下Ｃ８
Ｓと略記する）と呼ばれている。このような方式ではス
ライダの記録媒体とのＣ８Ｓ時における耐摩耗性が重要
である。2. Description of the Related Art As shown in the sectional view of the main part of a conventional thin film magnetic head in FIG. 4 is a slider gas bearing surface, through which the slider comes into direct sliding contact with the recording medium when the recording medium is started or stopped. This type of method is called the contact start/stop method (hereinafter referred to as C8).
(abbreviated as S). In such a system, the wear resistance of the slider with the recording medium during C8S is important.
上記実用化されている薄膜磁気ヘッドにおいては、スラ
イダ面押付圧力は４〜５ ｇｆ／ｍｍ ２程度の犬ぎな
値となるため、スライダ材料は、例えばビッカース硬度
２０００のアルミナチタンカーバイド（Ａ１２０３７０
重量％、ＴｉＣ３０重量％）等の高硬度材料が用いられ
ている。このような薄膜磁気ヘッドの構成においては、
主にヘッドの機械的な加工性において問題があり、従来
のチタン酸バリウム、フェライト、フオトセラムなどの
スライダ材と比較すると硬度か極めて高いため機械加工
が難しく、スライダ気体軸受面の耐チッピング性あ、る
いは平面度等に問題が生じるおそれがある。In the thin-film magnetic head that has been put into practical use, the slider surface pressing pressure is about 4 to 5 gf/mm2, which is too low, so the slider material is, for example, alumina titanium carbide (A120370) with a Vickers hardness of 2000.
A high hardness material such as TiC (30% by weight) is used. In the configuration of such a thin film magnetic head,
There are mainly problems in the mechanical workability of the head, and compared to conventional slider materials such as barium titanate, ferrite, and photoceram, the hardness is extremely high, making machining difficult, and the chipping resistance of the slider gas bearing surface is poor. Otherwise, problems may arise in flatness, etc.
従来の薄膜磁気ヘッドの製造工程においては、構造上か
ら生ずる他の問題点も存在する。ウニハーニ程により素
子形成がなされたウェハーは横列ヘッド素子単位にスラ
イスされ、治具に固定されスライダ気体軸受面研摩が施
される。次にこれらは個々のチップ単位に切断された後
、アセンブリとし、て組立てられる。このため、スライ
ダ気体軸受面研摩後の磁極先端は露出されたままの状態
となり、後の加工、組立工程あるいは組立て後の保管状
態においても磁極先端腐食が起りや丁いという欠点があ
った。In the manufacturing process of conventional thin film magnetic heads, there are other problems arising from the structure. The wafer on which elements have been formed by the uniharniing process is sliced into row head element units, fixed to a jig, and the slider gas bearing surface is polished. These are then cut into individual chips and then assembled into an assembly. For this reason, the tip of the magnetic pole remains exposed after the slider gas bearing surface is polished, and there is a drawback that corrosion of the tip of the magnetic pole occurs during subsequent machining and assembly steps, or even during storage after assembly.
これらの問題点に対して、薄膜磁気ヘッドの耐摩耗性に
関しては特開昭５７−１８３６２３号公報に示されるよ
うに、スライダ気体軸受面に保護膜を形成する方法が考
案されているが、磁極先端腐食に対する対策・ｌ工考え
られていない。To solve these problems, a method of forming a protective film on the slider gas bearing surface has been devised as shown in Japanese Patent Application Laid-Open No. 57-183623 regarding the wear resistance of thin-film magnetic heads. No countermeasures or engineering measures have been taken against tip corrosion.
又、磁極先端腐食に対して、特開昭５６−２１号公報に
示されているように、ヘッド浮上面のみ処理されるよう
にマスクを用いて選択的に耐摩耗性保護膜を形成する方
法が考案されているが具体的な成膜方法（チップの固定
方法）について実用に供せられるような考慮がなされて
いなかった。In addition, to prevent corrosion at the tip of the magnetic pole, there is a method of selectively forming a wear-resistant protective film using a mask so that only the air bearing surface of the head is treated, as shown in Japanese Unexamined Patent Publication No. 56-21. has been devised, but no consideration has been given to the specific film formation method (chip fixing method) so that it can be put to practical use.
