JPH01121935U - - Google Patents

Info

Publication number
JPH01121935U
JPH01121935U JP1720488U JP1720488U JPH01121935U JP H01121935 U JPH01121935 U JP H01121935U JP 1720488 U JP1720488 U JP 1720488U JP 1720488 U JP1720488 U JP 1720488U JP H01121935 U JPH01121935 U JP H01121935U
Authority
JP
Japan
Prior art keywords
substrate support
semiconductor substrate
surface side
layer
outer layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1720488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1720488U priority Critical patent/JPH01121935U/ja
Publication of JPH01121935U publication Critical patent/JPH01121935U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP1720488U 1988-02-10 1988-02-10 Pending JPH01121935U (US06633600-20031014-M00021.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1720488U JPH01121935U (US06633600-20031014-M00021.png) 1988-02-10 1988-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1720488U JPH01121935U (US06633600-20031014-M00021.png) 1988-02-10 1988-02-10

Publications (1)

Publication Number Publication Date
JPH01121935U true JPH01121935U (US06633600-20031014-M00021.png) 1989-08-18

Family

ID=31230777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1720488U Pending JPH01121935U (US06633600-20031014-M00021.png) 1988-02-10 1988-02-10

Country Status (1)

Country Link
JP (1) JPH01121935U (US06633600-20031014-M00021.png)

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