JPH01119065U - - Google Patents

Info

Publication number

JPH01119065U

JPH01119065U JP1398488U JP1398488U JPH01119065U JP H01119065 U JPH01119065 U JP H01119065U JP 1398488 U JP1398488 U JP 1398488U JP 1398488 U JP1398488 U JP 1398488U JP H01119065 U JPH01119065 U JP H01119065U

Authority

JP

Japan

Prior art keywords

liquid nitrogen

shroud

molecular beam

extraction port

nitrogen shroud

Prior art date

1988-02-03

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
• 239000007788 liquid Substances 0.000 claims description 4
• 229910052757 nitrogen Inorganic materials 0.000 claims description 4
• 238000000605 extraction Methods 0.000 claims description 2
• 239000000463 material Substances 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1