JPH01102902U - - Google Patents

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Publication number
JPH01102902U
JPH01102902U JP19833487U JP19833487U JPH01102902U JP H01102902 U JPH01102902 U JP H01102902U JP 19833487 U JP19833487 U JP 19833487U JP 19833487 U JP19833487 U JP 19833487U JP H01102902 U JPH01102902 U JP H01102902U
Authority
JP
Japan
Prior art keywords
deviation
drive signal
preset reference
control means
gain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19833487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19833487U priority Critical patent/JPH01102902U/ja
Publication of JPH01102902U publication Critical patent/JPH01102902U/ja
Pending legal-status Critical Current

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JP19833487U 1987-12-25 1987-12-25 Pending JPH01102902U (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19833487U JPH01102902U (US20100223739A1-20100909-C00005.png) 1987-12-25 1987-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19833487U JPH01102902U (US20100223739A1-20100909-C00005.png) 1987-12-25 1987-12-25

Publications (1)

Publication Number Publication Date
JPH01102902U true JPH01102902U (US20100223739A1-20100909-C00005.png) 1989-07-12

Family

ID=31488850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19833487U Pending JPH01102902U (US20100223739A1-20100909-C00005.png) 1987-12-25 1987-12-25

Country Status (1)

Country Link
JP (1) JPH01102902U (US20100223739A1-20100909-C00005.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006085382A (ja) * 2004-09-15 2006-03-30 Mitsutoyo Corp 測定制御系における制御回路の制御パラメータ補正方法および測定装置
JP2007271337A (ja) * 2006-03-30 2007-10-18 Mitsutoyo Corp 表面性状測定装置および表面性状測定方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60191303A (ja) * 1984-03-13 1985-09-28 Olympus Optical Co Ltd サ−ボ回路
JPS61202383A (ja) * 1985-03-05 1986-09-08 Fujitsu Ltd 磁気デイスク装置
JPS621175A (ja) * 1985-06-26 1987-01-07 Nippon Gakki Seizo Kk サ−ボ回路

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60191303A (ja) * 1984-03-13 1985-09-28 Olympus Optical Co Ltd サ−ボ回路
JPS61202383A (ja) * 1985-03-05 1986-09-08 Fujitsu Ltd 磁気デイスク装置
JPS621175A (ja) * 1985-06-26 1987-01-07 Nippon Gakki Seizo Kk サ−ボ回路

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006085382A (ja) * 2004-09-15 2006-03-30 Mitsutoyo Corp 測定制御系における制御回路の制御パラメータ補正方法および測定装置
JP2007271337A (ja) * 2006-03-30 2007-10-18 Mitsutoyo Corp 表面性状測定装置および表面性状測定方法

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