JP7717052B2 - センサデバイスおよびその製造方法 - Google Patents
センサデバイスおよびその製造方法Info
- Publication number
- JP7717052B2 JP7717052B2 JP2022512078A JP2022512078A JP7717052B2 JP 7717052 B2 JP7717052 B2 JP 7717052B2 JP 2022512078 A JP2022512078 A JP 2022512078A JP 2022512078 A JP2022512078 A JP 2022512078A JP 7717052 B2 JP7717052 B2 JP 7717052B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- sensor device
- electrode
- drain electrode
- source electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
- G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
Landscapes
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020063788 | 2020-03-31 | ||
| JP2020063788 | 2020-03-31 | ||
| PCT/JP2021/012619 WO2021200569A1 (ja) | 2020-03-31 | 2021-03-25 | センサデバイスおよびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2021200569A1 JPWO2021200569A1 (https=) | 2021-10-07 |
| JP7717052B2 true JP7717052B2 (ja) | 2025-08-01 |
Family
ID=77928833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022512078A Active JP7717052B2 (ja) | 2020-03-31 | 2021-03-25 | センサデバイスおよびその製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7717052B2 (https=) |
| WO (1) | WO2021200569A1 (https=) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120206012A1 (en) | 2008-12-01 | 2012-08-16 | The Trustees Of Columbia University In The City Of New York | Electromechanical devices and methods for fabrication of the same |
| CN102862949A (zh) | 2012-09-07 | 2013-01-09 | 清华大学 | 基于倒置工艺的双臂梁mems器件及其形成方法 |
| JP2013009144A (ja) | 2011-06-24 | 2013-01-10 | Nippon Telegr & Teleph Corp <Ntt> | 機械共振器 |
| JP2015019142A (ja) | 2013-07-09 | 2015-01-29 | 日本電波工業株式会社 | 圧電デバイス及び圧電デバイスの製造方法 |
| WO2018180793A1 (ja) | 2017-03-28 | 2018-10-04 | 富士フイルム株式会社 | ガス検知素子及びその製造方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61100627A (ja) * | 1984-10-24 | 1986-05-19 | Yokogawa Hokushin Electric Corp | 振動式歪センサ |
| KR20130134538A (ko) * | 2012-05-31 | 2013-12-10 | 연세대학교 산학협력단 | 성능조절이 가능한 초 고감도 그라핀 센서 및 그 제조방법 |
-
2021
- 2021-03-25 JP JP2022512078A patent/JP7717052B2/ja active Active
- 2021-03-25 WO PCT/JP2021/012619 patent/WO2021200569A1/ja not_active Ceased
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120206012A1 (en) | 2008-12-01 | 2012-08-16 | The Trustees Of Columbia University In The City Of New York | Electromechanical devices and methods for fabrication of the same |
| JP2013009144A (ja) | 2011-06-24 | 2013-01-10 | Nippon Telegr & Teleph Corp <Ntt> | 機械共振器 |
| CN102862949A (zh) | 2012-09-07 | 2013-01-09 | 清华大学 | 基于倒置工艺的双臂梁mems器件及其形成方法 |
| JP2015019142A (ja) | 2013-07-09 | 2015-01-29 | 日本電波工業株式会社 | 圧電デバイス及び圧電デバイスの製造方法 |
| WO2018180793A1 (ja) | 2017-03-28 | 2018-10-04 | 富士フイルム株式会社 | ガス検知素子及びその製造方法 |
Non-Patent Citations (1)
| Title |
|---|
| ZHU Alexander Y et al.，Optoelectromechanical Multimodal Biosensor with Graphene active Region，NANO LETTERS，米国，AMERICAN CHEMICAL SOCIETY，2014年，Vol.14，pp.5641-5649 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021200569A1 (ja) | 2021-10-07 |
| JPWO2021200569A1 (https=) | 2021-10-07 |
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