JP7427772B2 - 波長分解軟x線反射率測定に基づく半導体計測のための方法及びシステム - Google Patents
波長分解軟x線反射率測定に基づく半導体計測のための方法及びシステム Download PDFInfo
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Description
Claims (22)
- 計測システムであって、
10電子ボルト乃至5,000電子ボルトの光子エネルギ範囲内の多重照明波長を含む量の軟x線放射を生成するように構成されたx線照明源であって、前記量の軟x線放射は、1乃至45度の公称かすめ入射角で半導体ウェーハに入射する入射x線照明ビームとして前記半導体ウェーハ上に作製された計測標的に誘導される、x線照明源と、
前記入射x線照明ビームに応じて前記計測標的から多重の異なる回折次数へと散乱させられた第1の量のx線放射の光学経路内に配設された第1の検出器であって、前記第1の検出器は、第1の複数の測定信号を生成するように構成され、前記第1の複数の測定信号のそれぞれは、前記第1の検出器上の異なる場所での検出された量のx線放射を示し、前記第1の複数の測定信号のそれぞれは、前記多重の異なる回折次数のうちの別個の回折次数で回折された前記多重照明波長のうちの別個の波長を示す、第1の検出器と、
前記第1の複数の測定信号に基づいて前記計測標的を特徴付ける関心のパラメータの値を決定するように構成された計算システムと、
を備える計測システム。 - 前記入射x線照明ビームに応じて前記計測標的から1つ又は複数の異なる回折次数へと散乱させられた第2の量のx線放射の光学経路内に配設された第2の検出器を更に備え、前記第2の検出器は、第2の複数の測定信号を生成するように構成され、前記第2の複数の測定信号のそれぞれは、前記第2の検出器上の異なる場所での検出された量のx線放射を示し、前記第2の複数の測定信号のそれぞれは、前記1つ又は複数の異なる回折次数を示し、前記計算システムは、前記第1及び第2の複数測定信号に基づいて、前記計測標的を特徴付ける関心の前記パラメータの前記値を決定するように更に構成されている、請求項1に記載の計測システム。
- 前記第2の量のx線放射は、深紫外スペクトル範囲、真空紫外スペクトル範囲、可視スペクトル範囲、及び赤外スペクトル範囲のうちのいずれかの放射線を含む、請求項2に記載の計測システム。
- 前記x線照明源と前記半導体ウェーハとの間の照明光学経路内に配設された1つ又は複数のx線照明光学要素を更に備え、前記1つ又は複数のx線照明光学要素は、1乃至45度の公称かすめ入射角で前記半導体ウェーハに入射する入射x線照明ビームとして、前記半導体ウェーハ上に前記量の軟x線放射を集束させる、請求項1に記載の計測システム。
- 前記x線照明源は、高調波発生(HHG)レーザベースの照明源である、請求項1に記載の計測システム。
- 前記x線照明源と前記半導体ウェーハとの間の光学経路内に位置するビームエネルギフィルタを更に備え、前記ビームエネルギフィルタは、所望のビームエネルギ範囲内のx線照明を透過し、前記所望のビームエネルギ範囲外のx線照明を吸収する、請求項1に記載の計測システム。
- 前記x線照明源は、1ミリラジアン未満のビーム発散を有する前記量の軟x線放射を放出する、請求項1に記載の計測システム。
- 前記x線照明源と前記半導体ウェーハとの間の光学経路内に縮小光学要素を更に備え、前記縮小光学要素は、前記入射x線照明ビームを横切る第1の方向に0.2以下の拡大係数によって前記半導体ウェーハ上に前記入射x線照明ビームを集束させ、前記第1の方向と直交する前記入射x線照明ビームを横切る第2の方向に0.9以上の拡大係数によって前記半導体ウェーハ上に前記入射x線照明ビームを集束させる、請求項1に記載の計測システム。
- 前記x線照明源は、深紫外スペクトル範囲、真空紫外スペクトル範囲、可視スペクトル範囲、及び赤外スペクトル範囲のうちのいずれかの放射線を放出するように更に構成されている、請求項1に記載の計測システム。
- 前記x線照明源は、50マイクロメートル未満の最大範囲の寸法によって特徴付けられた照明源領域を有する、請求項1に記載の測定システム。
- 関心の前記パラメータは、オーバーレイ誤差、臨界寸法、及びエッジ配置誤差のうちのいずれかである、請求項1に記載の計測システム。
- 前記計測標的に対して照明中に、前記計測標的に蒸気相の充填材料を含むガス流を提供する蒸気注入システムを更に備えている、請求項1に記載の計測システム。
- 前記x線照明源は、所望の光子エネルギ範囲を含む前記量の軟x線放射を生成するように調整される、請求項1に記載の計測システム。
- 前記x線照明源と前記半導体ウェーハとの間の照明光学経路内に配設された1つ又は複数のx線照明光学要素を更に備え、前記1つ又は複数のx線照明光学要素は、複数の入射角、複数の波長、及び複数の方位角で前記半導体ウェーハに入射する入射x線照明ビームとして、前記半導体ウェーハ上に前記量の軟x線放射を集束させる、請求項1に記載の計測システム。
- 前記1つ又は複数のx線照明光学要素は、前記多重照明波長を選択する段階的多層光学要素である、請求項14に記載の計測システム。
- 方法であって、
