JP7831619B2 - 搬送装置及び保管装置 - Google Patents

搬送装置及び保管装置

Info

Publication number
JP7831619B2
JP7831619B2 JP2024550010A JP2024550010A JP7831619B2 JP 7831619 B2 JP7831619 B2 JP 7831619B2 JP 2024550010 A JP2024550010 A JP 2024550010A JP 2024550010 A JP2024550010 A JP 2024550010A JP 7831619 B2 JP7831619 B2 JP 7831619B2
Authority
JP
Japan
Prior art keywords
arm
drive unit
transfer mechanism
base
mast
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2024550010A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024070630A1 (https=
JPWO2024070630A5 (https=
Inventor
宣之 伊藤
一馬 矢河
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of JPWO2024070630A1 publication Critical patent/JPWO2024070630A1/ja
Publication of JPWO2024070630A5 publication Critical patent/JPWO2024070630A5/ja
Application granted granted Critical
Publication of JP7831619B2 publication Critical patent/JP7831619B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/06—Program-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
JP2024550010A 2022-09-27 2023-09-11 搬送装置及び保管装置 Active JP7831619B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022153344 2022-09-27
JP2022153344 2022-09-27
PCT/JP2023/033029 WO2024070630A1 (ja) 2022-09-27 2023-09-11 搬送装置及び保管装置

Publications (3)

Publication Number Publication Date
JPWO2024070630A1 JPWO2024070630A1 (https=) 2024-04-04
JPWO2024070630A5 JPWO2024070630A5 (https=) 2025-05-20
JP7831619B2 true JP7831619B2 (ja) 2026-03-17

Family

ID=90477474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024550010A Active JP7831619B2 (ja) 2022-09-27 2023-09-11 搬送装置及び保管装置

Country Status (4)

Country Link
JP (1) JP7831619B2 (https=)
CN (1) CN119836392A (https=)
TW (1) TW202421548A (https=)
WO (1) WO2024070630A1 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004071925A (ja) 2002-08-08 2004-03-04 Nikon Corp 基板ローダ及び露光装置
JP2016055988A (ja) 2014-09-10 2016-04-21 村田機械株式会社 移載装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188193U (ja) * 1982-06-10 1983-12-14 株式会社シマノ 作業用ロボツト
JPS60238286A (ja) * 1984-05-10 1985-11-27 ダイキン工業株式会社 組立て作業用ロボツト
JPS6464787A (en) * 1987-09-04 1989-03-10 Nippon Seiko Kk Joint type robot
JPH02237783A (ja) * 1989-03-13 1990-09-20 Hitachi Ltd 産業用ロボット

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004071925A (ja) 2002-08-08 2004-03-04 Nikon Corp 基板ローダ及び露光装置
JP2016055988A (ja) 2014-09-10 2016-04-21 村田機械株式会社 移載装置

Also Published As

Publication number Publication date
JPWO2024070630A1 (https=) 2024-04-04
CN119836392A (zh) 2025-04-15
TW202421548A (zh) 2024-06-01
WO2024070630A1 (ja) 2024-04-04

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