JPH01104035U - - Google Patents

Info

Publication number
JPH01104035U
JPH01104035U JP19934987U JP19934987U JPH01104035U JP H01104035 U JPH01104035 U JP H01104035U JP 19934987 U JP19934987 U JP 19934987U JP 19934987 U JP19934987 U JP 19934987U JP H01104035 U JPH01104035 U JP H01104035U
Authority
JP
Japan
Prior art keywords
wafer
holder
covers
holder plate
upper lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19934987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19934987U priority Critical patent/JPH01104035U/ja
Publication of JPH01104035U publication Critical patent/JPH01104035U/ja
Pending legal-status Critical Current

Links

JP19934987U 1987-12-28 1987-12-28 Pending JPH01104035U (US20030204162A1-20031030-M00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19934987U JPH01104035U (US20030204162A1-20031030-M00001.png) 1987-12-28 1987-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19934987U JPH01104035U (US20030204162A1-20031030-M00001.png) 1987-12-28 1987-12-28

Publications (1)

Publication Number Publication Date
JPH01104035U true JPH01104035U (US20030204162A1-20031030-M00001.png) 1989-07-13

Family

ID=31489801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19934987U Pending JPH01104035U (US20030204162A1-20031030-M00001.png) 1987-12-28 1987-12-28

Country Status (1)

Country Link
JP (1) JPH01104035U (US20030204162A1-20031030-M00001.png)

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