JP7290816B2 - Linear motor drive device and surface shape measuring device - Google Patents

Description

The present invention relates to a linear motor driving device and a surface shape measuring device, and more particularly to a linear motor driving device and a surface shape measuring device having a linear motor and a driven part driven by the linear motor.

As a linear motor, for example, the linear motor disclosed in Patent Document 1 has a stator, which is a bar-shaped magnet, and a coil member that is fitted in the stator, and is capable of linear movement along the stator. have a child and

Further, Patent Literature 1 discloses a surface profile measuring apparatus in which a linear motor driving device is applied to a detector driving device. This linear motor driving device has a linear motor, a driven part driven by the linear motor, and a linear motion guide for guiding the driven part in a moving direction. have. This driven part is connected to a balance weight via a wire wound around a pulley, and the mover is fixed to this balance weight. Therefore, according to this linear motor drive device, by linearly moving the mover along the stator, the detector can be moved via the balance weight, the wire, and the driven part. By applying the linear motor driving device as the driving device of the detector in this way, there is no wear part, low vibration driving is possible, a large speed range can be secured, high rigidity, simple structure, back Advantageous effects such as no rush can be obtained.

JP 2004-297978 A

However, in the linear motor driving device of Patent Document 1, the driven part may yawing when the driven part moves, and the yawing of the driven part may affect the accuracy of roughness measurement.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a linear motor driving device and a surface profile measuring device capable of suppressing yawing of a driven part that occurs when the driven part moves. and

In order to achieve the object of the present invention, the linear motor drive device of the present invention includes a stator extending along a first direction in a device main body, and a stator fitted in the stator and moving along the stator. a linear motor having a movable movable element; a driven portion provided in the device body so as to be slidable along the first direction and having a sliding surface; A linear motion guide having a reference surface that is in sliding contact with the surface, a holder fixed to the driven part and having a detector having a stylus mounted thereon, one end connected to the slider, and the other end connected to the driven part via a pulley. a power transmission member connected to the driving portion; and a balance weight fixed to the mover. The driven part and the holder are arranged along a straight line parallel to a second direction orthogonal to the first direction.

In order to achieve the object of the present invention, the linear motor drive device of the present invention includes a stator extending along a first direction in a device main body, and a stator fitted in the stator and moving along the stator. a movable mover; a driven portion fixed to the mover and having a sliding surface; and a reference surface disposed adjacent to the driven portion and in sliding contact with the sliding surface. a linear motion guide, a holder fixed to a driven part and having a detector having a stylus mounted thereon, a balance weight movable along a first direction in a device body, and one end connected to the driven part, and a power transmission member having the other end connected to the balance weight via a pulley, wherein when the linear motor, the driven part, the linear motion guide and the holder are viewed from the first direction, the linear motor, the driven part and the holder are arranged along a straight line parallel to a second direction orthogonal to the first direction.

In one aspect of the invention, it is preferred that the first direction is horizontal and the second direction is vertical.

In one aspect of the invention, it is preferred that the first direction is vertical and the second direction is horizontal.

In order to achieve the object of the present invention, there is provided a surface profile measuring apparatus comprising the linear motor driving device of the present invention, comprising a detector attached to a holder of the linear motor driving device; a stylus attached to the detector and displaceable in a second direction.

According to the present invention, yawing of the driven part that occurs when the driven part moves can be suppressed.

FIG. 2 is a perspective view of a surface roughness measuring device included in the linear motor driving device of the first embodiment; Block diagram showing the configuration of the surface roughness measuring device shown in FIG. The front view which showed the structure of the linear motor drive device shown in FIG. Cross-sectional view of the linear motor drive along line AA in FIG. FIG. 4 is an enlarged cross-sectional view of a main part of a linear motor that constitutes the linear motor drive device of FIG. The front view which showed the structure of the linear motor drive device of 2nd Embodiment. Enlarged cross-sectional view of the linear motor drive device along line CC in FIG. The front view which showed the structure of the linear motor drive device of 3rd Embodiment. Enlarged cross-sectional view of the linear motor drive device along line DD in FIG. The front view which showed the structure of the linear motor drive device of 4th Embodiment. Enlarged cross-sectional view of the linear motor drive device along the FF line of FIG.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of a linear motor driving device and a surface profile measuring device according to the present invention will be described with reference to the accompanying drawings.

FIG. 1 is an overall perspective view of a surface roughness measuring device 100 in which the linear motor driving device 10 of the first embodiment is applied to the driving device of the detector 112. FIG. FIG. 2 is a block diagram showing the configuration of surface roughness measuring apparatus 100 shown in FIG.

For ease of understanding, the scale of each member in the drawings may differ from the actual scale. Further, in this specification, a three-dimensional orthogonal coordinate system with three axial directions (X-axis direction, Y-axis direction, and Z-axis direction) is used, and the horizontal movement direction of the detector 112 moved by the linear motor driving device 10 is X The horizontal direction perpendicular to the X-axis direction is the Y-axis direction, and the vertical direction perpendicular to the X-axis direction and the Y-axis direction is the Z-axis direction. Moreover, the surface roughness measuring device 100 is an example of the surface profile measuring device of the present invention.

As shown in FIG. 1, the surface roughness measuring device 100 comprises a linear motor driving device 10, a measuring section 102, a data processing device 104, an input device 106, a monitor 108 and the like. The measuring unit 102 has a detector 112 for measuring the surface roughness of the work W of FIG. 1).

A stylus (also called stylus) 114 that can be displaced in the Z-axis direction (vertical direction) is attached to the end of the detector 112, and the amount of displacement of the stylus 114 in the Z-axis direction is 112 is converted into a voltage by a differential transformer (not shown). This voltage value is then A/D converted by an A/D converter (not shown) and output to the CPU (central processing unit) 118 of the data processing device 104 in FIG.

The data processing device 104 includes arithmetic processing circuits including a CPU 118 and a memory 120 such as a ROM (Read Only Memory) or a RAM (Random Access Memory). As a result, the functions of the respective parts of the data processing device 104 are realized, and measurement data indicating the surface roughness of the workpiece W is obtained. This measurement data is output to the monitor 108 by the roughness output means 122 of the data processor 104 and displayed on the monitor 108 .

As shown in FIG. 1, the linear motor drive device 10 is attached to a column 124 erected on the measuring table 110 in the Z-axis direction. Then, according to instructions from the CPU 118 in FIG. 2, a motor (not shown) for moving in the Z-axis direction is driven to move the entire linear motor drive device 10 along the column 124 in the Z-axis direction. Further, according to instructions from the CPU 118, the linear motor 12 (see FIG. 5) of the linear motor driving device 10 is driven to move the holder 116 in the X-axis direction. As a result, the stylus 114 is moved in the X-axis direction together with the detector 112 . Note that the joystick 126 mounted on the front surface of the measuring table 110 can be used to manually operate the motor for moving in the Z-axis direction and the linear motor 12 for moving in the X-axis direction.

Next, the linear motor drive device 10 of 1st Embodiment is demonstrated.

FIG. 3 is a front view showing the configuration of the linear motor driving device 10, and a cross-sectional view of the essential parts thereof. 4 is an enlarged cross-sectional view taken along line AA of FIG. 3. FIG. FIG. 5 is an enlarged cross-sectional view of the main part of the linear motor 12 that constitutes the linear motor drive device 10. As shown in FIG.

A linear motor drive device 10 includes a linear motor 12 mainly composed of a stator 14 and a mover 16, a housing 18 which is the main body of the device, and fixing metal fittings 20, 20 for fixing both ends of the stator 14 to the housing 18. and have. Although not shown, the linear motor drive device 10 includes a cableveyor (registered trademark) for supplying power to the moving element 16, an encoder for detecting the moving direction position of the moving element 16, and an encoder. It has a scale and limit sensors provided near both ends of the stator 14 to detect the end limits of the mover 16 .

First, an example of the linear motor 12 will be described with reference to FIG.

The linear motor 12 is a so-called shaft type linear motor. The linear motor 12 has a stator 14 which is a linear rod-shaped shaft member formed with field magnets. It is configured by

The stator 14 is made of a magnetizable material such as Fe--Cr--Co metal, and has a circular cross section. In addition, the stator 14 is magnetized so as to have a magnetic flux distribution with an equal pitch along the longitudinal direction, preferably a substantially rectangular shape. As a result, the stator 14 is provided with driving magnetized portions in which N poles and S poles are alternately arranged along the longitudinal direction with the same magnetic pole width P. This constitutes a magnetic field magnet. It is Further, the magnetic pole width P is set to 30 mm, for example. The stator 14 configured in this manner extends in the X-axis direction as shown in FIGS.

The coil member 30 of the mover 16 is composed of two coil groups (a first coil group and a second coil group) each having three coils of U-phase, V-phase, and W-phase. A first group of coils consists of coils U1, V1, and W1, which are arranged in this order in the longitudinal direction of the stator 14. As shown in FIG. A second group of coils consists of coils U2, V2, and W2, which are arranged in this order in the longitudinal direction of the stator 14. As shown in FIG. These coils are all formed to have a width of 1/3 of the magnetic pole width P.

These coils constituting the coil member 30 are fixed and integrated by coating their outer peripheral surfaces with an adhesive. The coil member 30 is built in a hollow portion of a hollow rectangular parallelepiped mover frame 32 , and is integrally supported on the inner peripheral surface of the mover frame 32 .

Bearings 34 , 34 are fitted to the stator 14 and are slidable on the stator 14 at both ends of the mover frame 32 in the horizontal direction. Due to the action of the bearings 34 , 34 , the mover 16 slides along the stator 14 .

According to this linear motor 12, when current is supplied from the cableveyor described above to the coil member 30 of the mover 16, the interaction between the current flowing through the coil member 30 of the mover 16 and the magnetic flux of the stator 14 causes , according to Fleming's left-hand rule, the mover 16 linearly moves along the stator 14 in the X-axis direction. Note that the linear motor 12 in FIG. 5 is an example, and linear motors having other configurations can also be applied to the linear motor drive device 10 of the present invention. As a linear motor having another configuration, a linear motor in which the stator 14 side is configured by the coil member 30 and the mover 16 side is configured by the driving magnetized portion can be exemplified.

As shown in FIGS. 3 and 4, the linear motor drive device 10 includes a linear motor 12, a driven portion 40, a linear motion guide 42, belts 44 and 46 as power transmission members, and a balance weight 70. , and a holder 116 . Further, according to the linear motor driving device 10, as shown in FIG. 4, the linear motor 12, the driven portion 40, the linear motion guide 42, and the holder 116 are viewed from the direction of the movement axis of the driven portion 40 (X-axis direction). The linear motor 12, the driven part 40, and the holder 116 are arranged along a straight line B parallel to the Z-axis direction (vertical direction) orthogonal to the X-axis direction. The configuration of each member will be described below.

The driven portion 40 includes a block fixing member 48, a connecting block 50, and a holder mounting member 52. The block fixing member 48, the connecting block 50, and the holder mounting member 52 are arranged along the straight line B. ing.

The block fixing member 48 is configured in a plate shape, and the connecting block 50 is fixed to the lower part thereof.

The block fixing member 48 has lower surfaces 48A, 48A, and these lower surfaces 48A, 48A are configured as highly flat sliding surfaces.

The linear motion guide 42 is configured in a substantially rectangular parallelepiped shape and arranged along the X-axis direction. A slit 42A (see FIG. 3) along the X-axis direction is formed through the linear motion guide 42 in the Z-axis direction, and the guide block 50 is inserted into the slit 42A. Further, the linear motion guide 42 has side surfaces 42B, 42B (see FIG. 4) defining a slit 42A and perpendicular to the Y-axis direction. Further, the linear motion guide 42 has upper surfaces 42C, 42C, and the upper surfaces 42C, 42C are configured as highly flat reference surfaces that are in sliding contact with the lower surfaces 48A, 48A. Therefore, the driven portion 40 is moved in the X-axis direction while the lower surfaces 48A, 48A of the block fixing member 48 are in sliding contact with the upper surfaces 42C, 42C of the direct-acting guide 42, thereby moving the driven portion 40 with high precision in the X-axis direction. be moved.

The holder mounting member 52 has a substantially rectangular parallelepiped shape and is connected to the lower portion of the connecting block 50 by a plurality of screws 54, 54 . A dovetail groove 52A for mounting the holder 116 is provided in the lower portion of the holder mounting member 52, and the dovetail portion 116A of the holder 116 is engaged with the dovetail groove 52A so that the holder 116 is attached to the holder mounting member 52. be worn.

The holder 116 has a substantially rectangular parallelepiped shape, and is formed with an arcuate slit 116B along the X-axis direction. A detector 112 having a substantially cylindrical outer shape is fitted in the slit 116B, and the detector 112 is pressed against the inner peripheral surface of the slit 116B by a screw 56 screwed into the slit 116B from the outside of the holder 116. Fixed. At this time, the probe 114 can be displaced in the Z-axis direction.

On the other hand, the mover 16 of the linear motor 12 is fixed to the top surface of a plate-shaped table 58 . Blocks 60, 60 constituting a linear guide (for example, LM Guide (registered trademark) manufactured by THK Corporation) are arranged on the lower surface of the table 58 along a straight line parallel to the X-axis direction. Blocks 60, 60 are movably mounted on rails 62 arranged along the X-axis direction. The rail 62 is a member that forms a linear guide together with the block 60 and is laid on a plate 64 fixed inside the housing 18 .

As shown in FIG. 3, the belt 44 has one end fixed to the right end 16A of the mover 16 and the other end fixed to the right end 50B of the connecting block 50 via a pulley 66. As shown in FIG. One end of the belt 46 is fixed to the left end 16B of the mover 16, and the other end is fixed to the left end 50C of the connecting block 50 via a pulley 68. As shown in FIG. The pulleys 66, 68 are spaced apart in the X-axis direction, and the rotation shafts 66A, 68A of the pulleys 66, 68 are provided along the Y-axis direction. Therefore, when the mover 16 is moved along the stator 14 in the X-axis direction, the driven part 40 is moved in the X-axis direction opposite to the moving direction of the mover 16 .

As shown in FIG. 4 , balance weights 70 and 70 are fixed to the mover 16 . The balance weights 70, 70 are fixed to the side surfaces 16C, 16C of the side surfaces of the moving element 16, which are perpendicular to the Y direction. The balance weights 70 , 70 are set to a weight that balances the self weight of the driven part 40 including the detector 112 and the holder 116 when fixed to the mover 16 . In other words, the balance weights 70, 70 are set to a weight such that the total weight of the balance weights 70, 70 and the moving element 16 is substantially the same as the weight of the driven part 40 including the detector 112 and the holder 116. there is By fixing the balance weights 70, 70 to the mover 16, the mover 16 can be It can move with a stable thrust without being affected by the weight of the mover 16. - 特許庁

The operation of the linear motor driving device 10 configured as described above will be described.

As shown in FIG. 4, the linear motor driving device 10 moves the linear motor 12, the driven portion 40, the linear motion guide 42 and the holder 116 from the X-axis direction (horizontal direction), which is the movement axis of the driven portion 40. , the linear motor 12, the driven part 40, and the holder 116 are arranged along a straight line B parallel to the Z-axis direction (vertical direction) perpendicular to the X-axis direction. can move in the X-axis direction without yawing or with yawing suppressed.

Here, the linear motor drive device 10 and the linear motor drive device of Patent Document 1 are compared.

In the linear motor driving device of Patent Document 1, when the linear motor, the driven part, the linear motion guide and the holder are viewed from the direction of the movement axis of the driven part (X-axis direction), the linear motor, the driven part and the holder are not arranged along a straight line parallel to the axis (Y-axis or Z-axis direction) orthogonal to the X-axis direction. For this reason, the driven part moves while receiving a force in the rotational direction from the wire, so that it is likely to yawing about the Z-axis during movement. That is, when the driven part moves along the X-axis direction, which is the movement direction, it is easy to swing in the rotation direction about the Z-axis via the wire.

On the other hand, the linear motor driving device 10, as shown in FIG. The linear motor 12, the driven part 40 and the holder 116 are arranged along a straight line B parallel to the Z-axis. In other words, since the linear motor 12, the driven part 40 and the holder 116 are balanced in weight, the driven part 40 moves without being subjected to force in the rotational direction from the wire. As a result, the driven part 40 can move in the X-axis direction without yawing or with yawing suppressed.

The configuration in which the linear motor 12, the driven portion 40, the linear motion guide 42, and the holder 116 are arranged along the straight line B means that the linear motor 12, the driven portion 40, the linear motion guide 42, and the holder 116 are aligned. Although it is the most preferable form that each center of gravity is arranged along the straight line B, it is not limited to this form. A form in which a part of them is arranged so as to overlap on the straight line B may be used. This makes it possible to reduce the yawing of the driven part 40 compared to the form of Patent Document 1 in which the linear motor, the driven part and the holder are not arranged on a straight line. As an example, if each of the linear motor 12, the driven part 40, the linear motion guide 42 and the holder 116 has a symmetrical shape with respect to the straight line B, each of the linear motor 12, the driven part 40 and the holder 116 The center of gravity can be arranged along the straight line B.

Further, according to the linear motor driving device 10 of the first embodiment, the linear motor 12 is arranged at a position higher than the driven part 40 and the linear motion guide 42, as shown in FIG. As a result, most of the heat generated by the linear motor 12 generated by the supply (excitation) of current is dissipated upward from the upper portion of the linear motor 12. 42 can be suppressed. Due to such arrangement configuration of the linear motor 12, thermal deformation of the lower surfaces 48A, 48A of the block fixing member 48, which are sliding surfaces, and the upper surfaces 42B, 42B of the linear motion guide 42, which are reference surfaces, can be suppressed. , dimensional error caused by heat generation of the linear motor 12 can be suppressed.

Further, in order to more effectively block the heat transmitted from the linear motor 12 to the driven part 40 and the linear motion guide 42, it is preferable to configure the block fixing member 48 with a heat insulating member, for example. As a result, dimensional errors due to heat generation of the linear motor 12 can be suppressed more effectively. Examples of the heat insulating member include a fiber heat insulating material or a foam heat insulating material sandwiched between two metal plates (for example, aluminum plates).

Further, according to the surface roughness measuring apparatus 100 having such a linear motor driving device 10, yawing of the driven part 40 is suppressed by the linear motor driving device 10, so that dimensional errors caused by yawing are reduced. be able to.

Next, the linear motor drive device 200 of 2nd Embodiment is demonstrated.

FIG. 6 is a front view showing the configuration of the linear motor drive device 200, and a cross-sectional view of the essential parts thereof. 7 is an enlarged cross-sectional view taken along line CC of FIG. 6. FIG. When describing the linear motor driving device 200, the same or similar members as those of the linear motor driving device 10 described with reference to FIGS. There is also

The difference between the linear motor driving device 200 and the linear motor driving device 10 is that the driven part 40 is directly connected to the moving element 16, and the driven part 40 is directly moved in the horizontal direction by the moving element 16. The point is that the balance weight 70 is connected to the drive unit 40 via the belts 44 and 46 .

That is, as shown in FIGS. 6 and 7, the linear motor driving device 200 includes a linear motor 12, a driven portion 40 fixed to a moving element 16 and having upper surfaces 40C and 40C as sliding surfaces, and a driven portion 40. A linear motion guide 42, which is arranged adjacent to the portion 40 and has lower surfaces 42D, 42D as reference surfaces which are in sliding contact with the upper surfaces 40C, 40C, a balance weight 70, and one end connected to the driven portion 40; It comprises belts 44 , 46 whose ends are connected to a balance weight 70 via pulleys 66 , 68 and a holder 116 fixed to the driven part 40 .

As shown in FIG. 7, the linear motion guide 42 is constructed in a gate shape so as to straddle the linear motor 12, and the lower surfaces 42D, 42D of the pair of legs 43, 43 are constructed as reference surfaces. there is Also, the lower surface 42D and the upper surface 40C are connected via a linear guide consisting of a rail 202 and a block 204 so as to be in relatively slidable contact. Also, the balance weight 70 is fixed to the upper surface of the table 58 .

7, when the linear motor 12, the driven part 40, the linear motion guide 42, and the holder 116 are viewed from the X-axis direction (horizontal direction), the linear motor driving device 200 is arranged such that the linear motor 12, The driven part 40 and the holder 116 are arranged along a straight line B parallel to the second direction (vertical direction).

As a result, the driven portion 40 of the linear motor drive device 200 can move in the X-axis direction without yawing or with yawing suppressed.

Next, an example in which the linear motor drive device of the present invention is applied to a drive device for a roundness measuring device will be described with reference to the following third and fourth embodiments. The roundness measuring device is a device that measures the roundness of the peripheral surface of the object to be measured by bringing the probe 114 of the detector 112 into contact with the peripheral surface of the object.

FIG. 8 is a front view showing the configuration of the linear motor drive device 210 of the third embodiment, and a cross-sectional view of the essential parts thereof. 9 is an enlarged cross-sectional view taken along line DD of FIG. 8. FIG. When describing the linear motor driving device 210, the same or similar members as those of the linear motor driving device 10 described with reference to FIGS. There is also

The linear motor driving device 210 differs from the linear motor driving device 10 in that the stator 14 of the linear motor 12 extends along the vertical direction (Z-axis direction), which is the first direction, and that the driven portion 40 is movably provided along the linear motion guide 42 along the vertical direction (Z-axis direction).

That is, as shown in FIGS. 8 and 9, the linear motor driving device 210 is provided slidably along the vertical direction with the linear motor 12, and has inner wall surfaces 40E and 40D as sliding surfaces. a portion 40, a linear motion guide 42 having side surfaces 42E, 42E as reference surfaces that are arranged adjacent to the driven portion 40 and are in sliding contact with the inner wall surfaces 40E, 40E; belts 44, 46 whose other ends are connected to the driven part 40 via pulleys 66, 68; balance weights 70, 70 fixed to the moving element 16; and a holder 116 to which a detector 112 having a detector is mounted.

9, the driven portion 40 has a recessed groove 41 that accommodates a linear motion guide 42 having a rectangular cross section, and a cap 212 that seals the recessed groove 41. As shown in FIG.

As shown in FIG. 9, the linear motor driving device 210 is configured such that when the linear motor 12, the driven part 40, the linear motion guide 42, and the holder 116 are viewed from the Z-axis direction (vertical direction), the linear motor 12, The driven portion 40, the linear motion guide 42, and the holder 116 are arranged along a straight line E parallel to the X-axis direction (horizontal direction), which is the second direction orthogonal to the Z-axis direction (vertical direction). .

As a result, the driven portion 40 of the linear motor drive device 210 can move in the Z-axis direction without yawing or with yawing suppressed. That is, when the driven part 40 moves along the Z-axis direction, which is the movement direction, the driven part 40 does not swing in the rotation direction about the X-axis, or rotates in the Z-axis direction while the swing is suppressed. move to

It is preferable that the end of the belt 44 be fixed at the center of gravity of the movable body composed of the driven part 40 , the holder 116 and the detector 112 . As a result, the rotational moment generated in the driven portion 40 (the force generated by the thrust of the linear motor 12) can be reduced. It is possible to reduce the pressurization to imitate the

FIG. 10 is a front view showing the configuration of the linear motor drive device 220 of the fourth embodiment, and a cross-sectional view of the essential parts thereof. 11 is an enlarged cross-sectional view taken along line FF of FIG. 10. FIG. When describing the linear motor driving device 220, members that are the same as or similar to those of the linear motor driving device 200 described with reference to FIGS. There is also

The linear motor driving device 220 differs from the linear motor driving device 200 in that the stator 14 of the linear motor 12 is extended in the vertical direction (Z-axis direction), which is the first direction, and the driven part 40 is straight. This is because it is provided so as to be movable in the vertical direction (Z-axis direction) along the motion guide 42 .

That is, as shown in FIGS. 10 and 11, the linear motor driving device 220 includes a linear motor 12, a driven portion 40 fixed to the moving element 16 and having side surfaces 40F and 40F as sliding surfaces, and a driven portion 40 A direct acting guide 42 which is arranged adjacent to the portion 40 and has side surfaces 42F and 42F as reference surfaces which are in sliding contact with the side surfaces 40F and 40F; a balance weight 70; It comprises belts 44 , 46 whose ends are connected to a balance weight 70 via pulleys 66 , 68 and a holder 116 fixed to the driven part 40 .

Further, the side surfaces 40F and 42F are connected via a linear guide consisting of a rail 202 and a block 204 so as to be in relatively slidable contact. Also, the balance weight 70 is fixed to the side surface of the table 58 .

As shown in FIG. 11, the linear motor driving device 220 is configured such that when the linear motor 12, the driven portion 40, the linear motion guide 42, and the holder 116 are viewed from the Z-axis direction (vertical direction), the linear motor 12, The driven portion 40, the linear motion guide 42, and the holder 116 are arranged along a straight line E parallel to the X-axis direction (horizontal direction), which is the second direction orthogonal to the Z-axis direction (vertical direction). .

As a result, the driven portion 40 of the linear motor drive device 220 can move in the Z-axis direction without yawing or with yawing suppressed.

In addition, it is preferable that the end of the belt 44 be fixed to the driven portion 40 positioned directly above the moving element 16 . As a result, the rotational moment generated in the driven portion 40 (the force generated by the thrust of the linear motor 12) can be reduced. Pressurization for copying can be reduced.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above examples, and of course various improvements and modifications may be made without departing from the gist of the present invention. .

DESCRIPTION OF SYMBOLS 10... Linear motor drive device, 12... Linear motor, 14... Stator, 16... Mover, 18... Case, 20... Fixing bracket, 30... Coil member, 32... Mover frame, 34... Bearing part, 40... Driven part 41 Concave groove 42 Linear motion guide 44 Belt 46 Belt 48 Block fixing member 50 Connecting block 52 Holder mounting member 54 Screw 56 Screw 58 Table 60 Block 62 Rail 64 Plate 66 Pulley 68 Pulley 70 Balance weight 100 Surface roughness measuring device 102 Measuring unit 104 Data processing device 106 Input device , 108... Monitor, 110... Measuring table, 112... Detector, 114... Stylus, 116... Holder, 118... CPU, 120... Memory, 122... Roughness output means, 124... Column, 126... Joystick, 200... Linear Motor drive device 202 Rail 204 Block 210 Linear motor drive device 212 Cap 220 Linear motor drive device

Claims (7)

a linear motor having a stator extending along a first direction in an apparatus body; and a mover fitted in the stator and movable along the stator;
a driven part provided slidably along the first direction on the apparatus main body and having a sliding surface;
a linear motion guide having a reference surface disposed adjacent to the driven portion and in sliding contact with the sliding surface;
a holder that is separate from the driven part and configured to be movable integrally with the driven part , and to which a detector having a stylus is attached;
a power transmission member having one end connected to the mover and the other end connected to the driven portion via a pulley;
a balance weight fixed to the slider;
with
When the linear motor, the driven part, the linear motion guide, and the holder are viewed from the first direction, the linear motor, the driven part, and the holder are aligned in a direction orthogonal to the first direction. A linear motor drive device arranged along a straight line parallel to the two directions. a linear motor having a stator extending along a first direction in an apparatus body; and a mover fitted in the stator and movable along the stator;
a driven part fixed to the mover and having a sliding surface;
a linear motion guide having a reference surface disposed adjacent to the driven portion and in sliding contact with the sliding surface;
a holder that is separate from the driven part and configured to be movable integrally with the driven part , and to which a detector having a stylus is attached;
a balance weight movable along the first direction on the device body;
a power transmission member having one end connected to the driven portion and the other end connected to the balance weight via a pulley;
with
When the linear motor, the driven part, the linear motion guide, and the holder are viewed from the first direction, the linear motor, the driven part, and the holder are aligned in a direction orthogonal to the first direction. A linear motor drive device arranged along a straight line parallel to the two directions. When the linear motor, the driven part, the linear motion guide and the holder are viewed from the first direction, the center of gravity of each of the linear motor, the driven part and the holder is in the second direction. are arranged along a straight line parallel to the
3. The linear motor driving device according to claim 1 or 2. When the linear motor, the driven part, the linear motion guide and the holder are viewed from the first direction, the sliding surface and the reference surface are arranged with straight lines parallel to the second direction interposed therebetween. 4. The linear motor drive device according to any one of claims 1 to 3, provided on both sides. the first direction is horizontal and the second direction is vertical;
A linear motor drive device according to any one of claims 1 to 4. wherein the first direction is vertical and the second direction is horizontal;
A linear motor drive device according to any one of claims 1 to 4. A surface profile measuring device comprising the linear motor drive device according to any one of claims 1 to 6,
a detector attached to the holder of the linear motor drive;
a probe attached to the detector and displaceable in a second direction;
A surface profile measuring device comprising:

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