JP7102238B2 - Resin molding equipment and manufacturing method of resin molded products - Google Patents

Resin molding equipment and manufacturing method of resin molded products Download PDF

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JP7102238B2
JP7102238B2 JP2018110281A JP2018110281A JP7102238B2 JP 7102238 B2 JP7102238 B2 JP 7102238B2 JP 2018110281 A JP2018110281 A JP 2018110281A JP 2018110281 A JP2018110281 A JP 2018110281A JP 7102238 B2 JP7102238 B2 JP 7102238B2
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molding die
molding
molded
projecting
resin
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JP2019209665A5 (en
JP2019209665A (en
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高史 高橋
敬祐 尾川
浩之 金丸
裕樹 熊見
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Towa Corp
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Towa Corp
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Priority to JP2018110281A priority Critical patent/JP7102238B2/en
Priority to PH12019000190A priority patent/PH12019000190A1/en
Priority to MYPI2019002819A priority patent/MY195116A/en
Priority to CN201910487033.6A priority patent/CN110576567B/en
Priority to TW108119624A priority patent/TWI730336B/en
Publication of JP2019209665A publication Critical patent/JP2019209665A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14065Positioning or centering articles in the mould
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/26Moulds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/40Removing or ejecting moulded articles
    • B29C45/4005Ejector constructions; Ejector operating mechanisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/72Heating or cooling
    • B29C45/73Heating or cooling of the mould
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14065Positioning or centering articles in the mould
    • B29C2045/14122Positioning or centering articles in the mould using fixed mould wall projections for centering the insert
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2017/00Carriers for sound or information
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00Other particular articles
    • B29L2031/34Electrical apparatus, e.g. sparking plugs or parts thereof

Description

本発明は、樹脂成形装置および樹脂成形品の製造方法に関する。 The present invention relates to a resin molding apparatus and a method for manufacturing a resin molded product.

被搬送物を樹脂成形装置の金型の所定位置まで搬送する搬送機構が知られている。
たとえば、特許6094781号公報(特許文献1)には、被搬送物であるリードフレームの位置を所要位置に決める位置決めピンを有する搬送機構と、搬送機構の位置決めピンの先端と当接可能な案内部材を有する下金型とが開示されている(段落[0017]、[0018]、[0022]等)。
A transport mechanism for transporting an object to be transported to a predetermined position of a mold of a resin molding apparatus is known.
For example, Japanese Patent No. 6094781 (Patent Document 1) describes a transport mechanism having a positioning pin for determining the position of a lead frame to be transported at a required position, and a guide member capable of contacting the tip of the positioning pin of the transport mechanism. The lower mold having the above is disclosed (paragraphs [0017], [0018], [0022], etc.).

また、特開2012-44139号公報(特許文献2)には、被成形物である半導体ウエハをモールディング部分のキャビティからリリースするのを補助する力を提供する突き出しピン上に半導体ウエハを載置した後、その半導体ウエハをキャビティに配置することが開示されている(段落[0026]、[0027]等)。 Further, in Japanese Patent Application Laid-Open No. 2012-44139 (Patent Document 2), the semiconductor wafer is placed on a protrusion pin that provides a force for assisting the release of the semiconductor wafer as a workpiece from the cavity of the molding portion. Later, it is disclosed that the semiconductor wafer is placed in the cavity (paragraphs [0026], [0027], etc.).

特許6094781号公報Japanese Patent No. 60994781 特開2012-44139号公報Japanese Unexamined Patent Publication No. 2012-44139

熱硬化性樹脂を用いたトランスファー成形を行なうとき、成形型に載置された被成形物は所定の温度に加熱される。成形型および被成形物の位置決め手段は、互いに熱膨張した状態を前提とした位置に各々設けられる。被成形物を成形型に載置する工程において、被成形物の熱膨張が十分でない場合、位置合わせの精度が低下し、被成形物を成形型の所定の位置に配置できない場合がある。この結果、たとえば、ICチップや同チップとリードフレームを接続するワイヤが成形型のキャビティ面に接触するなどの懸念が生じ得る。 When performing transfer molding using a thermosetting resin, the object to be molded placed on the molding die is heated to a predetermined temperature. The molding die and the positioning means for the object to be molded are provided at positions assuming that they are thermally expanded from each other. In the step of placing the object to be molded on the molding die, if the thermal expansion of the object to be molded is not sufficient, the accuracy of alignment may be lowered and the object to be molded may not be placed at a predetermined position on the molding die. As a result, for example, there may be a concern that the IC chip or the wire connecting the chip and the lead frame comes into contact with the cavity surface of the molding die.

本発明の目的は、成形型への成形対象物の位置決めを高い精度で行なうことが可能な樹脂成形装置および樹脂成形品の製造方法を提供することにある。 An object of the present invention is to provide a resin molding apparatus and a method for manufacturing a resin molded product, which can position a molding object on a molding mold with high accuracy.

本発明に係る樹脂成形装置は、金属部分を含む成形対象物をトランスファー成形する樹脂成形装置であって、上成形型と、上成形型に対向し、キャビティを含む下成形型と、成形対象物を上成形型と下成形型との間に搬送する搬送機構と、成形対象物の金属部分に対応する位置に設けられ、下成形型の上面から突出可能な第1の突出部材と、キャビティの底面から突出可能な第2の突出部材と、下成形型の上面からの第1の突出部材の突出量とキャビティの底面からの第2の突出部材の突出量とを独立して制御可能な駆動機構と、下成形型を加熱可能な加熱機構とを備える。 The resin molding apparatus according to the present invention is a resin molding apparatus that transfers and molds a molding object including a metal portion, and comprises an upper molding die, a lower molding die facing the upper molding die and containing a cavity, and a molding object. A transport mechanism for transporting between the upper molding die and the lower molding die, a first projecting member provided at a position corresponding to the metal portion of the object to be molded and capable of projecting from the upper surface of the lower forming die, and a cavity. Drive that can independently control the amount of protrusion of the second protruding member capable of protruding from the bottom surface, the amount of protrusion of the first protruding member from the upper surface of the lower molding die, and the amount of protrusion of the second protruding member from the bottom surface of the cavity. It is provided with a mechanism and a heating mechanism capable of heating the lower molding die.

本発明に係る樹脂成形品の製造方法は、搬送機構を用いて金属部分および位置決め穴を含む成形対象物を上成形型と下成形型の間に搬送する工程と、下成形型の上面から突出部材を突出させる工程と、成形対象物の位置決め穴の位置と下成形型に設けられた位置決め部材の位置とを合わせた状態で、下成形型の上面から突出した突出部材に搬送機構から成形対象物を受け渡す工程と、突出部材で成形対象物の金属部分を支持した状態で、突出部材を下方に駆動して成形対象物を下成形に載置する工程と、上成形型と下成形型とを型締めして成形対象物をトランスファー成形する工程と、上成形型と下成形型とを型開きする工程とを含む。 The method for manufacturing a resin molded product according to the present invention includes a step of transporting a molded object including a metal portion and a positioning hole between the upper molding die and the lower molding die by using a transport mechanism, and a step of projecting from the upper surface of the lower molding die. With the process of projecting the member, the position of the positioning hole of the object to be molded, and the position of the positioning member provided in the lower molding die aligned, the projecting member protruding from the upper surface of the lower forming die is molded from the transfer mechanism. The process of delivering an object, the process of driving the projecting member downward with the protruding member supporting the metal part of the object to be molded, and the process of placing the object to be molded on the lower molding die , and the upper molding die and the lower molding. The process includes a step of mold-fastening the mold to transfer the object to be molded, and a step of opening the upper molding mold and the lower molding mold.

本発明によれば、成形対象物を十分に熱膨張させた状態で成形型に載置することができる。また、下成形型の上面から突出させた突出部材の下方への駆動速度を適切に制御することで、成形対象物の位置ずれを抑制しながら該成形対象物を成形型に載置することができる。以上の結果として、成形対象物の成形型への位置決めの精度を向上させることができる。 According to the present invention, the object to be molded can be placed on the molding die in a state of being sufficiently thermally expanded. Further, by appropriately controlling the downward driving speed of the protruding member protruding from the upper surface of the lower molding die, the molding target can be placed on the molding while suppressing the displacement of the molding target. can. As a result of the above, the accuracy of positioning the object to be molded with respect to the molding die can be improved.

本発明の1つの実施の形態に係る樹脂成形装置の全体構成を示す平面図である。It is a top view which shows the whole structure of the resin molding apparatus which concerns on one Embodiment of this invention. 本発明の1つの実施の形態に係る樹脂成形装置の正面図である。It is a front view of the resin molding apparatus which concerns on one Embodiment of this invention. 図2に示される樹脂成形装置の部分断面図である。It is a partial cross-sectional view of the resin molding apparatus shown in FIG. 図2に示される樹脂成形装置の部分断面図である。It is a partial cross-sectional view of the resin molding apparatus shown in FIG. (a)は図4に示される下成形型の上面図であり、(b)は(a)に対応する断面図である。(A) is a top view of the lower molding die shown in FIG. 4, and (b) is a cross-sectional view corresponding to (a). 図4に示される樹脂成形装置の側面断面図である。It is a side sectional view of the resin molding apparatus shown in FIG. 本発明の1つの実施の形態に係る樹脂成形品の製造方法を示すフロー図である。It is a flow chart which shows the manufacturing method of the resin molded article which concerns on one Embodiment of this invention. 本発明の1つの実施の形態に係る樹脂成形品の製造方法の1つの工程を示す図である。It is a figure which shows one step of the manufacturing method of the resin molded article which concerns on one Embodiment of this invention. 本発明の1つの実施の形態に係る樹脂成形品の製造方法の1つの工程を示す図である。It is a figure which shows one step of the manufacturing method of the resin molded article which concerns on one Embodiment of this invention. 本発明の1つの実施の形態に係る樹脂成形品の製造方法の1つの工程を示す図である。It is a figure which shows one step of the manufacturing method of the resin molded article which concerns on one Embodiment of this invention. 本発明の1つの実施の形態に係る樹脂成形品の製造方法の1つの工程を示す図である。It is a figure which shows one step of the manufacturing method of the resin molded article which concerns on one Embodiment of this invention.

以下に、本発明の実施の形態について説明する。なお、同一または相当する部分に同一の参照符号を付し、その説明を繰返さない場合がある。 Hereinafter, embodiments of the present invention will be described. In addition, the same reference code may be attached to the same or corresponding part, and the explanation may not be repeated.

なお、以下に説明する実施の形態において、個数、量などに言及する場合、特に記載がある場合を除き、本発明の範囲は必ずしもその個数、量などに限定されない。また、以下の実施の形態において、各々の構成要素は、特に記載がある場合を除き、本発明にとって必ずしも必須のものではない。 In the embodiments described below, when the number, quantity, etc. are referred to, the scope of the present invention is not necessarily limited to the number, quantity, etc., unless otherwise specified. Further, in the following embodiments, each component is not necessarily essential for the present invention unless otherwise specified.

図1は、本発明の1つの実施の形態に係る樹脂成形装置の全体構成を示す平面図である。図1に示すように、本実施の形態に係る樹脂封止装置は、たとえば半導体チップが搭載された基板を樹脂封止するモールド機構部1000を含むモールディングユニットAと、モールディングユニットAの成形型に基板を供給するインローダ2000を含むインローダユニットBと、モールディングユニットAの成形型から成形品を取り出すアウトローダ3000と上記成形品を収容する収容部とを含むアウトローダユニットCとを備える。インローダ2000およびアウトローダ3000は、図1中の上下方向に移動する。 FIG. 1 is a plan view showing the overall configuration of the resin molding apparatus according to one embodiment of the present invention. As shown in FIG. 1, the resin encapsulation device according to the present embodiment includes, for example, a molding unit A including a molding mechanism portion 1000 for resin encapsulating a substrate on which a semiconductor chip is mounted, and a molding mold of the molding unit A. It includes an inloader unit B including an inloader 2000 for supplying a substrate, an outloader 3000 for taking out a molded product from a molding mold of the molding unit A, and an outloader unit C including an accommodating portion for accommodating the molded product. The inloader 2000 and the outloader 3000 move in the vertical direction in FIG.

モールディングユニットAと、インローダユニットB、およびアウトローダユニットCは、ボルトやピンなどの連結機構を介して、互いに着脱可能に連結されている。図1の例では、モールディングユニットAは2個設けられているが、この個数は生産量に応じて増減調整することが可能である。モールディングユニットAは1つであってもよいし、たとえば4つに増設されてもよい。すなわち、本実施の形態の樹脂封止装置は、モールディングユニットの数を増減可能な構成とすることができる。 The molding unit A, the inloader unit B, and the outloader unit C are detachably connected to each other via a connecting mechanism such as a bolt or a pin. In the example of FIG. 1, two molding units A are provided, but the number of molding units A can be increased or decreased according to the production amount. The number of molding units A may be one, or may be expanded to four, for example. That is, the resin sealing device of the present embodiment can be configured so that the number of molding units can be increased or decreased.

また、図1の例では、モールディングユニットA、インローダユニットB、およびアウトローダユニットCがこの順で配設されているが、たとえば、モールディングユニットA、インローダユニットB、およびアウトローダユニットCが一体となった1つの親機と、モールディングユニットAのみを備えた1つまたは複数の子機とを並べて樹脂封止装置を構成してもよい。 Further, in the example of FIG. 1, the molding unit A, the inloader unit B, and the outloader unit C are arranged in this order. For example, the molding unit A, the inloader unit B, and the outloader unit C are arranged in this order. A resin sealing device may be configured by arranging one integrated master unit and one or more slave units having only the molding unit A side by side.

次に、図2~4を用いて、本発明実施の形態に係る樹脂成形装置について説明する。樹脂成形装置は、モールド機構部1000に設けられる。 Next, the resin molding apparatus according to the embodiment of the present invention will be described with reference to FIGS. 2 to 4. The resin molding apparatus is provided in the molding mechanism portion 1000.

図2は、樹脂成形装置の正面図である。本実施の形態の樹脂成形装置は、リードフレームなどの金属部分を含む成形対象物(詳細は後述)をトランスファー成形する樹脂成形装置である。 FIG. 2 is a front view of the resin molding apparatus. The resin molding apparatus of this embodiment is a resin molding apparatus that transfers and molds a molding object (details will be described later) including a metal portion such as a lead frame.

本実施の形態の樹脂成形装置は、上部固定盤200と、可動盤300と、下部固定盤400とを備えている。上部固定盤200と下部固定盤400とは互いに支柱部500によって固定されている。支柱部500は、円柱状支柱であってもよく、平板であってもよい。可動盤300は、上部固定盤200と下部固定盤400との間でプレス駆動機構600によって鉛直上方および鉛直下方に移動可能である。プレス駆動機構600は、下部固定盤400の上面に配置され、可動盤300を昇降および成形圧を生じさせるための動力発生機構である。本実施の形態において、上部固定盤200は固定されていることから、可動盤300は上部固定盤200に対して相対的に移動可能となっている。 The resin molding apparatus of the present embodiment includes an upper fixing plate 200, a movable plate 300, and a lower fixing plate 400. The upper fixing plate 200 and the lower fixing plate 400 are fixed to each other by a support column 500. The strut portion 500 may be a columnar strut or a flat plate. The movable platen 300 can be moved vertically upward and vertically by the press drive mechanism 600 between the upper fixed platen 200 and the lower fixed platen 400. The press drive mechanism 600 is arranged on the upper surface of the lower fixed plate 400, and is a power generation mechanism for raising and lowering the movable platen 300 and generating molding pressure. In the present embodiment, since the upper fixing plate 200 is fixed, the movable platen 300 is relatively movable with respect to the upper fixing plate 200.

