JPH01125441U - - Google Patents

Info

Publication number

JPH01125441U

JPH01125441U JP1988019286U JP1928688U JPH01125441U JP H01125441 U JPH01125441 U JP H01125441U JP 1988019286 U JP1988019286 U JP 1988019286U JP 1928688 U JP1928688 U JP 1928688U JP H01125441 U JPH01125441 U JP H01125441U

Authority

JP

Japan

Prior art keywords

light

photomask

photoresist film

transmitting region

shielding film

Prior art date

1988-02-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 229920002120 photoresistant polymer Polymers 0.000 claims description 5
• 239000000758 substrate Substances 0.000 claims description 3
• 239000011521 glass Substances 0.000 claims description 2
• 238000007599 discharging Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 230000002093 peripheral effect Effects 0.000 description 2
• 239000011800 void material Substances 0.000 description 1