JPH01124655U - - Google Patents

Info

Publication number

JPH01124655U

JPH01124655U JP2013288U JP2013288U JPH01124655U JP H01124655 U JPH01124655 U JP H01124655U JP 2013288 U JP2013288 U JP 2013288U JP 2013288 U JP2013288 U JP 2013288U JP H01124655 U JPH01124655 U JP H01124655U

Authority

JP

Japan

Prior art keywords

target

ion

ion implantation

ion beam

amount

Prior art date

1988-02-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005468 ion implantation Methods 0.000 claims description 3
• 238000010884 ion-beam technique Methods 0.000 claims description 3
• 239000012535 impurity Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1

Cited By (2)