10電子ボルト乃至5,000電子ボルトの光子エネルギ範囲内の多重照明波長を含む量の軟x線放射を提供するステップであって、前記量の軟x線放射は、1乃至45度の公称かすめ入射角で半導体ウェーハに入射する入射x線照明ビームとして、前記半導体ウェーハ上に作製された計測標的に誘導される、ステップと、
前記入射x線照明ビームに応じて前記計測標的から多重の異なる回折次数へと散乱させられた第1の量のx線放射を検出するステップと、
第1の複数の測定信号を生成するステップであって、前記第1の複数の測定信号のそれぞれは、第1の検出器の活性表面上の異なる場所での前記検出された量のx線放射を示し、前記第1の複数の測定信号のそれぞれは、前記多重の異なる回折次数のうちの別個の回折次数で回折された前記多重照明波長のうちの別個の波長を示す、ステップと、
前記第1の複数の測定信号に基づいて、前記計測標的を特徴付ける関心のパラメータの値を決定するステップと、
を含む方法。 - 前記入射x線照明ビームに応じて前記計測標的から1つ又は複数の回折次数へと散乱させられた第2の量のx線放射を検出するステップと、
第2の複数の測定信号を生成するステップであって、前記第2の複数の測定信号のそれぞれは、第2の検出器の活性表面上の異なる場所での前記検出された量のx線放射を示し、前記第2の複数の測定信号のそれぞれは、前記1つ又は複数の回折次数を示し、前記計測標的を特徴付ける関心の前記パラメータの前記値を決定する前記ステップは、前記第1の及び第2の複数の測定信号に基づいている、ステップと、
を更に含む、請求項16に記載の方法。 - 前記第2の量のx線放射は、深紫外スペクトル範囲、真空紫外スペクトル範囲、可視スペクトル範囲、及び赤外スペクトル範囲のうちのいずれかの放射線を含む、請求項17に記載の方法。
- x線照明源と前記半導体ウェーハとの間の光学経路内の前記入射x線照明ビームをフィルタで除くステップを更に含む、請求項17に記載の方法。
- 前記入射x線照明ビームを横切る第1の方向に0.2以下の拡大係数によって前記入射x線照明ビームを縮小するステップと、
前記第1の方向と直交する前記入射x線照明ビームを横切る第2の方向に0.9以上の拡大係数によって前記半導体ウェーハ上に前記入射x線照明ビームを投射するステップと、
を更に含む、請求項17に記載の方法。 - 計測システムであって、
10電子ボルト乃至5,000電子ボルトの光子エネルギ範囲内の多重照明波長を含む量の軟x線放射を生成するように構成されたx線照明源であって、前記量の軟x線放射は、半導体ウェーハに入射する入射x線照明ビームとして、前記半導体ウェーハ上に作製された計測標的に誘導される、x線照明源と、
前記入射x線照明ビームに応じて、前記計測標的から多重の異なる回折次数へと散乱させられた第1の量のx線放射の光学経路内に配設された第1の検出器であって、前記第1の検出器は、第1の複数の測定信号を生成するように構成され、前記第1の複数の測定信号のそれぞれは、前記第1の検出器上の異なる場所での検出された量のx線放射を示し、前記第1の複数の測定信号のそれぞれは、前記多重の異なる回折次数のうちの別個の回折次数で回折された前記多重照明波長のうちの別個の波長を示す、第1の検出器と、
前記入射x線照明ビームに応じて、前記計測標的から1つ又は複数の異なる回折次数へと散乱させられた第2の量のx線放射の光学経路内に配設された第2の検出器であって、前記第2の検出器は、第2の複数の測定信号を生成するように構成され、前記第2の複数の測定信号のそれぞれは、前記第2の検出器上の異なる場所での検出された量のx線放射を示し、前記第2の複数の測定信号のそれぞれは、前記1つ又は複数の異なる回折次数を示す、第2の検出器と、
前記第1の及び第2の複数の測定信号に基づいて、前記計測標的を特徴付ける関心のパラメータの値を決定するように構成された計算システムと、
を備える計測システム。 - 前記第2の量のx線放射は、深紫外スペクトル範囲、真空紫外スペクトル範囲、可視スペクトル範囲、及び赤外スペクトル範囲のうちのいずれかの放射線を含む、請求項21に記載の計測システム。
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IL290518B2 (en) | 2023-08-01 |
CN114207419B (zh) | 2024-01-09 |
TWI833979B (zh) | 2024-03-01 |
IL290518B1 (en) | 2023-04-01 |
WO2021040936A1 (en) | 2021-03-04 |
DE112020004109T5 (de) | 2022-07-14 |
KR20220050976A (ko) | 2022-04-25 |
KR102557179B1 (ko) | 2023-07-18 |
CN114207419A (zh) | 2022-03-18 |
US11460418B2 (en) | 2022-10-04 |
JP2022545724A (ja) | 2022-10-28 |
US20210063329A1 (en) | 2021-03-04 |
IL290518A (en) | 2022-04-01 |
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