JP7311152B2 - 水晶振動子の電極構造、水晶振動子、水晶発振器 - Google Patents

水晶振動子の電極構造、水晶振動子、水晶発振器 Download PDF

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JP7311152B2
JP7311152B2 JP2020047607A JP2020047607A JP7311152B2 JP 7311152 B2 JP7311152 B2 JP 7311152B2 JP 2020047607 A JP2020047607 A JP 2020047607A JP 2020047607 A JP2020047607 A JP 2020047607A JP 7311152 B2 JP7311152 B2 JP 7311152B2
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electrode
crystal
area
crystal oscillator
main surface
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JP2021150761A5 (https=
JP2021150761A (ja
Inventor
昇 高橋
了 小林
幸博 岡本
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MAXIS-01 CORPORATION
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MAXIS-01 CORPORATION
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Priority to JP2020047607A priority Critical patent/JP7311152B2/ja
Priority to CN202080096715.5A priority patent/CN115136494A/zh
Priority to PCT/JP2020/049056 priority patent/WO2021186839A1/ja
Priority to US17/906,267 priority patent/US12512814B2/en
Priority to TW110108543A priority patent/TWI828973B/zh
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/176—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of ceramic material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2020047607A 2020-03-18 2020-03-18 水晶振動子の電極構造、水晶振動子、水晶発振器 Active JP7311152B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2020047607A JP7311152B2 (ja) 2020-03-18 2020-03-18 水晶振動子の電極構造、水晶振動子、水晶発振器
CN202080096715.5A CN115136494A (zh) 2020-03-18 2020-12-28 晶体振子的电极结构、晶体振子和晶体振荡器
PCT/JP2020/049056 WO2021186839A1 (ja) 2020-03-18 2020-12-28 水晶振動子の電極構造、水晶振動子、水晶発振器
US17/906,267 US12512814B2 (en) 2020-03-18 2020-12-28 Electrode structure of crystal unit, crystal unit, and crystal oscillator
TW110108543A TWI828973B (zh) 2020-03-18 2021-03-10 晶體振子之激振電極的設計方法，晶體振子之製造方法，晶體振盪器之製造方法及晶體振子之激振電極的製造方法

Applications Claiming Priority (1)

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JP2020047607A JP7311152B2 (ja) 2020-03-18 2020-03-18 水晶振動子の電極構造、水晶振動子、水晶発振器

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JP2021150761A JP2021150761A (ja) 2021-09-27
JP2021150761A5 JP2021150761A5 (https=) 2022-12-02
JP7311152B2 true JP7311152B2 (ja) 2023-07-19

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WO (1) WO2021186839A1 (https=)

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WO2024214335A1 (ja) * 2023-04-14 2024-10-17 株式会社村田製作所 圧電振動素子

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005318477A (ja) 2004-04-30 2005-11-10 Seiko Epson Corp 圧電振動片、その電極形成方法、及び圧電デバイス
JP2008005333A (ja) 2006-06-23 2008-01-10 Daishinku Corp 圧電振動デバイス
JP2008047982A (ja) 2006-08-10 2008-02-28 Daishinku Corp 圧電振動デバイス
JP2013255052A (ja) 2012-06-06 2013-12-19 Seiko Epson Corp 振動素子、振動子、電子デバイス、電子機器、移動体および振動素子の製造方法
JP2016019225A (ja) 2014-07-10 2016-02-01 富士通株式会社 水晶振動子
JP2017192032A (ja) 2016-04-13 2017-10-19 日本電波工業株式会社 水晶振動子
JP2018042121A (ja) 2016-09-08 2018-03-15 株式会社村田製作所 水晶振動素子及びその製造方法並びに水晶振動子及びその製造方法

