JP7544279B2 - 質量分析装置 - Google Patents

質量分析装置 Download PDF

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Publication number
JP7544279B2
JP7544279B2 JP2023538251A JP2023538251A JP7544279B2 JP 7544279 B2 JP7544279 B2 JP 7544279B2 JP 2023538251 A JP2023538251 A JP 2023538251A JP 2023538251 A JP2023538251 A JP 2023538251A JP 7544279 B2 JP7544279 B2 JP 7544279B2
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Japan
Prior art keywords
chamber
gas
plasma
mass spectrometer
pump
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JP2023538251A
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Japanese (ja)
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JPWO2023007820A5 (https=
JPWO2023007820A1 (https=
Inventor
知義 松下
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Shimadzu Corp
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Shimadzu Corp
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Publication of JPWO2023007820A5 publication Critical patent/JPWO2023007820A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0422—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP2023538251A 2021-07-30 2022-03-15 質量分析装置 Active JP7544279B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021125039 2021-07-30
JP2021125039 2021-07-30
PCT/JP2022/011509 WO2023007820A1 (ja) 2021-07-30 2022-03-15 質量分析装置

Publications (3)

Publication Number Publication Date
JPWO2023007820A1 JPWO2023007820A1 (https=) 2023-02-02
JPWO2023007820A5 JPWO2023007820A5 (https=) 2024-04-19
JP7544279B2 true JP7544279B2 (ja) 2024-09-03

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ID=85087786

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JP2023538251A Active JP7544279B2 (ja) 2021-07-30 2022-03-15 質量分析装置

Country Status (5)

Country Link
US (1) US20240363324A1 (https=)
EP (1) EP4379769A4 (https=)
JP (1) JP7544279B2 (https=)
CN (1) CN117897796A (https=)
WO (1) WO2023007820A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240363324A1 (en) * 2021-07-30 2024-10-31 Shimadzu Corporation Mass spectrometer
GB2632683A (en) * 2023-08-17 2025-02-19 Thermo Fisher Scient Bremen Gmbh Mass spectrometer comprising a vacuum system and a method of operation

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007538197A (ja) 2004-05-21 2007-12-27 ザ ビーオーシー グループ ピーエルシー ポンピング装置
JP2008095504A (ja) 2006-10-05 2008-04-24 Agilent Technol Inc 分析装置
JP2013143196A (ja) 2012-01-06 2013-07-22 Agilent Technologies Inc 誘導結合プラズマｍｓ／ｍｓ型質量分析装置
CN111128671A (zh) 2019-11-19 2020-05-08 清华大学 质谱仪气压调节系统及方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2507518B2 (ja) * 1988-02-29 1996-06-12 株式会社日立製作所 真空排気装置
WO1993013241A1 (en) * 1991-12-23 1993-07-08 Genus, Inc. Purge gas in wafer coating area selection
JP3494457B2 (ja) * 1993-07-07 2004-02-09 株式会社大阪真空機器製作所 真空ポンプ装置
DE102007027352A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Massenspektrometer-Anordnung
SG183179A1 (en) * 2010-02-26 2012-09-27 Perkinelmer Health Sci Inc Plasma mass spectrometry with ion suppression
JP5497615B2 (ja) * 2010-11-08 2014-05-21 株式会社日立ハイテクノロジーズ 質量分析装置
WO2014191746A1 (en) * 2013-05-31 2014-12-04 Micromass Uk Limited Compact mass spectrometer
EP3027989B1 (en) * 2013-07-30 2018-02-28 Board of Regents, The University of Texas System Sample transfer to high vacuum transition flow
GB201314841D0 (en) * 2013-08-20 2013-10-02 Thermo Fisher Scient Bremen Multiple port vacuum pump system
US10416131B2 (en) * 2014-03-31 2019-09-17 Leco Corporation GC-TOF MS with improved detection limit
FR3019298B1 (fr) * 2014-03-31 2016-04-15 Horiba Jobin Yvon Sas Procede et appareil de mesure d'un echantillon solide organique par spectrometrie de decharge luminescente
US10290482B1 (en) * 2018-03-13 2019-05-14 Agilent Technologies, Inc. Tandem collision/reaction cell for inductively coupled plasma-mass spectrometry (ICP-MS)
US10854438B2 (en) * 2018-03-19 2020-12-01 Agilent Technologies, Inc. Inductively coupled plasma mass spectrometry (ICP-MS) with improved signal-to-noise and signal-to-background ratios
GB2572819B (en) * 2018-04-13 2021-05-19 Thermo Fisher Scient Bremen Gmbh Method and apparatus for operating a vacuum interface of a mass spectrometer
US11075066B2 (en) * 2018-10-26 2021-07-27 Agilent Technologies, Inc. Automated detection of nanoparticles using single-particle inductively coupled plasma mass spectrometry (SP-ICP-MS)
JP7396237B2 (ja) * 2020-09-15 2023-12-12 株式会社島津製作所 質量分析装置
US20240363324A1 (en) * 2021-07-30 2024-10-31 Shimadzu Corporation Mass spectrometer
EP4435426A4 (en) * 2021-11-17 2025-03-12 Shimadzu Corporation INDUCTIVELY COUPLED PLASMA MASS SPECTROMETER
US20250275050A1 (en) * 2022-04-22 2025-08-28 Standard Biotools Canada Inc. Sealed Plasma Torch
JP2024064401A (ja) * 2022-10-28 2024-05-14 株式会社島津製作所 質量分析装置
DE202023102071U1 (de) * 2023-04-20 2023-06-12 Thermo Fisher Scientific (Bremen) Gmbh Massenspektrometriesystem zur Bestimmung eines Maßes für eine Abfallrate
US20250308877A1 (en) * 2024-04-01 2025-10-02 Kimia Analytics Inc. Hybrid inductively coupled plasma mass spectrometer (icp-ms) and methods

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007538197A (ja) 2004-05-21 2007-12-27 ザ ビーオーシー グループ ピーエルシー ポンピング装置
JP2008095504A (ja) 2006-10-05 2008-04-24 Agilent Technol Inc 分析装置
JP2013143196A (ja) 2012-01-06 2013-07-22 Agilent Technologies Inc 誘導結合プラズマｍｓ／ｍｓ型質量分析装置
CN111128671A (zh) 2019-11-19 2020-05-08 清华大学 质谱仪气压调节系统及方法

Also Published As

Publication number Publication date
CN117897796A (zh) 2024-04-16
EP4379769A4 (en) 2025-08-27
WO2023007820A1 (ja) 2023-02-02
JPWO2023007820A1 (https=) 2023-02-02
US20240363324A1 (en) 2024-10-31
EP4379769A1 (en) 2024-06-05

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