JPH01115234U - - Google Patents

Info

Publication number
JPH01115234U
JPH01115234U JP818688U JP818688U JPH01115234U JP H01115234 U JPH01115234 U JP H01115234U JP 818688 U JP818688 U JP 818688U JP 818688 U JP818688 U JP 818688U JP H01115234 U JPH01115234 U JP H01115234U
Authority
JP
Japan
Prior art keywords
wafer
central axes
orientation flat
distance
equal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP818688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP818688U priority Critical patent/JPH01115234U/ja
Publication of JPH01115234U publication Critical patent/JPH01115234U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP818688U 1988-01-27 1988-01-27 Pending JPH01115234U (US07922777-20110412-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP818688U JPH01115234U (US07922777-20110412-C00004.png) 1988-01-27 1988-01-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP818688U JPH01115234U (US07922777-20110412-C00004.png) 1988-01-27 1988-01-27

Publications (1)

Publication Number Publication Date
JPH01115234U true JPH01115234U (US07922777-20110412-C00004.png) 1989-08-03

Family

ID=31213840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP818688U Pending JPH01115234U (US07922777-20110412-C00004.png) 1988-01-27 1988-01-27

Country Status (1)

Country Link
JP (1) JPH01115234U (US07922777-20110412-C00004.png)

Similar Documents

Publication Publication Date Title
JPH01115234U (US07922777-20110412-C00004.png)
JPS6284184U (US07922777-20110412-C00004.png)
JPS61207177U (US07922777-20110412-C00004.png)
JPS62165837U (US07922777-20110412-C00004.png)
JPS644170U (US07922777-20110412-C00004.png)
JPS6448001U (US07922777-20110412-C00004.png)
JPH0326477U (US07922777-20110412-C00004.png)
JPH0330349U (US07922777-20110412-C00004.png)
JPS61186231U (US07922777-20110412-C00004.png)
JPH0164002U (US07922777-20110412-C00004.png)
JPS6230343U (US07922777-20110412-C00004.png)
JPS63120726U (US07922777-20110412-C00004.png)
JPS63152416U (US07922777-20110412-C00004.png)
JPS63187348U (US07922777-20110412-C00004.png)
JPS62139383U (US07922777-20110412-C00004.png)
JPS6170947U (US07922777-20110412-C00004.png)
JPH0158958U (US07922777-20110412-C00004.png)
JPH0355420U (US07922777-20110412-C00004.png)
JPS6285519U (US07922777-20110412-C00004.png)
JPS6394417U (US07922777-20110412-C00004.png)
JPH038600U (US07922777-20110412-C00004.png)
JPS63140633U (US07922777-20110412-C00004.png)
JPH0313117U (US07922777-20110412-C00004.png)
JPS61138588U (US07922777-20110412-C00004.png)
JPS63121568U (US07922777-20110412-C00004.png)