JPH01103913U - - Google Patents

Info

Publication number
JPH01103913U
JPH01103913U JP19798087U JP19798087U JPH01103913U JP H01103913 U JPH01103913 U JP H01103913U JP 19798087 U JP19798087 U JP 19798087U JP 19798087 U JP19798087 U JP 19798087U JP H01103913 U JPH01103913 U JP H01103913U
Authority
JP
Japan
Prior art keywords
piezoelectric vibrator
recess
substrate
hermetically sealed
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19798087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19798087U priority Critical patent/JPH01103913U/ja
Publication of JPH01103913U publication Critical patent/JPH01103913U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP19798087U 1987-12-26 1987-12-26 Pending JPH01103913U (US06653308-20031125-C00199.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19798087U JPH01103913U (US06653308-20031125-C00199.png) 1987-12-26 1987-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19798087U JPH01103913U (US06653308-20031125-C00199.png) 1987-12-26 1987-12-26

Publications (1)

Publication Number Publication Date
JPH01103913U true JPH01103913U (US06653308-20031125-C00199.png) 1989-07-13

Family

ID=31488508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19798087U Pending JPH01103913U (US06653308-20031125-C00199.png) 1987-12-26 1987-12-26

Country Status (1)

Country Link
JP (1) JPH01103913U (US06653308-20031125-C00199.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012257158A (ja) * 2011-06-10 2012-12-27 Nippon Dempa Kogyo Co Ltd 圧電デバイスの製造方法及び圧電デバイス

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012257158A (ja) * 2011-06-10 2012-12-27 Nippon Dempa Kogyo Co Ltd 圧電デバイスの製造方法及び圧電デバイス

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