JPH01107114A - Flowmeter - Google Patents
FlowmeterInfo
- Publication number
- JPH01107114A JPH01107114A JP62264716A JP26471687A JPH01107114A JP H01107114 A JPH01107114 A JP H01107114A JP 62264716 A JP62264716 A JP 62264716A JP 26471687 A JP26471687 A JP 26471687A JP H01107114 A JPH01107114 A JP H01107114A
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- temperature
- temperature detection
- detection element
- detected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims abstract description 29
- 239000012530 fluid Substances 0.000 claims abstract description 21
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 8
- 238000001514 detection method Methods 0.000 claims description 42
- 239000007788 liquid Substances 0.000 abstract description 17
- 238000005259 measurement Methods 0.000 abstract description 9
- 230000000694 effects Effects 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 4
- 230000000630 rising effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000009835 boiling Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、液体や気体等の流体の流量、特に、液体の微
小流量を測定するのに好適な流量計に関するものである
。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a flowmeter suitable for measuring the flow rate of fluids such as liquids and gases, and particularly for measuring minute flow rates of liquids.
従来より例えば液体の微小流量を測定する手段として、
■一定時間容器内に液体を入れ、その重量を基準にして
測る方法、■容積が既知の容器を液体が満たす時間を基
準にして測定する方法、■羽根車等を用いる方法、■発
熱センサ若しくは圧力センサを流路内に入れ、流速から
流量を得る方法、■液体が流れる管にヒータを巻設し、
ヒータ自体若しくはヒータ前後の温度に基づいて測る方
法等がある。Conventionally, for example, as a means of measuring minute flow rates of liquid,
■Measurement based on the weight of a container filled with liquid for a certain period of time, ■Measurement based on the time it takes for the liquid to fill a container with a known volume, ■Method using an impeller, etc., ■Measurement using a heat sensor or A method of inserting a pressure sensor into the flow path and obtaining the flow rate from the flow velocity, ■ Wrapping a heater around the pipe through which the liquid flows,
There are methods of measuring based on the temperature of the heater itself or the temperature before and after the heater.
（発明が解決しようとする問題点〕
しかしながら、上記の各手段にはそれぞれ次のような欠
点がある。即ち、■及び■は、インラインでの測定並び
に瞬時流量の測定ができず、そして、■は、羽根車の大
きさ等から微小流量の測定が困難であり、又、■はセン
サ部のシールドや接液部の材質に難があり、更に、■は
測定感度に難があると共に、ヒータの液体加熱によって
気泡が発生する。そして、低沸点液体の測定には不向き
である等である。(Problems to be Solved by the Invention) However, each of the above means has the following drawbacks. Namely, (2) and (2) cannot perform in-line measurement or instantaneous flow rate measurement, and (2) For example, it is difficult to measure minute flow rates due to the size of the impeller, etc., and for item 2, there are problems with the shielding of the sensor part and the material of the wetted parts. Bubbles are generated by heating the liquid, making it unsuitable for measuring low-boiling point liquids.
本発明は、上述の事柄に留意してなされたもので、その
目的とするところは、上述の欠点を悉く解消した測定精
度の高い流量計を提供することにある。The present invention has been made with the above-mentioned considerations in mind, and its purpose is to provide a flowmeter with high measurement accuracy that eliminates all of the above-mentioned drawbacks.
上述の目的を達成するため、本発明に係る流量計は、流
体が流れる管の一部を電子冷却素子で冷却するように構
成すると共に、前記管の冷却部分よりも上流側の管表・
面に温度検出第１素子を、前記電子冷却素子の表面に温
度検出第２素子を、前記電子冷却素子で冷却される管表
面に温度検出第３素子を、それぞれ設け、前記温度検出
第１素子の検出温度と温度検出第２素子の検出温度との
差が常に所定値になるように、前記電子冷却素子を制御
しつつ、前記温度検出第３素子の検出温度と前記温度検
出第２素子の検出温度との差に基づいて前記管内を流れ
る流体の流量を測定するようにした点に特徴がある。In order to achieve the above-mentioned object, a flowmeter according to the present invention is configured to cool a part of a pipe through which fluid flows with an electronic cooling element, and to cool a part of the pipe through which a fluid flows, and to cool a part of the pipe on the upstream side of the cooling part of the pipe.
a first temperature detection element on a surface, a second temperature detection element on the surface of the electronic cooling element, and a third temperature detection element on the surface of the tube cooled by the electronic cooling element, and the first temperature detection element The temperature detected by the third temperature detection element and the temperature detected by the second temperature detection element are controlled while controlling the electronic cooling element so that the difference between the temperature detected by the third temperature detection element and the temperature detected by the second temperature detection element always becomes a predetermined value. The present invention is characterized in that the flow rate of the fluid flowing through the pipe is measured based on the difference between the detected temperature and the detected temperature.
