JPH01104637U - - Google Patents

Info

Publication number

JPH01104637U

JPH01104637U JP20143387U JP20143387U JPH01104637U JP H01104637 U JPH01104637 U JP H01104637U JP 20143387 U JP20143387 U JP 20143387U JP 20143387 U JP20143387 U JP 20143387U JP H01104637 U JPH01104637 U JP H01104637U

Authority

JP

Japan

Prior art keywords

substrate

base

elastic body

holding device

roughened

Prior art date

1987-12-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 8
• 239000000853 adhesive Substances 0.000 claims description 2
• 230000001070 adhesive effect Effects 0.000 claims description 2
• 230000002093 peripheral effect Effects 0.000 claims 1
• 230000003746 surface roughness Effects 0.000 claims 1
• 238000010884 ion-beam technique Methods 0.000 description 1