Family Cites Families (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3640497B2 (ja) * 1997-03-05 2005-04-20 パイオニア株式会社 収差補正装置及び情報記録媒体再生装置
JP3731348B2 (ja) * 1998-06-09 2006-01-05 松下電器産業株式会社 圧電振動子
JP3775965B2 (ja) * 2000-02-07 2006-05-17 パイオニア株式会社 光学式情報再生装置
KR100754158B1 (ko) * 2000-12-08 2007-09-03 삼성전자주식회사 구면수차 검출 및/또는 보정 가능한 광픽업장치
US20030048041A1 (en) * 2001-09-07 2003-03-13 Hiroyuki Kita Piezoelectric thin-film element and a manufacturing method thereof
JP2003273682A (ja) 2002-03-15 2003-09-26 Seiko Epson Corp 圧電振動片の周波数調整方法、圧電振動片および圧電デバイス
JP4036149B2 (ja) 2003-07-03 2008-01-23 セイコーエプソン株式会社 圧電デバイスのリーク検出方法
JP2005159717A (ja) 2003-11-26 2005-06-16 Toyo Commun Equip Co Ltd 圧電振動子とその製造方法
JP4459685B2 (ja) * 2004-03-31 2010-04-28 富士通株式会社 液晶表示装置
US7764329B2 (en) * 2005-12-02 2010-07-27 Au Optronics Corp. MVA LCD device and pixel circuit thereof
JP2009110556A (ja) * 2006-02-14 2009-05-21 Panasonic Corp 光学ヘッドおよび光情報処理装置
TWI364734B (en) * 2006-06-30 2012-05-21 Chimei Innolux Corp Liquid crystal display panel, driving method and liquid crystal displayer
KR101404544B1 (ko) * 2007-08-07 2014-06-10 삼성디스플레이 주식회사 액정 표시 장치
TWI339304B (en) * 2007-10-16 2011-03-21 Au Optronics Corp Pixel structure, driving method thereof and pixel array structure
US20120057118A1 (en) * 2009-05-28 2012-03-08 Katsuhiko Morishita Liquid crystal display device
JP5589167B2 (ja) * 2010-11-19 2014-09-17 セイコーエプソン株式会社 圧電振動片および圧電振動子
CN102684636B (zh) * 2011-03-09 2015-12-16 精工爱普生株式会社 振动元件、振子、振荡器以及电子设备
JP5708089B2 (ja) * 2011-03-18 2015-04-30 セイコーエプソン株式会社 圧電振動素子、圧電振動子、圧電発振器及び電子デバイス
JP2013021667A (ja) 2011-03-23 2013-01-31 Nippon Dempa Kogyo Co Ltd 水晶デバイス
CN102957394B (zh) * 2011-08-18 2016-12-21 精工爱普生株式会社 振动元件、振子、电子装置、电子设备、移动体及振动元件的制造方法
US8970316B2 (en) * 2011-08-19 2015-03-03 Seiko Epson Corporation Resonating element, resonator, electronic device, electronic apparatus, and mobile object
JP5943186B2 (ja) * 2012-03-19 2016-06-29 セイコーエプソン株式会社 振動片、振動子、電子デバイス、および電子機器
JP5943187B2 (ja) * 2012-03-21 2016-06-29 セイコーエプソン株式会社 振動素子、振動子、電子デバイス、および電子機器
CN103843249B (zh) * 2012-04-04 2016-01-20 株式会社村田制作所 水晶振动装置
JP6083144B2 (ja) 2012-07-27 2017-02-22 セイコーエプソン株式会社 振動片、振動素子、振動子、電子デバイス、電子機器、移動体及び振動片の製造方法
JP2015019240A (ja) * 2013-07-11 2015-01-29 日本電波工業株式会社 圧電振動片、圧電振動片の製造方法、圧電デバイス、及び圧電デバイスの製造方法
JP6390836B2 (ja) * 2014-07-31 2018-09-19 セイコーエプソン株式会社 振動片、振動子、振動デバイス、発振器、電子機器、および移動体
KR20160032600A (ko) * 2014-09-16 2016-03-24 삼성전기주식회사 압전 진동편, 그 제조방법 및 압전 진동자