上記特徴的構成を有する流量計においては、流体が流れ
る管を電子冷却素子で冷却するようにしているので、気
泡が発生せず、従って、低沸点液体の測定が可能になる
。又、液体中に溶存するガスの影響を受けない、更に、
流体の流れによって生じる温度差、即ち、流体の温度上
昇分を検出しているだけであるから、取り付は姿勢の影
響を受けることがない。In the flowmeter having the above-mentioned characteristic configuration, the tube through which the fluid flows is cooled by an electronic cooling element, so that bubbles are not generated, and therefore low boiling point liquids can be measured. In addition, it is not affected by gas dissolved in the liquid, and
Since only the temperature difference caused by the flow of fluid, that is, the temperature rise of the fluid is detected, the mounting is not affected by the posture.
以下、本発明の一実施例を、図面を参照しながら説明す
る。An embodiment of the present invention will be described below with reference to the drawings.
第１図乃至第３図は本発明に係る流量計の一例を示し、
これらの図において、１は測定対象である流体りが例え
ば矢印で示す方向に流れる管で、例えば外径が２．０１
、内径が１．９ｆｌのステンレスよりなる。1 to 3 show an example of a flowmeter according to the present invention,
In these figures, 1 is a tube through which the fluid to be measured flows, for example, in the direction shown by the arrow, and has an outer diameter of, for example, 2.01 mm.
, made of stainless steel with an inner diameter of 1.9fl.
２は管１の一部を冷却するための電子冷却素子で、一方
（図示する例では上方）に凹部３が形成され、他方（下
方）に多数のフィン４・・・が形成されると共に、凹部
３を囲む相対向する周壁３＾に切欠部５＾、 ５Ｂを形
成してなる例えばアルミニウムよりなるヒートシンク６
の凹部３内に収容されている。Reference numeral 2 designates an electronic cooling element for cooling a part of the tube 1, in which a recess 3 is formed on one side (in the example shown above), and a large number of fins 4 are formed on the other side (lower side). A heat sink 6 made of, for example, aluminum and having notches 5^, 5B formed in opposing peripheral walls 3^ surrounding the recess 3.
It is accommodated in the recess 3 of.
電子冷却素子２の上面２Ａには、例えば第４図に示すよ
うに、管１の外形に沿う形状を有する溝７を上面に備え
ると共に、側部に素子ホルダ８Ａ、 ８Ｂを突設してな
る管ホルダ９と、この管ホルダ９より例えば所定距離離
れて位置する素子ホルダ１０とが設けられている。これ
らのホルダ９．１０は熱伝導性の優れたアルミニウム又
は銅等よりなり、前記上面２Ａに密着して設けられてい
る。As shown in FIG. 4, for example, the upper surface 2A of the electronic cooling element 2 is provided with a groove 7 having a shape that follows the outer shape of the tube 1, and element holders 8A and 8B are provided protruding from the sides. A tube holder 9 and an element holder 10 located at a predetermined distance from the tube holder 9, for example, are provided. These holders 9 and 10 are made of aluminum, copper, or the like with excellent thermal conductivity, and are provided in close contact with the upper surface 2A.
そして、管１は前記切欠部５Ａ、 ５Ｂ及び溝７の表面
に密着するように設けられ、溝７に当接する部分ＩＡが
電子冷却素子２によって冷却される。この場合、被冷却
部分ＩＡと電子冷却素子２との熱的結合を密にするため
及び振動影響が生じないようにするため、隙間等にはサ
ーマルコンパウンドが充填される。１１はヒートシンク
６の切欠部５Ａ、 ５Ｂにおける管ｌの周囲の隙間を充
填する断熱材である。The tube 1 is provided in close contact with the surfaces of the notches 5A, 5B and the groove 7, and the portion IA that contacts the groove 7 is cooled by the electronic cooling element 2. In this case, the gaps and the like are filled with thermal compound in order to make a tight thermal connection between the portion to be cooled IA and the electronic cooling element 2 and to prevent vibration effects from occurring. Reference numeral 11 denotes a heat insulating material that fills the gap around the pipe 1 in the notches 5A and 5B of the heat sink 6.
