JP7449418B2 - 質量分析装置 - Google Patents

質量分析装置 Download PDF

Info

Publication number
JP7449418B2
JP7449418B2 JP2022576313A JP2022576313A JP7449418B2 JP 7449418 B2 JP7449418 B2 JP 7449418B2 JP 2022576313 A JP2022576313 A JP 2022576313A JP 2022576313 A JP2022576313 A JP 2022576313A JP 7449418 B2 JP7449418 B2 JP 7449418B2
Authority
JP
Japan
Prior art keywords
temperature
humidity
gas
mass spectrometer
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022576313A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2022157905A1 (https=
JPWO2022157905A5 (https=
Inventor
浩二 石黒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Tech Corp filed Critical Hitachi High Tech Corp
Publication of JPWO2022157905A1 publication Critical patent/JPWO2022157905A1/ja
Publication of JPWO2022157905A5 publication Critical patent/JPWO2022157905A5/ja
Application granted granted Critical
Publication of JP7449418B2 publication Critical patent/JP7449418B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0201—Thermal arrangements, e.g. for cooling, heating or preventing overheating
    • H05K1/0203—Cooling of mounted components
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/20—Modifications to facilitate cooling, ventilating, or heating
    • H05K7/20009—Modifications to facilitate cooling, ventilating, or heating using a gaseous coolant in electronic enclosures
    • H05K7/20209—Thermal management, e.g. fan control
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10007—Types of components
    • H05K2201/10015—Non-printed capacitor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10007—Types of components
    • H05K2201/10151—Sensor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10007—Types of components
    • H05K2201/10174—Diode

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP2022576313A 2021-01-22 2021-01-22 質量分析装置 Active JP7449418B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/002136 WO2022157905A1 (ja) 2021-01-22 2021-01-22 質量分析装置

Publications (3)

Publication Number Publication Date
JPWO2022157905A1 JPWO2022157905A1 (https=) 2022-07-28
JPWO2022157905A5 JPWO2022157905A5 (https=) 2023-07-26
JP7449418B2 true JP7449418B2 (ja) 2024-03-13

Family

ID=82548594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022576313A Active JP7449418B2 (ja) 2021-01-22 2021-01-22 質量分析装置

Country Status (5)

Country Link
US (1) US20230402273A1 (https=)
EP (1) EP4283657B1 (https=)
JP (1) JP7449418B2 (https=)
CN (1) CN116745883A (https=)
WO (1) WO2022157905A1 (https=)

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003166785A (ja) 2001-11-30 2003-06-13 Dainippon Printing Co Ltd 乾燥装置
US20130015343A1 (en) 2011-07-15 2013-01-17 Bruker Daltonics, Inc. Radio Frequency Voltage Temperature Stabilization
WO2014041862A1 (ja) 2012-09-14 2014-03-20 株式会社日立ハイテクノロジーズ 質量分析装置及び方法
JP2014123469A (ja) 2012-12-20 2014-07-03 Hitachi High-Technologies Corp 質量分析装置および質量分析装置の調整方法
JP2014146525A (ja) 2013-01-30 2014-08-14 Hitachi High-Technologies Corp 質量分析装置
JP2014202664A (ja) 2013-04-08 2014-10-27 コニカミノルタ株式会社 ＲＩｆＳ（反射干渉分光法）測定装置
JP2015192803A (ja) 2014-03-31 2015-11-05 株式会社東芝 Ｘ線コンピュータ断層撮影装置
CN105703121A (zh) 2014-12-12 2016-06-22 塞莫费雪科学（不来梅）有限公司 电连接组件
US20180048245A1 (en) 2016-08-15 2018-02-15 Thermo Fisher Scientific (Bremen) Gmbh Temperature-compensated rectifying component
WO2020213283A1 (ja) 2019-04-16 2020-10-22 株式会社日立ハイテク 質量分析装置および質量分析方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4260886A (en) * 1979-09-07 1981-04-07 Rca Corporation Measurement of a gas constituent by a mass spectrometer
JPS6271712U (https=) * 1985-10-22 1987-05-08
JPH0418960U (https=) * 1990-06-06 1992-02-18
EP2591482B1 (en) * 2010-07-09 2017-05-24 Micromass UK Limited Capacitor assembly for a mass spectrometer
JP5285735B2 (ja) * 2011-03-31 2013-09-11 株式会社日立ハイテクノロジーズ 質量分析装置
JP5970274B2 (ja) * 2012-07-18 2016-08-17 株式会社日立ハイテクノロジーズ 質量分析装置
US10971348B2 (en) * 2017-07-11 2021-04-06 Thermo Finnigan Apparatus for delivering reagent ions to a mass spectrometer
CN120275621A (zh) * 2017-12-19 2025-07-08 拜克门寇尔特公司 具有可变工作流的集成样品处理系统

