JPH01106559U - - Google Patents

Info

Publication number

JPH01106559U

JPH01106559U JP20129187U JP20129187U JPH01106559U JP H01106559 U JPH01106559 U JP H01106559U JP 20129187 U JP20129187 U JP 20129187U JP 20129187 U JP20129187 U JP 20129187U JP H01106559 U JPH01106559 U JP H01106559U

Authority

JP

Japan

Prior art keywords

film forming

cover

respect

heating

registration request

Prior art date

1987-12-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010438 heat treatment Methods 0.000 claims description 5
• 239000000463 material Substances 0.000 claims 1
• 239000012528 membrane Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 210000003746 feather Anatomy 0.000 description 1
• 238000007740 vapor deposition Methods 0.000 description 1