１２は管１の被冷却部分ＩＡよりも上流側の非冷却部分
ＩＢの温度を検出する温度検出第１素子で、前記ホルダ
９．１０と同様の材料よりなる素子ホルダ１３を介して
管表面に設けられている。１４は電子冷却素子２の温度
を検出する温度検出第２素子で、素子ホルダ１０に取り
付けられている。１５は電子冷却素子２によって冷却さ
れる管１の被冷却部分１＾の温度を検出する温度検出第
３素子で、管ホルダ９の上流側の素子ホルダ８＾に取り
付けられている。Reference numeral 12 denotes a first temperature detection element for detecting the temperature of the uncooled part IB upstream of the cooled part IA of the pipe 1, and the temperature detection element 12 detects the temperature of the uncooled part IB on the upstream side of the cooled part IA. It is provided. A second temperature detection element 14 detects the temperature of the electronic cooling element 2, and is attached to the element holder 10. A third temperature detection element 15 detects the temperature of the cooled portion 1^ of the tube 1 cooled by the electronic cooling element 2, and is attached to the element holder 8^ on the upstream side of the tube holder 9.
尚、この温度検出第３素子１５を素子ホルダ８＾に代え
てこれよりも下流側の素子ホルダ８Ｂに取り付けるよう
にしてもよい。Note that this third temperature detection element 15 may be attached to the element holder 8B on the downstream side instead of the element holder 8^.
１６Ａ、 １６Ｂは管１の被冷却部分ＩＡ、電子冷却素
子２の上面２Ａ及び温度検出第１素子１２を被覆する例
えばスチロールよりなる断熱材である。尚、これら断熱
材１６Ａ、 １６Ｂは一体的に形成してあってもよい。16A and 16B are heat insulating materials made of styrene, for example, which cover the cooled portion IA of the tube 1, the upper surface 2A of the electronic cooling element 2, and the first temperature detection element 12. Note that these heat insulating materials 16A and 16B may be formed integrally.
第５図は上記電子冷却素子２及び温度検出素子１２、１
４．１５を含む電気系ブロック図であり、同図において
、１７．１８．１９はそれぞれ温度検出素子１２゜１４
、１５を定電流制御する定電流回路、２０は温度検出第
１素子１２の検出温度ａと温度検出第２素子１４の検出
温度すとに基づいて電子冷却素子２を制御し、もって前
記雨検出温度の差ａ−ｂが所定の値になるように制御す
る定温度制御回路、２１は温度検出第３素子１５の検出
温度Ｃと温度検出第２素子１４の検出温度すとの差をと
り、これを増幅する増幅器、２２は温度補正回路、２３
はリニアライザ、２４は出力点である。FIG. 5 shows the electronic cooling element 2 and temperature detection elements 12, 1.
4.15 is an electrical system block diagram including temperature detection elements 12, 14, and 17, 18, and 19, respectively.
, 15, a constant current circuit 20 controls the electronic cooling element 2 based on the detected temperature a of the first temperature detecting element 12 and the detected temperature S of the second temperature detecting element 14, thereby detecting the rain. A constant temperature control circuit 21 controls the temperature difference a-b to a predetermined value, and a constant temperature control circuit 21 calculates the difference between the temperature C detected by the third temperature detection element 15 and the temperature S detected by the second temperature detection element 14, An amplifier that amplifies this, 22 is a temperature correction circuit, 23
is a linearizer, and 24 is an output point.
而して、上記構成の流量計において、温度検出素子１２
．１４．１５に対してそれぞれ定電流回路１７゜１８、
１９によって所定の大きさ（例えば０．３Ａ）の電流を
流すと共に、温度検出第１素子１２の検出温度ａと温度
検出第２素子１４の検出温度すとの差ａ −ｂが所定の
値（例えば８℃）となるように、定温度制御回路２０に
おいて例えばＰＩＤを用いて電子冷却素子２を制御する
。Therefore, in the flowmeter having the above configuration, the temperature detection element 12
．． Constant current circuit 17°18, respectively for 14.15,
19 causes a current of a predetermined magnitude (for example, 0.3 A) to flow, and the difference a - b between the temperature a detected by the first temperature detection element 12 and the temperature detected by the second temperature detection element 14 is set to a predetermined value ( For example, the electronic cooling element 2 is controlled using, for example, a PID in the constant temperature control circuit 20 so that the temperature is 8°C.
