JPH01116452A - High frequency probe card - Google Patents

High frequency probe card

Info

Publication number
JPH01116452A
JPH01116452A JP27503987A JP27503987A JPH01116452A JP H01116452 A JPH01116452 A JP H01116452A JP 27503987 A JP27503987 A JP 27503987A JP 27503987 A JP27503987 A JP 27503987A JP H01116452 A JPH01116452 A JP H01116452A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
high frequency
earth surface
conductor
strip conductors
surface conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27503987A
Inventor
Haruo Mori
Akinori Tsukuda
Original Assignee
Oki Electric Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE: To achieve a better impedance and matching in a strip conductor by arranging the strip conductor almost parallel with an earth surface conductor through a dielectric substrate.
CONSTITUTION: A plurality of narrow strip conductors 12 each with a probe needle 14 connected are provided and a broad earth surface conductor 13 is arranged almost parallel with the narrow strip conductors 12 through dielectric substrates 10-1 and 10-2. The strip conductors 12, the dielectric substrates 10-1 and 10-2 and the earth surface conductor 13 functions as a microstrip line to reduce a transmission loss of a high frequency signal flowing through the strip conductors 12 while enabling the facilitation of an impedance and a matching. Moreover, the earth surface conductor is allowed to absorb a high frequency noise, otherwise released outside.
COPYRIGHT: (C)1989,JPO&Japio
JP27503987A 1987-10-30 1987-10-30 High frequency probe card Pending JPH01116452A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27503987A JPH01116452A (en) 1987-10-30 1987-10-30 High frequency probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27503987A JPH01116452A (en) 1987-10-30 1987-10-30 High frequency probe card

Publications (1)

Publication Number Publication Date
JPH01116452A true true JPH01116452A (en) 1989-05-09

Family

ID=17550012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27503987A Pending JPH01116452A (en) 1987-10-30 1987-10-30 High frequency probe card

Country Status (1)

Country Link
JP (1) JPH01116452A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5144228A (en) * 1991-04-23 1992-09-01 International Business Machines Corporation Probe interface assembly
US7683645B2 (en) * 2006-07-06 2010-03-23 Mpi Corporation High-frequency probe card and transmission line for high-frequency probe card
WO2015137023A1 (en) * 2014-03-11 2015-09-17 新東工業株式会社 Inspection system for device to be tested, and method for operating inspection system for device to be tested

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5144228A (en) * 1991-04-23 1992-09-01 International Business Machines Corporation Probe interface assembly
US7683645B2 (en) * 2006-07-06 2010-03-23 Mpi Corporation High-frequency probe card and transmission line for high-frequency probe card
WO2015137023A1 (en) * 2014-03-11 2015-09-17 新東工業株式会社 Inspection system for device to be tested, and method for operating inspection system for device to be tested
JPWO2015137023A1 (en) * 2014-03-11 2017-04-06 新東工業株式会社 The test system of the device under test, and its method of operation

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