JPH01107126U - - Google Patents

Info

Publication number
JPH01107126U
JPH01107126U JP297388U JP297388U JPH01107126U JP H01107126 U JPH01107126 U JP H01107126U JP 297388 U JP297388 U JP 297388U JP 297388 U JP297388 U JP 297388U JP H01107126 U JPH01107126 U JP H01107126U
Authority
JP
Japan
Prior art keywords
groove
wafer boat
chamfered
outer peripheral
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP297388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP297388U priority Critical patent/JPH01107126U/ja
Publication of JPH01107126U publication Critical patent/JPH01107126U/ja
Pending legal-status Critical Current

Links

JP297388U 1988-01-12 1988-01-12 Pending JPH01107126U (US07202987-20070410-C00007.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP297388U JPH01107126U (US07202987-20070410-C00007.png) 1988-01-12 1988-01-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP297388U JPH01107126U (US07202987-20070410-C00007.png) 1988-01-12 1988-01-12

Publications (1)

Publication Number Publication Date
JPH01107126U true JPH01107126U (US07202987-20070410-C00007.png) 1989-07-19

Family

ID=31204202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP297388U Pending JPH01107126U (US07202987-20070410-C00007.png) 1988-01-12 1988-01-12

Country Status (1)

Country Link
JP (1) JPH01107126U (US07202987-20070410-C00007.png)

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