JPH01104020U - - Google Patents

Info

Publication number

JPH01104020U

JPH01104020U JP19833887U JP19833887U JPH01104020U JP H01104020 U JPH01104020 U JP H01104020U JP 19833887 U JP19833887 U JP 19833887U JP 19833887 U JP19833887 U JP 19833887U JP H01104020 U JPH01104020 U JP H01104020U

Authority

JP

Japan

Prior art keywords

holder

wafer

wafers

plate

belt conveyor

Prior art date

1987-12-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000011248 coating agent Substances 0.000 claims description 5
• 238000000576 coating method Methods 0.000 claims description 5
• 235000012431 wafers Nutrition 0.000 claims 7
• 230000037431 insertion Effects 0.000 claims 2
• 238000003780 insertion Methods 0.000 claims 2
• 238000010586 diagram Methods 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1

Cited By (1)