JPH01102807U - - Google Patents
Info
- Publication number
- JPH01102807U JPH01102807U JP20037587U JP20037587U JPH01102807U JP H01102807 U JPH01102807 U JP H01102807U JP 20037587 U JP20037587 U JP 20037587U JP 20037587 U JP20037587 U JP 20037587U JP H01102807 U JPH01102807 U JP H01102807U
- Authority
- JP
- Japan
- Prior art keywords
- light source
- laser light
- measuring device
- orthogonal
- types
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000035559 beat frequency Effects 0.000 claims 1
- 230000010287 polarization Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20037587U JPH01102807U (cs) | 1987-12-28 | 1987-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20037587U JPH01102807U (cs) | 1987-12-28 | 1987-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01102807U true JPH01102807U (cs) | 1989-07-11 |
Family
ID=31490784
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20037587U Pending JPH01102807U (cs) | 1987-12-28 | 1987-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01102807U (cs) |
-
1987
- 1987-12-28 JP JP20037587U patent/JPH01102807U/ja active Pending
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