JP7435894B2 - ポンプ装置 - Google Patents

ポンプ装置 Download PDF

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Publication number
JP7435894B2
JP7435894B2 JP2023500911A JP2023500911A JP7435894B2 JP 7435894 B2 JP7435894 B2 JP 7435894B2 JP 2023500911 A JP2023500911 A JP 2023500911A JP 2023500911 A JP2023500911 A JP 2023500911A JP 7435894 B2 JP7435894 B2 JP 7435894B2
Authority
JP
Japan
Prior art keywords
piezoelectric pump
pump
piezoelectric
housing
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023500911A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2022176932A1 (https=
JPWO2022176932A5 (https=
Inventor
友徳 川端
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2022176932A1 publication Critical patent/JPWO2022176932A1/ja
Publication of JPWO2022176932A5 publication Critical patent/JPWO2022176932A5/ja
Application granted granted Critical
Publication of JP7435894B2 publication Critical patent/JP7435894B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/08—Cooling; Heating; Preventing freezing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/06—Cooling; Heating; Prevention of freezing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Compressor (AREA)
  • Details Of Reciprocating Pumps (AREA)
JP2023500911A 2021-02-22 2022-02-17 ポンプ装置 Active JP7435894B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021025858 2021-02-22
JP2021025858 2021-02-22
PCT/JP2022/006291 WO2022176932A1 (ja) 2021-02-22 2022-02-17 ポンプ装置

Publications (3)

Publication Number Publication Date
JPWO2022176932A1 JPWO2022176932A1 (https=) 2022-08-25
JPWO2022176932A5 JPWO2022176932A5 (https=) 2023-10-05
JP7435894B2 true JP7435894B2 (ja) 2024-02-21

Family

ID=82932257

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023500911A Active JP7435894B2 (ja) 2021-02-22 2022-02-17 ポンプ装置

Country Status (4)

Country Link
US (1) US12467447B2 (https=)
JP (1) JP7435894B2 (https=)
CN (1) CN116745524A (https=)
WO (1) WO2022176932A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116249834B (zh) * 2020-09-30 2024-06-04 株式会社村田制作所 流体控制装置
DE112023005722T5 (de) * 2023-03-20 2025-11-20 Murata Manufacturing Co., Ltd. Fluidsteuerungsvorrichtung

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006336641A (ja) 2005-05-02 2006-12-14 Sony Corp 噴流発生装置及び電子機器
JP2016200067A (ja) 2015-04-10 2016-12-01 株式会社村田製作所 流体制御装置
WO2017038565A1 (ja) 2015-08-31 2017-03-09 株式会社村田製作所 ブロア

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07301182A (ja) * 1994-05-02 1995-11-14 Tosoh Corp 圧電ポンプの駆動方法
IL145583A0 (en) * 2001-09-24 2002-06-30 Digipump Ltd Piezoelectric pump for dispensing small quantities of liquids
CN1179127C (zh) * 2002-09-03 2004-12-08 吉林大学 多腔压电薄膜驱动泵
EP1722412B1 (en) 2005-05-02 2012-08-29 Sony Corporation Jet generator and electronic device
DE102007050407A1 (de) * 2007-10-22 2009-04-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Pumpe, Pumpenanordnung und Pumpenmodul
CN103925187B (zh) * 2014-05-04 2016-03-30 吉林大学 一种多振子压电泵
CN203892161U (zh) * 2014-05-04 2014-10-22 吉林大学 一种多振子压电泵
CN108496004B (zh) * 2016-02-01 2020-03-31 株式会社村田制作所 气体控制装置
JP6988365B2 (ja) 2017-10-20 2022-01-05 オムロンヘルスケア株式会社 メッシュ式ネブライザおよび交換部材
JP6687170B2 (ja) * 2017-12-22 2020-04-22 株式会社村田製作所 ポンプ
CN109854490B (zh) * 2019-03-03 2025-07-25 宁波瑞凌工具有限公司 一种轴流式微型压电气体压缩机
JP7416324B2 (ja) * 2021-02-16 2024-01-17 株式会社村田製作所 ポンプ装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006336641A (ja) 2005-05-02 2006-12-14 Sony Corp 噴流発生装置及び電子機器
JP2016200067A (ja) 2015-04-10 2016-12-01 株式会社村田製作所 流体制御装置
WO2017038565A1 (ja) 2015-08-31 2017-03-09 株式会社村田製作所 ブロア

Also Published As

Publication number Publication date
US12467447B2 (en) 2025-11-11
CN116745524A (zh) 2023-09-12
JPWO2022176932A1 (https=) 2022-08-25
WO2022176932A1 (ja) 2022-08-25
US20240018954A1 (en) 2024-01-18

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