この条件下において、管ｌ内に流体りが流れていないと
きは、電子冷却素子２の表面２Ａ上は全て同一温度であ
るから、温度検出第３素子１５の検出温度Ｃと温度検出
第２素子１４の検出温度すとは等しく、即ち、ｃ−ｂは
ゼロである。そして、管１内に流体りが流れているとき
は、温度検出第３素子１５の検出温度Ｃは前記流体りの
流量に比例して上昇するので、温度検出第３素子１５の
検出温度Ｃと温度検出第２素子１４の検出温度すとの間
に差が生ずる。従って、上記ａ−ｂを所定の値になるよ
うにして、ｃ−ｂを得ることにより、管ｌ内に流れる流
体りの流量を求めることができるのである。Under these conditions, when no fluid is flowing in the pipe l, the surface 2A of the electronic cooling element 2 is all at the same temperature, so the detected temperature C of the third temperature detection element 15 and the second temperature detection element 14 detected temperatures are equal, that is, c-b is zero. When the fluid stream is flowing in the pipe 1, the temperature C detected by the third temperature detection element 15 increases in proportion to the flow rate of the fluid stream. A difference occurs between the temperatures detected by the second temperature detection element 14 and the temperature detected by the second temperature detection element 14. Therefore, by setting a-b to a predetermined value and obtaining c-b, the flow rate of the fluid flowing in the pipe 1 can be determined.
ところで、上記実施例においては、温度検出第３素子１
５は管ｌの被冷却部分１＾において上流側に設ける程、
高感度な出力が得られる。そして、必要な感度に応じて
、この温度検出第３素子１５を、上流側の位置（例えば
素子ホルダ８＾）から下流側の位置（例えば素子ホルダ
８Ｂ）までの間の何れの位置に置くこともできる。又、
複数の素子ホルダを設けておいてもよいことは云うまで
もない。By the way, in the above embodiment, the third temperature detection element 1
5 is provided on the upstream side in the cooled portion 1^ of the pipe l, the more
Highly sensitive output can be obtained. Depending on the required sensitivity, the third temperature detection element 15 can be placed at any position between the upstream position (for example, element holder 8^) and the downstream position (for example, element holder 8B). You can also do it. or,
It goes without saying that a plurality of element holders may be provided.
本発明は上記実施例に限られるものではなく、例えば温
度検出素子１２．１４．１５は上記リニアサーミスタ以
外に、例えば白金温度計、抵抗温度素子、巻線、熱電対
等を用いてもよい。又、管１はステンレス以外に、アル
ミニウム、銅、ニッケル等の金属材料や、管ｌの肉厚を
薄くした場合にはフン化エチレン樹脂、ポリマー系等に
よって構成してもよい。The present invention is not limited to the above embodiments, and for example, the temperature detection elements 12, 14, and 15 may be, for example, platinum thermometers, resistance temperature elements, windings, thermocouples, etc. in addition to the linear thermistors described above. In addition to stainless steel, the tube 1 may be made of a metal material such as aluminum, copper, or nickel, or if the wall thickness of the tube 1 is made thinner, it may be made of a fluorinated ethylene resin, a polymer, or the like.
〔発明の効果Ｊ
以上説明したように、本発明に係る流量計によれば、管
内を流れる液体の流量を非接触で測定し、かつ液体の微
小流量を測定できることは勿論のこと、流体が流れる管
を電子冷却素子で冷却するようにしているので、気泡が
発生せず、従って、低沸点液体等気体を発生し易い液体
の測定が可能になる。又、液体中に溶存するガスの影響
を受けず、しかも、流体の流れによって生じる温度差、
即ち、流体の温度上昇分を検出しているだけであり、取
り付は姿勢の影響を受けることがないから、精度の高い
測定が可能となる。[Effects of the Invention J As explained above, the flowmeter according to the present invention can not only measure the flow rate of liquid flowing in a pipe without contact, but also measure the minute flow rate of liquid, as well as the flow meter of the present invention. Since the tube is cooled with an electronic cooling element, no bubbles are generated, and therefore it is possible to measure liquids that easily generate gas, such as low boiling point liquids. In addition, it is not affected by gas dissolved in the liquid, and the temperature difference caused by the flow of the fluid,
That is, since only the temperature rise of the fluid is detected and the mounting is not affected by the posture, highly accurate measurement is possible.
