JPH01120035U - - Google Patents

Info

Publication number
JPH01120035U
JPH01120035U JP1316988U JP1316988U JPH01120035U JP H01120035 U JPH01120035 U JP H01120035U JP 1316988 U JP1316988 U JP 1316988U JP 1316988 U JP1316988 U JP 1316988U JP H01120035 U JPH01120035 U JP H01120035U
Authority
JP
Japan
Prior art keywords
clean room
ultra
air
control system
airflow control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1316988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1316988U priority Critical patent/JPH01120035U/ja
Publication of JPH01120035U publication Critical patent/JPH01120035U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1316988U 1988-02-02 1988-02-02 Pending JPH01120035U (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1316988U JPH01120035U (US08063081-20111122-C00044.png) 1988-02-02 1988-02-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1316988U JPH01120035U (US08063081-20111122-C00044.png) 1988-02-02 1988-02-02

Publications (1)

Publication Number Publication Date
JPH01120035U true JPH01120035U (US08063081-20111122-C00044.png) 1989-08-15

Family

ID=31223262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1316988U Pending JPH01120035U (US08063081-20111122-C00044.png) 1988-02-02 1988-02-02

Country Status (1)

Country Link
JP (1) JPH01120035U (US08063081-20111122-C00044.png)

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