JP7436508B2 - 光学フィルター - Google Patents

光学フィルター Download PDF

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Publication number
JP7436508B2
JP7436508B2 JP2021564099A JP2021564099A JP7436508B2 JP 7436508 B2 JP7436508 B2 JP 7436508B2 JP 2021564099 A JP2021564099 A JP 2021564099A JP 2021564099 A JP2021564099 A JP 2021564099A JP 7436508 B2 JP7436508 B2 JP 7436508B2
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Japan
Prior art keywords
refractive index
optical filter
pass
film layer
film
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JP2021564099A
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English (en)
Japanese (ja)
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JP2022531155A5 (https=
JP2022531155A (ja
JPWO2020244223A5 (https=
Inventor
策 ▲陳▼
▲維▼▲紅▼ 丁
叶▲慶▼ 方
▲偉▼ ▲楊▼
念恭 肖
Original Assignee
信陽舜宇光学有限公司
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Publication of JPWO2020244223A5 publication Critical patent/JPWO2020244223A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/281—Interference filters designed for the infrared light
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G02B5/288—Interference filters comprising deposited thin solid films comprising at least one thin film resonant cavity, e.g. in bandpass filters

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Filters (AREA)
  • Laminated Bodies (AREA)
JP2021564099A 2019-06-05 2019-12-31 光学フィルター Active JP7436508B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201910487270.2 2019-06-05
CN201910487270.2A CN110109210B (zh) 2019-06-05 2019-06-05 滤光片
PCT/CN2019/130577 WO2020244223A1 (zh) 2019-06-05 2019-12-31 滤光片

Publications (4)

Publication Number Publication Date
JP2022531155A JP2022531155A (ja) 2022-07-06
JP2022531155A5 JP2022531155A5 (https=) 2023-04-13
JPWO2020244223A5 JPWO2020244223A5 (https=) 2023-04-13
JP7436508B2 true JP7436508B2 (ja) 2024-02-21

Family

ID=67494063

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021564099A Active JP7436508B2 (ja) 2019-06-05 2019-12-31 光学フィルター

Country Status (7)

Country Link
US (1) US12181698B2 (https=)
EP (1) EP3982171A4 (https=)
JP (1) JP7436508B2 (https=)
KR (1) KR20220002321A (https=)
CN (1) CN110109210B (https=)
SG (1) SG11202111677YA (https=)
WO (1) WO2020244223A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110109210B (zh) 2019-06-05 2024-06-18 信阳舜宇光学有限公司 滤光片
CN112444898B (zh) * 2019-08-30 2023-06-16 福州高意光学有限公司 一种宽角度应用的滤光片
CN110879435B (zh) * 2019-11-18 2021-08-06 中国科学院上海技术物理研究所 一种以硒化锌晶体为基底的中长波红外宽光谱分色片
CN115993183A (zh) * 2021-10-18 2023-04-21 天津津航技术物理研究所 宽自由光谱范围的组合式芯片结构
CN114355496B (zh) * 2021-12-30 2024-02-02 苏州厚朴传感科技有限公司 一种工作波段为11500-12500nm的远红外带滤光片
CN114706153B (zh) * 2022-02-18 2024-04-16 湖南麓星光电科技有限公司 一种10600nm波长超窄带滤光片及其制备方法
CN115166886B (zh) * 2022-06-14 2024-02-09 浙江晶驰光电科技有限公司 一种超低角度偏移效应的红外截止滤光器
CN115808733B (zh) * 2023-02-08 2023-05-23 南京英田光学工程股份有限公司 一种基于卫星激光通信的滤波片

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017217555A1 (ja) 2016-06-17 2017-12-21 株式会社トプコン 製膜装置
JP2018504635A (ja) 2015-01-23 2018-02-15 マテリオン コーポレイション 改良された透過率を有する近赤外線光学干渉フィルタ
WO2018102219A1 (en) 2016-11-30 2018-06-07 Viavi Solutions Inc. Silicon-germanium based optical filter
JP2018155962A (ja) 2017-03-17 2018-10-04 倉敷紡績株式会社 分光フィルタおよび分光測光装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103018812B (zh) * 2012-12-17 2015-05-13 晋谱（福建）光电科技有限公司 用于体感识别系统的近红外窄带滤光片
DE102014216109A1 (de) * 2014-08-13 2014-11-20 Carl Zeiss Smt Gmbh Kombinierter reflektor und filter für licht unterschiedlicher wellenlängen
JP6432270B2 (ja) * 2014-10-14 2018-12-05 岩崎電気株式会社 波長選択フィルター及び光照射装置
US20160238759A1 (en) * 2015-02-18 2016-08-18 Materion Corporation Near infrared optical interference filters with improved transmission
CN105137518B (zh) * 2015-08-25 2017-09-12 浙江大学 一种入射角度不敏感的颜色滤光片及其制备方法
DE202017100512U1 (de) * 2017-01-31 2017-02-09 Optics Balzers Ag Optische Filter und/oder Spiegel
DE102017004828B4 (de) 2017-05-20 2019-03-14 Optics Balzers Ag Optischer Filter und Verfahren zur Herstellung eines optischen Filters
CN108897085B (zh) 2018-08-06 2024-07-16 信阳舜宇光学有限公司 滤光片及包含该滤光片的红外图像传感系统
CN110109210B (zh) * 2019-06-05 2024-06-18 信阳舜宇光学有限公司 滤光片
CN210015252U (zh) * 2019-06-05 2020-02-04 信阳舜宇光学有限公司 滤光片

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018504635A (ja) 2015-01-23 2018-02-15 マテリオン コーポレイション 改良された透過率を有する近赤外線光学干渉フィルタ
WO2017217555A1 (ja) 2016-06-17 2017-12-21 株式会社トプコン 製膜装置
WO2018102219A1 (en) 2016-11-30 2018-06-07 Viavi Solutions Inc. Silicon-germanium based optical filter
JP2020501182A (ja) 2016-11-30 2020-01-16 ヴァイアヴィ・ソリューションズ・インコーポレイテッドＶｉａｖｉ Ｓｏｌｕｔｉｏｎｓ Ｉｎｃ． シリコンゲルマニウムをベースとする光学フィルタ
JP2018155962A (ja) 2017-03-17 2018-10-04 倉敷紡績株式会社 分光フィルタおよび分光測光装置

Also Published As

Publication number Publication date
US12181698B2 (en) 2024-12-31
US20220120951A1 (en) 2022-04-21
EP3982171A4 (en) 2022-12-28
CN110109210B (zh) 2024-06-18
EP3982171A1 (en) 2022-04-13
WO2020244223A1 (zh) 2020-12-10
JP2022531155A (ja) 2022-07-06
KR20220002321A (ko) 2022-01-06
SG11202111677YA (en) 2021-11-29
CN110109210A (zh) 2019-08-09

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