JPH01115151U - - Google Patents
Info
- Publication number
- JPH01115151U JPH01115151U JP965388U JP965388U JPH01115151U JP H01115151 U JPH01115151 U JP H01115151U JP 965388 U JP965388 U JP 965388U JP 965388 U JP965388 U JP 965388U JP H01115151 U JPH01115151 U JP H01115151U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- objective lens
- vacuum
- diaphragm
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims 2
- 238000004458 analytical method Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP965388U JPH01115151U (cs) | 1988-01-29 | 1988-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP965388U JPH01115151U (cs) | 1988-01-29 | 1988-01-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01115151U true JPH01115151U (cs) | 1989-08-02 |
Family
ID=31216583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP965388U Pending JPH01115151U (cs) | 1988-01-29 | 1988-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01115151U (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05325859A (ja) * | 1992-05-22 | 1993-12-10 | Hitachi Ltd | 電子線照射装置 |
| JP2011138649A (ja) * | 2009-12-28 | 2011-07-14 | Hitachi High-Technologies Corp | 電子顕微鏡 |
-
1988
- 1988-01-29 JP JP965388U patent/JPH01115151U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05325859A (ja) * | 1992-05-22 | 1993-12-10 | Hitachi Ltd | 電子線照射装置 |
| JP2011138649A (ja) * | 2009-12-28 | 2011-07-14 | Hitachi High-Technologies Corp | 電子顕微鏡 |
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