又、空気やアルゴン或いは腐食性ガス等の気体の流量測
定にも使用することができる。It can also be used to measure the flow rate of gases such as air, argon, or corrosive gases.
第１図乃至第５図は本発明の一実施例を示し、第１図は
流量計の縦断面図、第２図は横断面図、第３図は分解斜
視図、第４図は要部の拡大斜視図、第５図は電気系ブロ
ック図である。
１・・・管、ＩＡ・・・被冷却部分、ＩＢ・・・非冷却
部分、２・・・電子冷却素子、１２・・・温度検出第１
素子、１４・・・温度検出第２素子、１５・・・温度検
出第３素子、ａ・・・温度検出第１素子の検出温度、ｂ
・・・温度検出第２素子の検出温度、Ｃ・・・温度検出
第３素子の検出温度、Ｌ・・・流体。
出 願 人 株式会社 エステ７り代 理 人
弁理士 藤本英夫Figures 1 to 5 show an embodiment of the present invention, with Figure 1 being a longitudinal cross-sectional view of a flowmeter, Figure 2 being a cross-sectional view, Figure 3 being an exploded perspective view, and Figure 4 showing main parts. FIG. 5 is an electrical system block diagram. DESCRIPTION OF SYMBOLS 1...Pipe, IA...Cooled part, IB...Uncooled part, 2...Electronic cooling element, 12...Temperature detection first
Element, 14... Temperature detection second element, 15... Temperature detection third element, a... Detected temperature of temperature detection first element, b
...Temperature detected by the second temperature detection element, C...Temperature detected by the third temperature detection element, L...Fluid. Applicant Esthetic Co., Ltd. 7 Agent
Patent attorney Hideo Fujimoto
Claims (1)
構成すると共に、前記管の冷却部分よりも上流側の管表
面に温度検出第１素子を、前記電子冷却素子の表面に温
度検出第２素子を、前記電子冷却素子で冷却される管表
面に温度検出第３素子を、それぞれ設け、前記温度検出
第１素子の検出温度と温度検出第２素子の検出温度との
差が常に所定値になるように、前記電子冷却素子を制御
しつつ、前記温度検出第３素子の検出温度と前記温度検
出第２素子の検出温度との差に基づいて前記管内を流れ
る流体の流量を測定するようにしたことを特徴とする流
量計。A part of the pipe through which the fluid flows is cooled by an electronic cooling element, and a first temperature detection element is provided on the surface of the pipe upstream of the cooling part of the pipe, and a first temperature detection element is provided on the surface of the electronic cooling element. A third temperature detection element is provided on the surface of the tube cooled by the electronic cooling element, and the difference between the temperature detected by the first temperature detection element and the temperature detected by the second temperature detection element is always a predetermined value. While controlling the electronic cooling element, the flow rate of the fluid flowing in the pipe is measured based on the difference between the temperature detected by the third temperature detection element and the temperature detected by the second temperature detection element. A flow meter characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62264716A JPH0814505B2 (en) | 1987-10-19 | 1987-10-19 | Flowmeter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62264716A JPH0814505B2 (en) | 1987-10-19 | 1987-10-19 | Flowmeter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01107114A true JPH01107114A (en) | 1989-04-25 |
| JPH0814505B2 JPH0814505B2 (en) | 1996-02-14 |
Family
ID=17407190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62264716A Expired - Fee Related JPH0814505B2 (en) | 1987-10-19 | 1987-10-19 | Flowmeter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0814505B2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5973727A (en) * | 1982-10-19 | 1984-04-26 | Mitsubishi Electric Corp | Flow rate measuring device |
| JPS60236030A (en) * | 1984-05-09 | 1985-11-22 | Denka Consult & Eng Co Ltd | Heat conduction type polyphase fluid mass flow meter |
-
1987
- 1987-10-19 JP JP62264716A patent/JPH0814505B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5973727A (en) * | 1982-10-19 | 1984-04-26 | Mitsubishi Electric Corp | Flow rate measuring device |
| JPS60236030A (en) * | 1984-05-09 | 1985-11-22 | Denka Consult & Eng Co Ltd | Heat conduction type polyphase fluid mass flow meter |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0814505B2 (en) | 1996-02-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |