JP7328018B2 - 基板固定装置及びその製造方法 - Google Patents
基板固定装置及びその製造方法 Download PDFInfo
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- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
- H01J37/32724—Temperature
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/15—Devices for holding work using magnetic or electric force acting directly on the work
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- H—ELECTRICITY
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Description
図1は、実施形態に係る基板固定装置を簡略化して例示する断面図である。図1を参照するに、基板固定装置1は、主要な構成要素として、ベースプレート10と、接着層20と、支柱構造体21と、静電吸着部材50とを有している。
図2~図5は、実施形態に係る基板固定装置の製造方法を例示する図である。図2~図5を参照しながら説明する。なお、図2(a)~図3(b)及び図5(a)は、図1とは上下を反転した状態で描いている。
10 ベースプレート
11 金属プレート
12 樹脂層
20 接着層
21 支柱構造体
30 発熱部
40 静電チャック
50 静電吸着部材
Claims (16)
- ベースプレートと、
基板を吸着保持する静電吸着部材と、
前記ベースプレート上で前記静電吸着部材を支持する複数の支持部材と、
前記静電吸着部材を前記ベースプレートに接着する接着層と、
を有し、
前記複数の支持部材の各々は、前記ベースプレート及び前記静電吸着部材に直接接触し、
前記複数の支持部材の各々の弾性率は、前記接着層の弾性率より高く、
前記複数の支持部材の各々の材料は樹脂であり、
前記複数の支持部材の各々の前記静電吸着部材に接触する面は平坦であることを特徴とする基板固定装置。 - 前記支持部材の弾性率は、前記接着層の弾性率の10倍以上であることを特徴とする請求項1に記載の基板固定装置。
- 前記静電吸着部材は、静電チャックを有することを特徴とする請求項1又は2に記載の基板固定装置。
- 前記静電吸着部材は、前記ベースプレートと前記静電チャックとの間に発熱部を有することを特徴とする請求項3に記載の基板固定装置。
- 前記ベースプレートは、
金属基体と、
前記金属基体の前記静電吸着部材側に設けられた樹脂層と、
を有することを特徴とする請求項1乃至4のいずれか1項に記載の基板固定装置。 - 前記支持部材の熱伝導率と前記接着層の熱伝導率との差は、2W/(m・K)以下であることを特徴とする請求項1乃至5のいずれか1項に記載の基板固定装置。
- 前記支持部材の熱膨張率は、前記接着層の熱膨張率の0.1倍以上10倍以下であることを特徴とする請求項1乃至6のいずれか1項に記載の基板固定装置。
- 前記複数の支持部材の前記静電吸着部材に接触する面は、前記複数の支持部材の間で面一であることを特徴とする請求項1乃至7のいずれか1項に記載の基板固定装置。
- 前記樹脂は、シリコーン樹脂、エポキシ樹脂、アクリル樹脂及びポリイミド樹脂からなる群から選択された少なくとも1種を含むことを特徴とする請求項1乃至8のいずれか1項に記載の基板固定装置。
- 基板を吸着保持する静電吸着部材とベースプレートとの間に、半硬化状態の接着層と、前記ベースプレート上で前記静電吸着部材を支持する複数の支持部材と、を設ける工程と、
前記静電吸着部材及び前記ベースプレートを加熱しながらプレスして前記接着層を硬化させる工程と、
を有し、
前記複数の支持部材の各々は、前記ベースプレート及び前記静電吸着部材に直接接触し、
前記複数の支持部材の各々の弾性率は、前記接着層の弾性率より高く、
前記複数の支持部材の各々の材料は樹脂であり、
前記複数の支持部材の各々の前記静電吸着部材に接触する面は平坦であることを特徴とする基板固定装置の製造方法。 - 前記支持部材の弾性率は、前記接着層の弾性率の10倍以上であることを特徴とする請求項10に記載の基板固定装置の製造方法。
- 前記支持部材の熱伝導率と前記接着層の熱伝導率との差は、2W/(m・K)以下であることを特徴とする請求項10又は11に記載の基板固定装置の製造方法。
- 前記支持部材の熱膨張率は、前記接着層の熱膨張率の0.1倍以上10倍以下であることを特徴とする請求項10乃至12のいずれか1項に記載の基板固定装置の製造方法。
- 前記接着層を硬化させる工程の後に、前記静電吸着部材の吸着面を研磨する工程を有することを特徴とする請求項10乃至13のいずれか1項に記載の基板固定装置の製造方法。
- 前記複数の支持部材の前記静電吸着部材に接触する面を、前記複数の支持部材の間で面一とすることを特徴とする請求項10乃至14のいずれか1項に記載の基板固定装置の製造方法。
- 前記樹脂は、シリコーン樹脂、エポキシ樹脂、アクリル樹脂及びポリイミド樹脂からなる群から選択された少なくとも1種を含むことを特徴とする請求項10乃至15のいずれか1項に記載の基板固定装置の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019110515A JP7328018B2 (ja) | 2019-06-13 | 2019-06-13 | 基板固定装置及びその製造方法 |
US16/896,815 US11456200B2 (en) | 2019-06-13 | 2020-06-09 | Substrate fixing apparatus including a base plate, an electrostatic adsorption member, a plurality of support members on the base plate and supporting the electrostatic adsorption member, and an adhesive layer bonding the electrostatic adsorption member to the base plate |
KR1020200069394A KR20200143268A (ko) | 2019-06-13 | 2020-06-09 | 기판 고정 장치 및 그 제조 방법 |
TW109119389A TWI836092B (zh) | 2019-06-13 | 2020-06-10 | 基板固定裝置及其製造方法 |
CN202010534415.2A CN112086393A (zh) | 2019-06-13 | 2020-06-12 | 基板固定装置及其制造方法 |
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JP2010147095A (ja) | 2008-12-16 | 2010-07-01 | Shinko Electric Ind Co Ltd | 基板固定装置 |
JP2011061049A (ja) | 2009-09-11 | 2011-03-24 | Ngk Spark Plug Co Ltd | 静電チャック |
JP2011176275A (ja) | 2010-01-29 | 2011-09-08 | Sumitomo Osaka Cement Co Ltd | 静電チャック装置 |
JP2011222978A (ja) | 2010-03-24 | 2011-11-04 | Toto Ltd | 静電チャック |
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CN112086393A (zh) | 2020-12-15 |
TWI836092B (zh) | 2024-03-21 |
US11456200B2 (en) | 2022-09-27 |
JP2020202352A (ja) | 2020-12-17 |
US20200395236A1 (en) | 2020-12-17 |
KR20200143268A (ko) | 2020-12-23 |
TW202105596A (zh) | 2021-02-01 |
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