JPH01128003U - - Google Patents

Info

Publication number
JPH01128003U
JPH01128003U JP2411388U JP2411388U JPH01128003U JP H01128003 U JPH01128003 U JP H01128003U JP 2411388 U JP2411388 U JP 2411388U JP 2411388 U JP2411388 U JP 2411388U JP H01128003 U JPH01128003 U JP H01128003U
Authority
JP
Japan
Prior art keywords
diaphragm
stage
negative pressure
diaphragms
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2411388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH066248Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2411388U priority Critical patent/JPH066248Y2/ja
Publication of JPH01128003U publication Critical patent/JPH01128003U/ja
Application granted granted Critical
Publication of JPH066248Y2 publication Critical patent/JPH066248Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP2411388U 1988-02-25 1988-02-25 2段式アクチュエータ Expired - Lifetime JPH066248Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2411388U JPH066248Y2 (ja) 1988-02-25 1988-02-25 2段式アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2411388U JPH066248Y2 (ja) 1988-02-25 1988-02-25 2段式アクチュエータ

Publications (2)

Publication Number Publication Date
JPH01128003U true JPH01128003U (US06252093-20010626-C00008.png) 1989-08-31
JPH066248Y2 JPH066248Y2 (ja) 1994-02-16

Family

ID=31243680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2411388U Expired - Lifetime JPH066248Y2 (ja) 1988-02-25 1988-02-25 2段式アクチュエータ

Country Status (1)

Country Link
JP (1) JPH066248Y2 (US06252093-20010626-C00008.png)

Also Published As

Publication number Publication date
JPH066248Y2 (ja) 1994-02-16

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