発明が解決しようとする問題点
スライダ気体軸′受面上の保護膜形成は前述のように薄
膜磁気ヘッドの品質及び性能の向上に有効であるが、一
定膜厚の保護膜を安定にスライダの一部に形成しようと
すると種々の問題が生ずることを認識し７ておく必要が
ある。Problems to be Solved by the Invention Although the formation of a protective film on the slider gas shaft bearing surface is effective in improving the quality and performance of thin-film magnetic heads as described above, it is not possible to stably form a protective film of a constant thickness on the slider. It is necessary to be aware that various problems will occur if you try to form it in one part.
すなわち、第一に、スライダ単位に分離した後に成膜す
るには個々のスライダを被成膜面を露出して処理台上に
並べる必要が生じ、処理上の工数がかかる。That is, firstly, in order to form a film after separating the sliders into sliders, it is necessary to arrange the individual sliders on a processing table with their film-forming surfaces exposed, which increases the number of processing steps.
第２に、上記成膜が可能な方法としては、スパンタリン
グ法のようなプラズマプロセスを用いることが有効であ
るが、処理時に被処理材の温度上昇が問題となることが
あり、被処理材を冷却板に固定する必要が生ずるが、ス
ライダ単位での固定は工数上の制約及びスライダの破損
、固定材による汚染等の危険性を伴う。スライダの温度
上昇は、磁気特性の劣化、熱応力あるいは材料変質によ
る素子の破損の原因となる。Second, as a method for forming the above film, it is effective to use a plasma process such as the sputtering method, but the temperature rise of the treated material during treatment may become a problem. It becomes necessary to fix the slider to the cooling plate, but fixing each slider involves a restriction in man-hours and risks such as damage to the slider and contamination by the fixing material. An increase in the temperature of the slider causes deterioration of magnetic properties and damage to the element due to thermal stress or material deterioration.
この発明の目的は、前述のような従来の薄Ｍｈ’Ｂ気ヘ
ッドにおける欠点を改善して、記録特性を損うことなく
、摺動特性ならびに磁極先端の耐腐食性に優れた保護膜
を有する薄膜磁気ヘッドの製造方法を提供することにあ
る。An object of the present invention is to improve the drawbacks of the conventional thin Mh'B magnetic head as described above, and to provide a protective film with excellent sliding characteristics and corrosion resistance on the tip of the magnetic pole without impairing the recording characteristics. An object of the present invention is to provide a method for manufacturing a thin film magnetic head.
問題点を解決するための手段
本発明者らは上記の目的を達成すべく種々研究の結果、
スライダ気体軸受面研摩後、個々のチップに分離する前
の段階で、スライダ気体軸受面及び磁極先端部に同時に
保護膜を成膜するようにし、保護膜形成後に個々のチッ
プ単位に切断加工すれば、加工、組立工程での磁極先端
腐食を防止し、かつ摺動面の摺動特性に優れた保護膜を
最小限お工程で形成可能であること見出し、本発明に到
達した。Means for Solving the Problems The present inventors have conducted various studies to achieve the above object, and as a result,
After polishing the slider gas bearing surface and before separating it into individual chips, a protective film is simultaneously formed on the slider gas bearing surface and the tip of the magnetic pole, and after the protective film is formed, the chips are cut into individual chips. We have discovered that it is possible to form a protective film that prevents corrosion of the magnetic pole tip during processing and assembly processes and has excellent sliding properties on the sliding surface in a minimum number of processes, and has arrived at the present invention.
したがって本発明は、
コンタクトスタートストップを行う磁気ディスク装置の
スライダに接着した薄膜磁気ヘッドの機械加工工程にお
いて、スライダ気体軸受面研摩終了後、個々のチップに
分離する前の段階でスライダ気体軸受面及び磁極先端部
に同時に保護膜を形成することを特徴とする、記録特性
を損うことなく摺動特性ならびに磁極先端の耐腐食特性
に優れた薄膜磁気ヘッドの製造方法である。Therefore, in the machining process of a thin-film magnetic head bonded to a slider of a magnetic disk device that performs contact start/stop, the present invention provides a process for machining the slider gas bearing surface and the slider gas bearing surface after polishing the slider gas bearing surface and before separating them into individual chips. This is a method for manufacturing a thin film magnetic head that has excellent sliding characteristics and anti-corrosion properties of the magnetic pole tip without impairing recording characteristics, the method comprising simultaneously forming a protective film on the tip of the magnetic pole.
作用
本発明の方法によれば、前述の如く、個々のチップに切
断する前の段階でスライダ気体軸受面及び磁極先端部に
同時に保護膜を形成することにより摺動面の摺動特性の
向上ならびに磁極先端耐腐食性の向上とを同時に満たす
ことが可能となるのである。According to the method of the present invention, as described above, by simultaneously forming a protective film on the slider gas bearing surface and the tip of the magnetic pole before cutting into individual chips, it is possible to improve the sliding characteristics of the sliding surface and This makes it possible to simultaneously improve the corrosion resistance of the magnetic pole tip.
実施例
本発明の実施例の薄膜磁気ヘッドを示す第１図、加工工
程を示す第２図に基いて以下説明する。Embodiment A description will be given below with reference to FIG. 1 showing a thin film magnetic head according to an embodiment of the present invention, and FIG. 2 showing the processing steps.
本発明の方法による薄膜磁気ヘッドは、スライダ気体軸
受面４１と薄膜トランスデユーサ３１を、耐摩耗性及び
磁極先端耐腐食性ともに優れる保護膜５で構成し、スラ
イダブロック１１は硬度が保護膜３１とほぼ同一の加工
しやすい材料で構成することを特徴とするものである。In the thin film magnetic head according to the method of the present invention, the slider gas bearing surface 41 and the thin film transducer 31 are constructed with a protective film 5 having excellent wear resistance and magnetic pole tip corrosion resistance. It is characterized by being constructed of the same easy-to-process material as .
このような構成にすることにより、スライダブロック１
１は記録媒体と直接接することがないため、機械加工の
容易な例えばフオトセラム等の他の材料を使用すること
ができる。With this configuration, slider block 1
Since material No. 1 does not come into direct contact with the recording medium, other materials that are easy to machine, such as photoceram, can be used.
具体的な成膜手順としては、第２図ｆａ）のスライダ気
体軸受面研摩終了の段階で研摩治具７に固定したままで
、第３図に示す高周波スパッタ装置の基板電極Ｈに固定
し、ターゲット９を有１″ろターゲット電極に高周波電
圧を印加して治具上に固定されたスライダ表面にターゲ
ット材料を成膜−Ｊ−る。The specific film forming procedure is to fix the slider to the substrate electrode H of the high frequency sputtering apparatus shown in FIG. 3 while it is fixed to the polishing jig 7 at the stage of finishing the polishing of the slider gas bearing surface shown in FIG. A target material is formed into a film on the surface of a slider fixed on a jig by applying a high frequency voltage to a 1'' target electrode having a target 9.
本実施例ではバイアススパッタによる成膜例を示したが
、一般にバイアススパッタ法によれば、段差部での被膜
性能及び基板との密着性に優れた膜の作成が可能である
。In this embodiment, an example of film formation by bias sputtering was shown, but in general, by bias sputtering, it is possible to create a film with excellent coating performance at stepped portions and excellent adhesion to the substrate.
また、スライダは治具ごと基板電極に固定されているた
め、電極を水冷することにより容易にスライダの温度上
昇を抑制Ｊ−ることかできる。Furthermore, since the slider is fixed to the substrate electrode along with the jig, the rise in temperature of the slider can be easily suppressed by cooling the electrode with water.
なお、本発明は上記実施例に限定されるものでは無く、
例えば連続酸１漠により、性質の異る２層膜を形成する
ことも可能であり、また、保護膜形成方法について、ス
パッタ法以外の例えは真空蒸着法、真空蒸着とイオン照
射の併用なども適用できることは白菜者にとって容易に
理解されるところである。Note that the present invention is not limited to the above embodiments,
For example, it is possible to form two-layer films with different properties using one continuous acid, and other methods for forming a protective film include vacuum evaporation, a combination of vacuum evaporation and ion irradiation, etc. It is easy for Chinese cabbage growers to understand that it is applicable.