上部固定盤200の鉛直下方側には上成形型10が取り付けられている。可動盤300の鉛直上方側には下成形型20が取り付けられている。下成形型20は上成形型10に対向している。上成形型10と下成形型20とを型締めすることにより、成形対象物が樹脂成形される。成形対象物は、後述の搬送機構により上成形型10と下成形型20との間に搬送される。 An upper molding die 10 is attached to the vertically lower side of the upper fixing plate 200. A lower molding die 20 is attached to the vertically upper side of the movable platen 300. The lower molding die 20 faces the upper molding die 10. By molding the upper molding die 10 and the lower molding die 20, the object to be molded is resin-molded. The object to be molded is conveyed between the upper molding die 10 and the lower molding die 20 by a conveying mechanism described later.

図3は、図2に示される樹脂成形装置の部分断面図であって、上成形型10および上成形型保持部30を示す。上成形型10は、カル11と、凹部12とを含む。カル11は、トランスファー成形時に図3中の左右に位置する成形対象物に樹脂材料が移送される前の溜まり部である。凹部12は、上成形型10と下成形型20とを型締めする際に下成形型20の位置決め部材(たとえば、位置決めピン)(図4参照)が干渉しないようにするための空間である。 FIG. 3 is a partial cross-sectional view of the resin molding apparatus shown in FIG. 2, showing an upper molding die 10 and an upper molding die holding portion 30. The upper molding die 10 includes a cal 11 and a recess 12. The cal 11 is a pool portion before the resin material is transferred to the molding objects located on the left and right in FIG. 3 during transfer molding. The recess 12 is a space for preventing the positioning members (for example, positioning pins) (see FIG. 4) of the lower molding die 20 from interfering with each other when the upper molding die 10 and the lower molding die 20 are molded.

上成形型保持部30は、上成形型10を上部固定盤200の下面に保持するための部材である。上成形型保持部30は、上部ヒータプレート31と、上部断熱板32と、上部スペーサプレート33とを備える。上部ヒータプレート31は、ヒータ34(上部加熱機構)を収容するプレートである。ヒータ34は、上成形型10を加熱可能な熱源である。ヒータ34は、図3の紙面の法線方向に延在している。上部断熱板32は、上部ヒータプレート31と上部固定盤200との間に位置する板状部材である。上部断熱板32は、ヒータ34からの熱によって上部固定盤200が熱変形することを抑制するために、熱を伝導しにくい素材からなることが好ましい。上部スペーサプレート33は、上部ヒータプレート31と上成形型10との間に配置されるプレートである。 The upper mold holding portion 30 is a member for holding the upper mold 10 on the lower surface of the upper fixing plate 200. The upper molded mold holding portion 30 includes an upper heater plate 31, an upper heat insulating plate 32, and an upper spacer plate 33. The upper heater plate 31 is a plate that houses the heater 34 (upper heating mechanism). The heater 34 is a heat source capable of heating the upper molding die 10. The heater 34 extends in the normal direction of the paper surface of FIG. The upper heat insulating plate 32 is a plate-shaped member located between the upper heater plate 31 and the upper fixing plate 200. The upper heat insulating plate 32 is preferably made of a material that does not easily conduct heat in order to prevent the upper fixing plate 200 from being thermally deformed by the heat from the heater 34. The upper spacer plate 33 is a plate arranged between the upper heater plate 31 and the upper molding die 10.

図4は、図2に示される樹脂成形装置の部分断面図であって、下成形型20、下成形型保持部40、下部第1プレート51および下部第2プレート52を示す。 FIG. 4 is a partial cross-sectional view of the resin molding apparatus shown in FIG. 2, showing a lower molding die 20, a lower molding die holding portion 40, a lower first plate 51, and a lower second plate 52.

下成形型20は、キャビティ21と、位置決め部材22とを備える。キャビティ21は、下成形型20に設けられた成形形状の凹部である。位置決め部材22は、下成形型20の上面20a(成形型面)において成形対象物の位置決めをするための部材である。位置決め部材22は、先端側に位置する円錐状のテーパ部22aと、根元側に位置する円筒状のストレート部22bとを有する。 The lower molding mold 20 includes a cavity 21 and a positioning member 22. The cavity 21 is a molded recess provided in the lower molding mold 20. The positioning member 22 is a member for positioning an object to be molded on the upper surface 20a (molding mold surface) of the lower molding mold 20. The positioning member 22 has a conical tapered portion 22a located on the tip side and a cylindrical straight portion 22b located on the root side.

下成形型保持部40は、下成形型20を可動盤300の上面に保持するための部材である。下成形型保持部40は、下部ヒータプレート41と、下部断熱板42と、下部第3プレート43と、クランパヘッド45と、クランパロッド46とを備える。下部ヒータプレート41は、ヒータ44(下部加熱機構)を収容するプレートである。ヒータ44は、下成形型20を加熱可能な熱源である。ヒータ44は、図4の紙面の法線方向に延在している。下部断熱板42は、下部ヒータプレート41と可動盤300との間に位置する板状部材である。下部断熱板42は、ヒータ44からの熱によって可動盤300が熱変形することを抑制するために、熱を伝導しにくい素材からなることが好ましい。下部第3プレート43は、下成形型保持部40の高さと下成形型20の高さとを合わせるための平面板状部材である。クランパヘッド45は、下部第2プレート52が嵌るように形成されたコの字形状を有する部材である。クランパロッド46は、クランパヘッド45に固定された棒状部材である。 The lower mold holding portion 40 is a member for holding the lower mold 20 on the upper surface of the movable platen 300. The lower mold holding portion 40 includes a lower heater plate 41, a lower heat insulating plate 42, a lower third plate 43, a clamper head 45, and a clamper rod 46. The lower heater plate 41 is a plate that houses the heater 44 (lower heating mechanism). The heater 44 is a heat source capable of heating the lower molding mold 20. The heater 44 extends in the normal direction of the paper surface of FIG. The lower heat insulating plate 42 is a plate-shaped member located between the lower heater plate 41 and the movable platen 300. The lower heat insulating plate 42 is preferably made of a material that does not easily conduct heat in order to prevent the movable platen 300 from being thermally deformed by the heat from the heater 44. The lower third plate 43 is a flat plate-like member for matching the height of the lower mold holding portion 40 with the height of the lower mold 20. The clamper head 45 is a member having a U-shape formed so that the lower second plate 52 fits. The clamper rod 46 is a rod-shaped member fixed to the clamper head 45.

クランパロッド46の下方には、クランパ位置決め棒47が設けられている。クランパ位置決め棒47は、クランパロッド46に当接することによってクランパヘッド45およびクランパロッド46の最下点の位置決めをするための棒状部材である。 A clamper positioning rod 47 is provided below the clamper rod 46. The clamper positioning rod 47 is a rod-shaped member for positioning the lowest points of the clamper head 45 and the clamper rod 46 by abutting against the clamper rod 46.

本実施の形態に係る樹脂成形装置は、突出部材100(第1の突出部材)および突出部材110(第2の突出部材)をさらに備える。突出部材100は、上下方向に駆動可能であり、下成形型20の上面20aから突出可能である。突出部材110は、キャビティ21の底面21aから突出可能である。突出部材100の根元側には鍔部100aが設けられる。突出部材100の材料は、たとえば、金属であってもよく、セラミックであってもよい。 The resin molding apparatus according to the present embodiment further includes a projecting member 100 (first projecting member) and a projecting member 110 (second projecting member). The projecting member 100 can be driven in the vertical direction and can project from the upper surface 20a of the lower molding die 20. The projecting member 110 can project from the bottom surface 21a of the cavity 21. A crossguard 100a is provided on the root side of the projecting member 100. The material of the projecting member 100 may be, for example, metal or ceramic.

突出部材100は、成形対象物の金属部分(たとえばICチップが搭載されたリードフレーム)に対応する位置に設けられる。突出部材110は、成形対象物の樹脂成形部分に対応する位置に設けられる。突出部材100,110は、成形対象物の樹脂成形後に上方に突出するピン部材(エジェクターピン)である。突出部材100,110が突出することにより、樹脂成形品が下成形型20から離型される。 The projecting member 100 is provided at a position corresponding to a metal portion of the object to be molded (for example, a lead frame on which an IC chip is mounted). The projecting member 110 is provided at a position corresponding to the resin molded portion of the object to be molded. The projecting members 100 and 110 are pin members (ejector pins) that project upward after resin molding of the object to be molded. When the projecting members 100 and 110 project, the resin molded product is released from the lower molding die 20.

突出部材100,110は、下部第1プレート51および下部第2プレート52とともに昇降可能である。突出部材100,110が上方に移動すると、突出部材100は下成形型20の上面20aから突出し、突出部材110はキャビティ21の底面21aから突出する。このとき、突出部材100の上面20aからの突出量と、突出部材110の底面21aからの突出量とは同じである。 The projecting members 100 and 110 can be raised and lowered together with the lower first plate 51 and the lower second plate 52. When the projecting members 100 and 110 move upward, the projecting member 100 projects from the upper surface 20a of the lower molding die 20, and the projecting member 110 projects from the bottom surface 21a of the cavity 21. At this time, the amount of protrusion from the upper surface 20a of the protruding member 100 and the amount of protrusion from the bottom surface 21a of the protruding member 110 are the same.

突出部材100は、後述する駆動機構により、下部第1プレート51および下部第2プレート52に対して上下方向に駆動される。1つの例では、駆動機構は、図4に示す上楔部材71と下楔部材73とを含むコッター機構からなる。上楔部材71と下楔部材73とが水平方向に相対移動することにより、上楔部材71が上方に移動する。突出部材100の鍔部100aは上楔部材71に押され、上楔部材71とともに上方に移動する。これにより、下部第1プレート51および下部第2プレート52が静止した状態(突出部材110も静止した状態)で突出部材100が上方に移動することができる。すなわち、本実施の形態に係る樹脂成形装置においては、下成形型20の上面20aからの突出部材100の突出量と、キャビティ21の底面21aからの突出部材110の突出量とを独立して制御可能である。 The projecting member 100 is driven in the vertical direction with respect to the lower first plate 51 and the lower second plate 52 by a drive mechanism described later. In one example, the drive mechanism comprises a cotter mechanism including the upper wedge member 71 and the lower wedge member 73 shown in FIG. The upper wedge member 71 and the lower wedge member 73 move relative to each other in the horizontal direction, so that the upper wedge member 71 moves upward. The flange portion 100a of the projecting member 100 is pushed by the upper wedge member 71 and moves upward together with the upper wedge member 71. As a result, the projecting member 100 can move upward while the lower first plate 51 and the lower second plate 52 are stationary (the projecting member 110 is also stationary). That is, in the resin molding apparatus according to the present embodiment, the amount of protrusion of the projecting member 100 from the upper surface 20a of the lower molding die 20 and the amount of protrusion of the projecting member 110 from the bottom surface 21a of the cavity 21 are independently controlled. It is possible.

下部第1プレート51は、突出部材100の鍔部100aと、弾性部材77とを収容する平面板状部材である。下部第1プレート51は、下部第2プレート52に固定され、下部第2プレート52とともに昇降する。弾性部材77は、鍔部100aとともに下部第1プレート51に収納され、鍔部100aを下方に付勢している。1つの例では、弾性部材77は板バネから構成される。突出部材100が上方に駆動されるときは鍔部100aによって弾性部材77が撓み、突出部材100が下方に駆動されるときは弾性部材77が鍔部100aを下方に付勢する。これにより、突出部材100を上方に駆動するとき以外は、突出部材100が下成形型20の上面20aから突出することが抑制される。弾性部材77は、たとえば、コイル状のスプリングであってもよい。また、弾性部材77は、金属からなるものであってもよいし、ゴムからなるものであってもよいし、複数の素材が複合されたものであってもよい。 The lower first plate 51 is a flat plate-like member that accommodates the flange portion 100a of the projecting member 100 and the elastic member 77. The lower first plate 51 is fixed to the lower second plate 52 and moves up and down together with the lower second plate 52. The elastic member 77 is housed in the lower first plate 51 together with the crossguard 100a, and the crossguard 100a is urged downward. In one example, the elastic member 77 is composed of a leaf spring. When the projecting member 100 is driven upward, the elastic member 77 is bent by the crossguard 100a, and when the projecting member 100 is driven downward, the elastic member 77 urges the crossguard 100a downward. As a result, the projecting member 100 is prevented from projecting from the upper surface 20a of the lower molding die 20 except when the projecting member 100 is driven upward. The elastic member 77 may be, for example, a coiled spring. Further, the elastic member 77 may be made of metal, rubber, or a composite of a plurality of materials.

下部第2プレート52は、下部第1プレート51の下方にある。下部第2プレート52は、上楔部材71と下楔部材73とを収容する。すなわち、下部第2プレート52は、突出部材100を上下に駆動する駆動機構の少なくとも一部を収容する。 The lower second plate 52 is below the lower first plate 51. The lower second plate 52 accommodates the upper wedge member 71 and the lower wedge member 73. That is, the lower second plate 52 accommodates at least a part of the drive mechanism that drives the projecting member 100 up and down.

図5(a)は図4に示される下成形型20の上面図であり、図5(b)は図5(a)に対応する断面図である。図5(a)における二点鎖線は、成形対象物1の大きさの例を表す。本発明における成形対象物1は、たとえば、60mm以上100mm以下程度の幅と、200mm以上300mm以下程度の長さと、0.1mm以上0.3mm以下程度の厚さとを有する。成形対象物1は、ICチップを実装したものであってもよい。ICチップ間のピッチは、たとえば、第1の方向において3.5mm以上10.0mm以下程度、第1の方向と直交する方向において7mm以上10mm以下程度である。図5(a)には、複数の突出部材100の配置の例が示される。図5の例では、突出部材100は、キャビティ21が形成された部分(中央領域)を取り囲む領域(外周領域)に設けられている。なお、突出部材100の位置および数は図5の例に限定されないことは言うまでもない。 5 (a) is a top view of the lower molding die 20 shown in FIG. 4, and FIG. 5 (b) is a cross-sectional view corresponding to FIG. 5 (a). The alternate long and short dash line in FIG. 5A represents an example of the size of the object 1 to be molded. The molded object 1 in the present invention has, for example, a width of about 60 mm or more and 100 mm or less, a length of about 200 mm or more and 300 mm or less, and a thickness of about 0.1 mm or more and 0.3 mm or less. The object 1 to be molded may be an IC chip mounted. The pitch between the IC chips is, for example, about 3.5 mm or more and 10.0 mm or less in the first direction, and about 7 mm or more and 10 mm or less in the direction orthogonal to the first direction. FIG. 5A shows an example of arrangement of a plurality of projecting members 100. In the example of FIG. 5, the projecting member 100 is provided in a region (outer peripheral region) surrounding a portion (central region) in which the cavity 21 is formed. Needless to say, the position and number of the projecting members 100 are not limited to the example of FIG.

図6は、図4に示される樹脂成形装置の側面断面図である。駆動機構70は、上楔部材71と、下楔部材73と、駆動部75とを含む。上楔部材71は、第1の傾斜面72を有する。下楔部材73は、第1の傾斜面72と対向する第2の傾斜面74を有する。駆動部75は、第1の傾斜面72と第2の傾斜面74とが互いに摺動可能な状態で下楔部材73を水平方向に移動させることが可能である。上楔部材71は、下楔部材73の水平方向(矢印76の方向)の移動に伴なって鉛直方向に移動する。上述のとおり、突出部材100は、上楔部材71上に配置されているため、上楔部材71の鉛直方向の移動に伴なって突出部材100も鉛直方向に移動する。駆動部75は下成形型保持部40の外側に設けられている。これにより、駆動部75に対するヒータ44からの熱の影響を抑制することができ、故障の発生を抑制できる。図6の例では、駆動部75は、下楔部材73を往復移動させることが可能なエアシリンダ等により構成されるが、たとえばサーボモータ等、より精密な速度制御可能な駆動機構を用いてもよい。また、複数の下楔部材73の駆動を1つのアクチュエータによって行なってもよいし、各々の下楔部材73に対して1つずつアクチュエータを配置してもよい。また、図6に示す楔機構ではなく、たとえばカム機構などを用いて突出部材100を鉛直方向に移動させてもよい。 FIG. 6 is a side sectional view of the resin molding apparatus shown in FIG. The drive mechanism 70 includes an upper wedge member 71, a lower wedge member 73, and a drive unit 75. The upper wedge member 71 has a first inclined surface 72. The lower wedge member 73 has a second inclined surface 74 facing the first inclined surface 72. The drive unit 75 can move the lower wedge member 73 in the horizontal direction in a state where the first inclined surface 72 and the second inclined surface 74 can slide with each other. The upper wedge member 71 moves in the vertical direction as the lower wedge member 73 moves in the horizontal direction (direction of arrow 76). As described above, since the projecting member 100 is arranged on the upper wedge member 71, the projecting member 100 also moves in the vertical direction as the upper wedge member 71 moves in the vertical direction. The drive unit 75 is provided on the outside of the lower molding mold holding unit 40. As a result, the influence of heat from the heater 44 on the drive unit 75 can be suppressed, and the occurrence of failure can be suppressed. In the example of FIG. 6, the drive unit 75 is composed of an air cylinder or the like capable of reciprocating the lower wedge member 73, but a drive mechanism capable of more precise speed control such as a servomotor may be used. good. Further, the plurality of lower wedge members 73 may be driven by one actuator, or one actuator may be arranged for each lower wedge member 73. Further, the projecting member 100 may be moved in the vertical direction by using, for example, a cam mechanism instead of the wedge mechanism shown in FIG.

以下、図7~図11を参照して、本実施の形態の樹脂成形装置を用いて樹脂成形品を製造する方法の一例である本実施の形態の樹脂成形品の製造方法について説明する。図7は、本実施の形態に係る樹脂成形品の製造方法を示すフロー図である。図7に示すように、本実施の形態に係る樹脂成形品の製造方法は、成形対象物を上成形型10と下成形型20との間に搬送する工程(S10)と、突出部材を下成形型から突出させる工程(S20)と、成形対象物を搬送機構から突出部材へ受け渡す工程(S30)と、突出部材を下方に駆動して成形対象物を下成形型に載置する工程(S40)と、型締め工程(S50)と、型開き工程(S60)とを含む。以下、各工程についてより詳細に説明する。 Hereinafter, the method for producing the resin molded product of the present embodiment, which is an example of the method for producing the resin molded product using the resin molding apparatus of the present embodiment, will be described with reference to FIGS. 7 to 11. FIG. 7 is a flow chart showing a method for manufacturing a resin molded product according to the present embodiment. As shown in FIG. 7, in the method for manufacturing a resin molded product according to the present embodiment, a step (S10) of transporting a molding object between the upper molding die 10 and the lower molding die 20 and a step of lowering the protruding member are performed. A step of projecting from the molding die (S20), a step of transferring the object to be molded from the transport mechanism to the projecting member (S30), and a step of driving the projecting member downward to place the object to be molded on the lower molding die (S20). S40), a mold clamping step (S50), and a mold opening step (S60) are included. Hereinafter, each step will be described in more detail.

まず、図8の模式的な断面図に示すように、搬送機構60を用いて金属部分2および位置決め穴3を含む成形対象物1を上成形型10と下成形型20の間に搬送する。なお、成形対象物1は、搬送機構60と共に動作するプレヒータ(図示せず)によって予め加熱されてもよい。 First, as shown in the schematic cross-sectional view of FIG. 8, the object 1 to be molded including the metal portion 2 and the positioning hole 3 is conveyed between the upper molding die 10 and the lower molding die 20 by using the conveying mechanism 60. The object 1 to be molded may be preheated by a preheater (not shown) that operates together with the transport mechanism 60.

その後、下成形型20の上面20aから突出部材100を突出させる。突出部材100の突出は、第1の傾斜面72を有する上楔部材71と、第1の傾斜面72と対向する第2の傾斜面74を有する下楔部材73とからなる駆動機構70を用いて行なわれる。第1の傾斜面72と第2の傾斜面74とを互いに摺動させながら下楔部材73を水平方向(図6中の矢印76方向)に移動させることに伴なって上楔部材71を上昇させ、上楔部材71上に配置された突出部材100を上方に駆動することで、突出部材100は下成形型20の上面20aから突出する。このとき、下部第1プレート51内に収容されている弾性部材77は突出部材100の鍔部100aに押されることによって弾性変形する。 After that, the projecting member 100 is projected from the upper surface 20a of the lower molding die 20. The protrusion of the projecting member 100 uses a drive mechanism 70 including an upper wedge member 71 having a first inclined surface 72 and a lower wedge member 73 having a second inclined surface 74 facing the first inclined surface 72. It is done. The upper wedge member 71 is raised as the lower wedge member 73 is moved in the horizontal direction (direction of arrow 76 in FIG. 6) while sliding the first inclined surface 72 and the second inclined surface 74 with each other. By driving the projecting member 100 arranged on the upper wedge member 71 upward, the projecting member 100 projects from the upper surface 20a of the lower molding die 20. At this time, the elastic member 77 housed in the lower first plate 51 is elastically deformed by being pushed by the crossguard 100a of the projecting member 100.

その後、成形対象物1の位置決め穴3の位置と下成形型20に設けられた位置決め部材22の位置とを合わせた状態で、下成形型20の上面20aから突出した突出部材100に搬送機構60から成形対象物1を受け渡す。搬送機構60の爪部61が開いた状態となることによって搬送機構60から突出部材100に成形対象物1が受け渡される。このとき、成形対象物1の位置決め穴3が下成形型20の位置決め部材22のテーパ部22aに嵌っている状態となる。また、成形対象物1の金属部分2が突出部材100の先端に支持される。搬送機構60の爪部61を開くときの成形対象物1の高さと突出部材100の先端の高さとを可能な限り近づけておくことで、爪部61から放された成形対象物1がすぐに突出部材100に保持され、成形対象物1のより精密な位置決めが可能となる。 After that, in a state where the position of the positioning hole 3 of the object 1 to be molded and the position of the positioning member 22 provided on the lower molding die 20 are aligned, the conveying mechanism 60 is sent to the protruding member 100 protruding from the upper surface 20a of the lower molding die 20. The object 1 to be molded is delivered from. When the claw portion 61 of the transport mechanism 60 is opened, the object 1 to be molded is delivered from the transport mechanism 60 to the projecting member 100. At this time, the positioning hole 3 of the object 1 to be molded is in a state of being fitted in the tapered portion 22a of the positioning member 22 of the lower molding die 20. Further, the metal portion 2 of the object 1 to be molded is supported by the tip of the projecting member 100. By keeping the height of the object to be molded 1 when the claw portion 61 of the transport mechanism 60 is opened and the height of the tip of the protruding member 100 as close as possible, the object to be molded 1 released from the claw portion 61 can be immediately released. It is held by the projecting member 100 and enables more precise positioning of the object 1 to be molded.

次に、図9に示すように、突出部材100で成形対象物1の金属部分2を支持した状態で、突出部材100を下方に駆動して成形対象物1を下成形型20に載置する。 Next, as shown in FIG. 9, with the protruding member 100 supporting the metal portion 2 of the molding target 1, the protruding member 100 is driven downward to place the molding target 1 on the lower molding mold 20. ..

ここで、突出部材100で成形対象物1の金属部分2を支持するとともに、ヒータ44によって下成形型20が加熱され、下成形型20は昇温している。この加熱温度は、たとえば175℃である。成形対象物1はヒータ44によって昇温されている下成形型20からの輻射熱を受ける。これにより、成形対象物1は加熱され、プレヒートにより生じていた成形対象物1の熱膨張が維持される。 Here, the protruding member 100 supports the metal portion 2 of the object 1 to be molded, and the heater 44 heats the lower molding die 20 to raise the temperature of the lower molding die 20. This heating temperature is, for example, 175 ° C. The object 1 to be molded receives radiant heat from the lower molding die 20 which has been heated by the heater 44. As a result, the object 1 to be molded is heated, and the thermal expansion of the object 1 to be molded caused by the preheating is maintained.

その後、突出部材100が下方に駆動される。突出部材100の下方への駆動は、下楔部材73を矢印76(図6参照)で示される方向とは反対の水平方向に移動させることに伴なって上楔部材71を下降させることによって行なわれる。下楔部材73が元の位置に向かって移動し、上楔部材71は下降する。上楔部材71は弾性部材77の弾性力によって下方に付勢されて確実に下降し、元の位置に戻る。上楔部材71が下降することにより、上楔部材71上に配置された突出部材100も下方に移動する。 After that, the projecting member 100 is driven downward. The downward drive of the projecting member 100 is performed by moving the lower wedge member 73 in the horizontal direction opposite to the direction indicated by the arrow 76 (see FIG. 6) and lowering the upper wedge member 71. Is done. The lower wedge member 73 moves toward the original position, and the upper wedge member 71 descends. The upper wedge member 71 is urged downward by the elastic force of the elastic member 77 to surely descend and return to the original position. As the upper wedge member 71 descends, the protruding member 100 arranged on the upper wedge member 71 also moves downward.

成形対象物1の下成形型20への載置は、成形対象物1に設けられた位置決め穴3に、下成形型20の位置決め部材22のストレート部22bが入ることによって行なわれる。成形対象物1が下成形型20へ正確に位置決めされると、成形対象物1上のICチップ4等の電子部品が下成形型20のキャビティ21内に収容される。このようにして、成形対象物1が下成形型20へ位置決めされる。 The molding target 1 is placed on the lower molding mold 20 by inserting the straight portion 22b of the positioning member 22 of the lower molding mold 20 into the positioning hole 3 provided in the molding target 1. When the molding target 1 is accurately positioned on the lower molding mold 20, electronic parts such as the IC chip 4 on the molding target 1 are housed in the cavity 21 of the lower molding mold 20. In this way, the object 1 to be molded is positioned on the lower molding die 20.

位置決め部材22のストレート部22bは、成形対象物1が十分に熱膨張した状態の位置決め穴3の位置に対応するように設けられている。成形対象物を搬送機構60から下成形型20へ受け渡すときに成形対象物1が搬送機構60と協働するプレヒータから離れると、成形対象物1の温度が低下し、成形対象物1が変形することがある。この場合、成形対象物1の熱膨張が不十分となることによって、成形対象物1の位置決め穴3の位置と下成形型20の位置決め部材22の位置とが正確に合わなくなる可能性がある。この状態で成形対象物1を下成形型20に載置しようとすると、成形対象物1が位置決め部材22に対して斜めに入ったり、位置決め部材22のテーパ部22aに引っかかるなどして、位置合わせの精度が低下する。これにより、成形対象物1を下成形型20の所定位置に設置することができない場合がある。このとき、成形対象物1がたとえば小型のICチップを実装するものである場合には、ICチップや同チップとフレームを接続するワイヤ等が下成形型20のキャビティ面に接触する懸念が生じる。 The straight portion 22b of the positioning member 22 is provided so as to correspond to the position of the positioning hole 3 in a state where the object 1 to be molded is sufficiently thermally expanded. When the object to be molded is transferred from the transfer mechanism 60 to the lower molding die 20, if the object 1 to be molded is separated from the preheater that cooperates with the transfer mechanism 60, the temperature of the object 1 to be molded drops and the object 1 to be molded is deformed. I have something to do. In this case, due to insufficient thermal expansion of the object 1 to be molded, the position of the positioning hole 3 of the object 1 to be molded and the position of the positioning member 22 of the lower molding die 20 may not be accurately aligned. If the molding target 1 is to be placed on the lower molding mold 20 in this state, the molding target 1 may enter the positioning member 22 at an angle or be caught by the tapered portion 22a of the positioning member 22 to align the molding target 1. The accuracy of As a result, the object 1 to be molded may not be installed at a predetermined position of the lower molding die 20. At this time, when the object 1 to be molded is for mounting a small IC chip, for example, there is a concern that the IC chip, the wire connecting the chip and the frame, or the like may come into contact with the cavity surface of the lower molding die 20.

本実施の形態の樹脂製造装置では、成形対象物1はヒータ44によって昇温されている下成形型20からの輻射熱を受けるため、成形対象物1を所定量熱膨張した状態とすることができる。その結果、成形対象物1の位置決め穴3の位置と下成形型20の位置決め部材22の位置とを正確に合わせることができるため、成形対象物1を下成形型20に対して正確に位置決めすることができる。 In the resin manufacturing apparatus of the present embodiment, since the molding target 1 receives the radiant heat from the lower molding mold 20 which has been heated by the heater 44, the molding target 1 can be in a state of being thermally expanded by a predetermined amount. .. As a result, the position of the positioning hole 3 of the molding target 1 and the position of the positioning member 22 of the lower molding mold 20 can be accurately aligned, so that the molding target 1 is accurately positioned with respect to the lower molding mold 20. be able to.

また、成形対象物1の下降速度をより小さくする、すなわち成形対象物1をゆっくりと下降させた場合、成形対象物1はヒータ44によって昇温されている下成形型20からの輻射熱をより比較的長時間受けるため、成形対象物1をさらに十分に熱膨張させることができる。その結果、下成形型20への成形対象物1の位置決めの精度をさらに向上させることができる。 Further, when the lowering speed of the molding target 1 is made smaller, that is, when the molding target 1 is slowly lowered, the molding target 1 further compares the radiant heat from the lower molding mold 20 which has been heated by the heater 44. Since the object 1 is subjected to a target long time, the object 1 to be molded can be further sufficiently thermally expanded. As a result, the accuracy of positioning the object 1 to be molded on the lower molding die 20 can be further improved.

また、突出部材100が熱伝導性を有する場合、ヒータ44からの熱は、突出部材100を介して突出部材100に支持される成形対象物1の金属部分2に伝導される。これにより、下成形型20への成形対象物1の位置決めの精度をさらに向上させることができる。 When the projecting member 100 has thermal conductivity, the heat from the heater 44 is conducted to the metal portion 2 of the molded object 1 supported by the projecting member 100 via the projecting member 100. As a result, the accuracy of positioning the object 1 to be molded on the lower molding die 20 can be further improved.

また、成形対象物1の金属部分2が突出部材100の先端によって支持される状態を一定時間維持してもよい。これにより、成形対象物1をさらに十分に熱膨張させることができる。その結果、下成形型20への成形対象物1の位置決めの精度をさらに向上させることができる。なお、一定時間は、熱膨張による成形対象物1をトランスファー成形しても問題無い程度の形状となるまでに要する時間であって、1つの例では数秒から数分程度とすることができる。 Further, the metal portion 2 of the object 1 to be molded may be maintained in a state of being supported by the tip of the projecting member 100 for a certain period of time. As a result, the object 1 to be molded can be further sufficiently thermally expanded. As a result, the accuracy of positioning the object 1 to be molded on the lower molding die 20 can be further improved. The fixed time is the time required for the object 1 to be molded by thermal expansion to have a shape that does not cause any problem even if it is transferred and molded, and in one example, it can be about several seconds to several minutes.

さらに、搬送機構60からの成形対象物1を下成形型20の上面20aから突出させた突出部材100で受けることにより、搬送機構60から放された成形対象物1を下成形型20の上面20aに直接載置するよりも、搬送機構60からの成形対象物1の落下距離を短くすることができる。このことも、成形対象物1の位置決め精度向上に寄与する。 Further, by receiving the molding object 1 from the transport mechanism 60 by the projecting member 100 projecting from the upper surface 20a of the lower molding die 20, the molding target 1 released from the transport mechanism 60 is received by the upper surface 20a of the lower molding die 20. The drop distance of the object 1 to be molded from the transport mechanism 60 can be shortened as compared with the case where the object 1 is placed directly on the surface. This also contributes to improving the positioning accuracy of the object 1 to be molded.

成形対象物1を下成形型20に載置した後、図10に示すように、上成形型10と下成形型20とを型締めして成形対象物1をトランスファー成形する。まず、プレス駆動機構600により、可動盤300および下成形型20を上昇させ、上成形型10と下成形型20との型締めを行なう。その後、下成形型20内のポット(図示せず)内に供給された樹脂材料6をプランジャ(図示せず)を用いて圧入することによって、樹脂通路23およびカル11を経て樹脂材料6を下成形型20のキャビティ21に移送する。 After the molding object 1 is placed on the lower molding die 20, as shown in FIG. 10, the upper molding die 10 and the lower molding die 20 are mold-clamped to transfer-mold the molding object 1. First, the press drive mechanism 600 raises the movable platen 300 and the lower forming die 20, and clamps the upper forming die 10 and the lower forming die 20. After that, the resin material 6 supplied into the pot (not shown) in the lower molding die 20 is press-fitted using a plunger (not shown) to lower the resin material 6 through the resin passage 23 and the cal 11. It is transferred to the cavity 21 of the molding die 20.

次に、図11に示すように、上成形型10と下成形型20とを型開きする。この工程では、まず、プレス駆動機構600を下降させて下成形型20を下方に駆動し、上成形型10と下成形型20とを型開きする。このとき、クランパロッド46はクランパ位置決め棒47に接触し、これによりクランパロッド46の位置が固定される。その後、さらに下成形型20が下降すると、クランパヘッド45によって挟まれた下部第2プレート52が下成形型保持部40に対して相対的に上昇する。これにより、下部第2プレート52上に固定された突出部材100,110がそれぞれ下成形型20の上面20aおよびキャビティ21の底面21aから突出して樹脂成形品5が離型される。このとき、突出部材100,110は、エジェクターピンとしての機能を果たす。カル11で固化された樹脂材料6は、樹脂成形品5と分離されて廃棄される。 Next, as shown in FIG. 11, the upper molding die 10 and the lower molding die 20 are opened. In this step, first, the press drive mechanism 600 is lowered to drive the lower molding die 20 downward, and the upper molding die 10 and the lower molding die 20 are opened. At this time, the clamper rod 46 comes into contact with the clamper positioning rod 47, whereby the position of the clamper rod 46 is fixed. After that, when the lower molding die 20 is further lowered, the lower second plate 52 sandwiched by the clamper head 45 is raised relative to the lower molding die holding portion 40. As a result, the projecting members 100 and 110 fixed on the lower second plate 52 project from the upper surface 20a of the lower molding die 20 and the bottom surface 21a of the cavity 21, respectively, and the resin molded product 5 is released from the mold. At this time, the projecting members 100 and 110 function as ejector pins. The resin material 6 solidified by the cal 11 is separated from the resin molded product 5 and discarded.

その後、キャビティ21内に残った樹脂材料は除去され、新たな樹脂成形品を製造するために上記の製造工程が繰り返される。 After that, the resin material remaining in the cavity 21 is removed, and the above manufacturing process is repeated in order to manufacture a new resin molded product.

しかしながら、一部の樹脂材料および塵等が除去されないままキャビティ21内に残ることがある。 However, some resin materials, dust, and the like may remain in the cavity 21 without being removed.

キャビティ21内に樹脂材料等が残った状態で突出部材110がキャビティ21の底面21aから突出すると、突出部材110の先端付近に樹脂材料が付着したり、キャビティ21の底面21aと突出部材110との間の隙間に樹脂材料が入り込んだりする場合がある。すべてのエジェクターピンが同時に鉛直方向に駆動される樹脂成形装置においては、離型工程以外において突出部材を突出させると、キャビティの底面から突出する突出部材の周辺において、上記の問題が懸念される。 When the projecting member 110 protrudes from the bottom surface 21a of the cavity 21 with the resin material or the like remaining in the cavity 21, the resin material adheres to the vicinity of the tip of the projecting member 110, or the bottom surface 21a of the cavity 21 and the projecting member 110 come together. The resin material may get into the gap between them. In a resin molding apparatus in which all ejector pins are driven in the vertical direction at the same time, if the projecting member is projected except in the mold release step, the above problem is concerned around the projecting member projecting from the bottom surface of the cavity.

一方、本実施の形態においては、駆動機構70によって突出部材100および突出部材110の突出量をそれぞれ独立して制御可能であるため、パッケージエジェクターピンである突出部材110を突出させることなく突出部材100を突出させることが可能となる。これにより、搬送機構60からの成形対象物1の受け渡し時には突出部材100のみが突出するため、先の樹脂成形でキャビティ21内から除去されずに残った樹脂材料6が突出部材110に付着したり、隙間に入り込んだりすることを抑制することができる。 On the other hand, in the present embodiment, since the protrusion amount of the protrusion member 100 and the protrusion member 110 can be controlled independently by the drive mechanism 70, the protrusion member 100 without projecting the protrusion member 110 which is a package ejector pin. Can be projected. As a result, only the projecting member 100 projects when the object 1 to be molded is delivered from the transport mechanism 60, so that the resin material 6 that remains without being removed from the cavity 21 in the previous resin molding may adhere to the projecting member 110. , It is possible to prevent it from entering the gap.

