JPH0110920Y2 - - Google Patents
Info
- Publication number
- JPH0110920Y2 JPH0110920Y2 JP305383U JP305383U JPH0110920Y2 JP H0110920 Y2 JPH0110920 Y2 JP H0110920Y2 JP 305383 U JP305383 U JP 305383U JP 305383 U JP305383 U JP 305383U JP H0110920 Y2 JPH0110920 Y2 JP H0110920Y2
- Authority
- JP
- Japan
- Prior art keywords
- gear
- rotation
- shutter
- attached
- introducer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 description 13
- 230000033001 locomotion Effects 0.000 description 12
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP305383U JPS59109137U (ja) | 1983-01-13 | 1983-01-13 | シヤツタ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP305383U JPS59109137U (ja) | 1983-01-13 | 1983-01-13 | シヤツタ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59109137U JPS59109137U (ja) | 1984-07-23 |
| JPH0110920Y2 true JPH0110920Y2 (enrdf_load_stackoverflow) | 1989-03-29 |
Family
ID=30134690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP305383U Granted JPS59109137U (ja) | 1983-01-13 | 1983-01-13 | シヤツタ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59109137U (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5563377B2 (ja) * | 2009-12-22 | 2014-07-30 | キヤノンアネルバ株式会社 | スパッタリング装置 |
-
1983
- 1983-01-13 JP JP305383U patent/JPS59109137U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59109137U (ja) | 1984-07-23 |
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