発明の効果
以上の説明から明らかなように、本発明の製造方法によ
れば摺動特性並びに磁極先端の耐腐食性ともに優れた薄
膜磁気ヘッドを得ることができる。Effects of the Invention As is clear from the above explanation, according to the manufacturing method of the present invention, it is possible to obtain a thin film magnetic head that is excellent in both sliding characteristics and corrosion resistance of the magnetic pole tip.
第１図は本発明による薄膜磁気ヘッドの断面図、第２図
は従来の薄膜磁気へノドの加工工程を示す図、第３図は
本発明の実施例の薄膜磁気へノドの製造方法のうち保護
膜形成方法を示す図、第４図は従来の薄膜磁気ヘッドの
断面図である。
１．１１ ・・・スライダブロック
２．２１・・・薄膜トランスデユーサ
３．３１・・・薄膜トランスデー−サ保護膜４．４１・
・・スライダ気体軸受面
５・・・保護膜
６・・・横列ヘッド素子
７・・・治具
８・・・スライダ
９・・・ターゲット
１０・・・ターゲット電極
１１・・・基板電極
Ｊ２・・・真空槽
］３・、１３１・・・高周波電源
特許出願人 住友金属工業株式会社
（外４名）
第４ 図 尾ノ １
尾２図
（ｂ。FIG. 1 is a cross-sectional view of a thin film magnetic head according to the present invention, FIG. 2 is a diagram showing the processing steps of a conventional thin film magnetic head, and FIG. 3 is a diagram showing a method of manufacturing a thin film magnetic head according to an embodiment of the present invention. FIG. 4, which is a diagram showing a method of forming a protective film, is a sectional view of a conventional thin film magnetic head. 1.11...Slider block 2.21...Thin film transducer 3.31...Thin film transducer protective film 4.41.
... Slider gas bearing surface 5 ... Protective film 6 ... Row head element 7 ... Jig 8 ... Slider 9 ... Target 10 ... Target electrode 11 ... Substrate electrode J2 ...・Vacuum chamber] 3., 131... High frequency power supply patent applicant Sumitomo Metal Industries, Ltd. (4 others) Figure 4 Tail 1 Figure 2 (b.
Claims (1)
スライダに接着した薄膜磁気ヘッドの機械加工工程にお
いて、 スライダ気体軸受面研摩終了後、個々のチップに分離す
る前の段階でスライダ気体軸受面及び磁極先端部に同時
に保護膜を形成することを特徴とする、 記録特性を損うことなく摺動特性ならびに磁極先端の耐
腐食性に優れた薄膜磁気ヘッドの製造方法。[Claims] In the machining process of a thin-film magnetic head bonded to the slider of a magnetic disk device that performs contact start/stop, the slider gas bearing surface is removed after polishing the slider gas bearing surface and before separation into individual chips. A method for manufacturing a thin film magnetic head having excellent sliding characteristics and corrosion resistance of the magnetic pole tip without impairing recording characteristics, the method comprising simultaneously forming a protective film on the tip of the magnetic pole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28586887A JPH01128216A (en) | 1987-11-12 | 1987-11-12 | Manufacture of thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28586887A JPH01128216A (en) | 1987-11-12 | 1987-11-12 | Manufacture of thin film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01128216A true JPH01128216A (en) | 1989-05-19 |
Family
ID=17697077
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28586887A Pending JPH01128216A (en) | 1987-11-12 | 1987-11-12 | Manufacture of thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01128216A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7269889B2 (en) | 2001-09-11 | 2007-09-18 | Tdk Corporation | Method of manufacturing a magnetic head |
| JP2007257752A (en) * | 2006-03-24 | 2007-10-04 | Shinka Jitsugyo Kk | Manufacturing method of slider |
-
1987
- 1987-11-12 JP JP28586887A patent/JPH01128216A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7269889B2 (en) | 2001-09-11 | 2007-09-18 | Tdk Corporation | Method of manufacturing a magnetic head |
| JP2007257752A (en) * | 2006-03-24 | 2007-10-04 | Shinka Jitsugyo Kk | Manufacturing method of slider |
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