JPH01125368U - - Google Patents
Info
- Publication number
- JPH01125368U JPH01125368U JP1987188U JP1987188U JPH01125368U JP H01125368 U JPH01125368 U JP H01125368U JP 1987188 U JP1987188 U JP 1987188U JP 1987188 U JP1987188 U JP 1987188U JP H01125368 U JPH01125368 U JP H01125368U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- organometallic
- vapor phase
- crystal growth
- reaction tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005336 cracking Methods 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 4
- 125000002524 organometallic group Chemical group 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000000197 pyrolysis Methods 0.000 claims description 3
- 239000012808 vapor phase Substances 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims 3
- 150000004678 hydrides Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987188U JPH01125368U (en:Method) | 1988-02-17 | 1988-02-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987188U JPH01125368U (en:Method) | 1988-02-17 | 1988-02-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01125368U true JPH01125368U (en:Method) | 1989-08-25 |
Family
ID=31235765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987188U Pending JPH01125368U (en:Method) | 1988-02-17 | 1988-02-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01125368U (en:Method) |
-
1988
- 1988-02-17 JP JP1987188U patent/JPH01125368U/ja active Pending
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