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003166785A (ja) 2001-11-30 2003-06-13 Dainippon Printing Co Ltd 乾燥装置
US20130015343A1 (en) 2011-07-15 2013-01-17 Bruker Daltonics, Inc. Radio Frequency Voltage Temperature Stabilization
WO2014041862A1 (ja) 2012-09-14 2014-03-20 株式会社日立ハイテクノロジーズ 質量分析装置及び方法
JP2014123469A (ja) 2012-12-20 2014-07-03 Hitachi High-Technologies Corp 質量分析装置および質量分析装置の調整方法
JP2014146525A (ja) 2013-01-30 2014-08-14 Hitachi High-Technologies Corp 質量分析装置
JP2014202664A (ja) 2013-04-08 2014-10-27 コニカミノルタ株式会社 ＲＩｆＳ（反射干渉分光法）測定装置
JP2015192803A (ja) 2014-03-31 2015-11-05 株式会社東芝 Ｘ線コンピュータ断層撮影装置
CN105703121A (zh) 2014-12-12 2016-06-22 塞莫费雪科学（不来梅）有限公司 电连接组件
US20180048245A1 (en) 2016-08-15 2018-02-15 Thermo Fisher Scientific (Bremen) Gmbh Temperature-compensated rectifying component
WO2020213283A1 (ja) 2019-04-16 2020-10-22 株式会社日立ハイテク 質量分析装置および質量分析方法

Also Published As

Publication number Publication date
EP4283657B1 (en) 2025-06-25
US20230402273A1 (en) 2023-12-14
JPWO2022157905A1 (https=) 2022-07-28
EP4283657A4 (en) 2024-11-27
WO2022157905A1 (ja) 2022-07-28
CN116745883A (zh) 2023-09-12
EP4283657A1 (en) 2023-11-29

Similar Documents

Publication Publication Date Title
US11443934B2 (en) Time-of-flight mass spectrometry device
US7112788B2 (en) Apparatus and method for controllably affecting the temperature of FAIMS components
CN210743914U (zh) 电喷雾离子源及系统
KR101840231B1 (ko) 플라스마 처리 장치
US8823404B2 (en) Evaluation device and evaluation method for substrate mounting apparatus and evaluation substrate used for the same
JP6047414B2 (ja) 質量分析装置
KR20140051431A (ko) 멀티플렉싱된 가열기 어레이의 온도를 모니터링하고 이를 제어하는 시스템 및 방법
US8674298B2 (en) Quadrupole mass spectrometer
KR20140046450A (ko) 기판 히터와 대칭형 rf 회귀체를 구비한 기판 지지체
JP5080567B2 (ja) 質量分析計の制御方法及び質量分析計
US20180067083A1 (en) Dielectric barrier discharge ionization detector
EP3879560A1 (en) Ion source
WO2019111290A1 (ja) 飛行時間型質量分析装置
JP7449418B2 (ja) 質量分析装置
US8180203B2 (en) Direct heating tube and method of heating fluid using same
US20210225629A1 (en) Cooling devices and instruments including them
JP3629536B2 (ja) カロリーメータ及び検出器システム
US12614703B2 (en) Plasma processing method and plasma processing apparatus
JP2020515838A (ja) アトマイズ炉用の管状炉装置
JP2023004397A (ja) プラズマ処理方法及びプラズマ処理装置
CZ28416U1 (cs) Atomizátor těkavých specií na bázi dielektrického bariérového výboje

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230512

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230512

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240213

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240301

R150 Certificate of patent or registration of utility model

Ref document number: 7449418

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150