JP6500915B2 (ja) * 2015-01-29 2019-04-17 株式会社大真空 水晶振動板、及び水晶振動デバイス
JP2016140023A (ja) * 2015-01-29 2016-08-04 セイコーエプソン株式会社 振動片、振動子、振動デバイス、発振器、電子機器、および移動体
CN107408935B (zh) * 2015-03-03 2018-11-09 株式会社村田制作所 晶体振子
JP6552225B2 (ja) 2015-03-12 2019-07-31 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子
JP6591194B2 (ja) * 2015-05-15 2019-10-16 株式会社ジャパンディスプレイ 液晶表示装置
CN107636963B (zh) * 2015-06-12 2020-07-28 株式会社村田制作所 石英片以及石英振子
WO2016199918A1 (ja) * 2015-06-12 2016-12-15 株式会社村田製作所 水晶片及び水晶振動子
CN107636962B (zh) * 2015-06-12 2020-07-31 株式会社村田制作所 石英片以及石英振子
WO2017006941A1 (ja) * 2015-07-09 2017-01-12 株式会社村田製作所 水晶振動片及び水晶振動子
CN107852147B (zh) * 2015-09-01 2021-02-05 株式会社村田制作所 水晶片以及水晶振子
CN108028638B (zh) * 2015-09-25 2021-01-05 株式会社村田制作所 水晶片以及水晶振子
CN108028639B (zh) * 2015-09-28 2021-01-08 株式会社村田制作所 晶体片以及晶体振子
WO2017057167A1 (ja) * 2015-09-30 2017-04-06 株式会社村田製作所 水晶片及び水晶振動子
CN108141194B (zh) * 2015-10-02 2021-07-06 株式会社村田制作所 晶体片以及晶体振子
JP6579344B2 (ja) * 2016-01-21 2019-09-25 株式会社村田製作所 水晶振動子及びその製造方法
JP6666166B2 (ja) 2016-02-26 2020-03-13 京セラ株式会社 水晶素子および水晶デバイス
CN109690940B (zh) * 2016-09-08 2023-03-14 株式会社村田制作所 水晶振子及其制造方法
JP6910134B2 (ja) * 2016-11-30 2021-07-28 京セラ株式会社 圧電振動素子及び圧電振動デバイス
JP6791766B2 (ja) 2017-01-17 2020-11-25 日本電波工業株式会社 圧電振動片及び圧電デバイス
US20180241371A1 (en) 2017-02-21 2018-08-23 Nihon Dempa Kogyo Co., Ltd. Piezoelectric device
WO2018212150A1 (ja) * 2017-05-15 2018-11-22 株式会社村田製作所 水晶振動素子及び水晶振動子並びにそれらの製造方法
JP6970391B2 (ja) * 2017-09-22 2021-11-24 株式会社村田製作所 圧電振動素子の製造方法及び圧電振動子の製造方法
JP7259940B2 (ja) * 2019-03-28 2023-04-18 株式会社村田製作所 圧電振動子とその製造方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005318477A (ja) 2004-04-30 2005-11-10 Seiko Epson Corp 圧電振動片、その電極形成方法、及び圧電デバイス
JP2008005333A (ja) 2006-06-23 2008-01-10 Daishinku Corp 圧電振動デバイス
JP2008047982A (ja) 2006-08-10 2008-02-28 Daishinku Corp 圧電振動デバイス
JP2013255052A (ja) 2012-06-06 2013-12-19 Seiko Epson Corp 振動素子、振動子、電子デバイス、電子機器、移動体および振動素子の製造方法
JP2016019225A (ja) 2014-07-10 2016-02-01 富士通株式会社 水晶振動子
JP2017192032A (ja) 2016-04-13 2017-10-19 日本電波工業株式会社 水晶振動子
JP2018042121A (ja) 2016-09-08 2018-03-15 株式会社村田製作所 水晶振動素子及びその製造方法並びに水晶振動子及びその製造方法

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TWI828973B (zh) 2024-01-11
CN115136494A (zh) 2022-09-30
US20230130678A1 (en) 2023-04-27
TW202137698A (zh) 2021-10-01
JP2021150761A (ja) 2021-09-27
WO2021186839A1 (ja) 2021-09-23
US12512814B2 (en) 2025-12-30

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