上記で説明された樹脂成形品の製造方法は、下成形型20にキャビティ21を設けたダイダウンに係る製造方法であるが、本発明に係る樹脂成形品の製造方法は、上成形型にキャビティを設けたダイアップに係る製造方法にも適用可能である。 The method for manufacturing a resin molded product described above is a manufacturing method for die-down in which a cavity 21 is provided in a lower molding die 20, but the method for manufacturing a resin molded product according to the present invention is a manufacturing method for forming a cavity in an upper molding die. It can also be applied to the manufacturing method related to the provided die-up.

ダイアップに係る樹脂成形品の製造方法では、型開き後、下成形型に設けられた突出部材とは別に上成形型に設けられたエジェクターピンによって樹脂成形品を離型する。したがって、搬送機構からの樹脂成形品を保持する突出部材は樹脂成形品の離型時にエジェクターピンとして機能しない点で、ダイダウンに係る樹脂成形品の製造方法とは異なる。ダイアップに係る製造方法のその他の工程はダイダウンに係る製造方法とほぼ同様であるため、詳細な説明は繰り返さない。 In the method for manufacturing a resin molded product according to die-up, after the mold is opened, the resin molded product is released by an ejector pin provided in the upper molding mold separately from the protruding member provided in the lower molding mold. Therefore, the projecting member that holds the resin molded product from the transport mechanism does not function as an ejector pin when the resin molded product is released, which is different from the method for manufacturing a resin molded product related to die-down. Since the other steps of the manufacturing method related to die-up are almost the same as those of the manufacturing method related to die-down, the detailed description will not be repeated.

本実施の形態に係る樹脂成形装置および樹脂成形品の製造方法によれば、成形対象物1を十分に熱膨張させた状態で成形型に載置することができるため、成形対象物1の成形型への位置決めの精度を向上させることができる。 According to the resin molding apparatus and the method for manufacturing a resin molded product according to the present embodiment, the molding target 1 can be placed on the molding mold in a state of being sufficiently thermally expanded, so that the molding target 1 can be molded. The accuracy of positioning on the mold can be improved.

以上、本発明の実施の形態について説明したが、今回開示された実施の形態はすべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は特許請求の範囲によって示され、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。 Although the embodiments of the present invention have been described above, it should be considered that the embodiments disclosed this time are exemplary in all respects and are not restrictive. The scope of the present invention is indicated by the claims and is intended to include all modifications within the meaning and scope equivalent to the claims.

1 成形対象物、2 金属部分、3 位置決め穴、4 ICチップ、5 樹脂成形品、6樹脂材料、10 上成形型、11 カル、12 凹部、20 下成形型、20a 上面、21 キャビティ、21a 底面、22 位置決め部材、22a テーパ部、22b ストレート部、23 樹脂通路、30 上成形型保持部、31 上部ヒータプレート、32 上部断熱板、33 上部スペーサプレート、34 ヒータ、40 下成形型保持部、41 下部ヒータプレート、42 下部断熱板、43 下部第3プレート、44 ヒータ、45 クランパヘッド、46 クランパロッド、47 クランパ位置決め棒、51 下部第1プレート、52 下部第2プレート、60 搬送機構、61 爪部、70 駆動機構、71 上楔部材、72 第1の傾斜面、73 下楔部材、74 第2の傾斜面、75 駆動部、76 矢印、77 弾性部材、100,110 突出部材、100a 鍔部、200 上部固定盤、300 可動盤、400 下部固定盤、500 支柱部、600 プレス駆動機構、1000 モールド機構部、2000 インローダ、3000 アウトローダ、A モールディングユニット、B インローダユニット、C アウトローダユニット。 1 Molding object, 2 Metal part, 3 Positioning hole, 4 IC chip, 5 Resin molded product, 6 Resin material, 10 Upper molding mold, 11 cal, 12 concave part, 20 Lower molding mold, 20a top surface, 21 cavity, 21a bottom surface , 22 Positioning member, 22a Tapered part, 22b Straight part, 23 Resin passage, 30 Upper molded mold holding part, 31 Upper heater plate, 32 Upper heat insulating plate, 33 Upper spacer plate, 34 Heater, 40 Lower molded mold holding part, 41 Lower heater plate, 42 Lower insulation plate, 43 Lower 3rd plate, 44 Heater, 45 Clamper head, 46 Clamper rod, 47 Clamper positioning rod, 51 Lower 1st plate, 52 Lower 2nd plate, 60 Conveyance mechanism, 61 Claws , 70 drive mechanism, 71 upper wedge member, 72 first inclined surface, 73 lower wedge member, 74 second inclined surface, 75 drive part, 76 arrow, 77 elastic member, 100, 110 protruding member, 100a flange part, 200 upper fixed plate, 300 movable plate, 400 lower fixed plate, 500 strut part, 600 press drive mechanism, 1000 mold mechanism part, 2000 inloader, 3000 outloader, A molding unit, B inloader unit, C outloader unit.

Claims (6)

金属部分を含む成形対象物をトランスファー成形する樹脂成形装置であって、
上成形型と、
前記上成形型に対向し、キャビティを含む下成形型と、
前記成形対象物を前記上成形型と前記下成形型との間に搬送する搬送機構と、
前記成形対象物の前記金属部分に対応する位置に設けられ、前記下成形型の上面から突出可能な第1の突出部材と、
前記キャビティの底面から突出可能な第2の突出部材と、
前記下成形型の上面からの前記第1の突出部材の突出量と前記キャビティの底面からの前記第2の突出部材の突出量とを独立して制御可能な駆動機構と、
前記下成形型を加熱可能な加熱機構とを備え、
前記第1の突出部材は、前記搬送機構から前記成形対象物を受け渡されて前記金属部分を支持した状態で下方に駆動して前記成形対象物を前記下成形型に載置することが可能な、樹脂成形装置。
A resin molding device that transfers and molds a molding object including a metal part.
Top molding and
A lower molding die facing the upper molding die and containing a cavity, and a lower molding die.
A transport mechanism for transporting the object to be molded between the upper molding die and the lower molding die,
A first projecting member provided at a position corresponding to the metal portion of the object to be molded and capable of projecting from the upper surface of the lower molding die.
A second projecting member that can project from the bottom surface of the cavity,
A drive mechanism capable of independently controlling the amount of protrusion of the first protruding member from the upper surface of the lower molding die and the amount of protrusion of the second protruding member from the bottom surface of the cavity.
It is equipped with a heating mechanism capable of heating the lower molding mold.
The first projecting member can be driven downward while the object to be molded is delivered from the transport mechanism and supports the metal portion, and the object to be molded can be placed on the lower molding die. A resin molding device.
前記駆動機構は、
第1の傾斜面を有する上楔部材と、
前記第1の傾斜面と対向する第2の傾斜面を有する下楔部材と、
前記第1の傾斜面と前記第2の傾斜面とが互いに摺動可能な状態で前記下楔部材を水平方向に移動させることが可能な駆動部とを含み、
前記下楔部材の水平方向の移動に伴なって前記上楔部材が鉛直方向に移動し、
前記第1の突出部材は前記上楔部材上に配置される、請求項1に記載の樹脂成形装置。
The drive mechanism is
An upper wedge member having a first inclined surface and
A lower wedge member having a second inclined surface facing the first inclined surface, and
The lower wedge member includes a drive unit capable of moving the lower wedge member in the horizontal direction in a state where the first inclined surface and the second inclined surface can slide with each other.
As the lower wedge member moves in the horizontal direction, the upper wedge member moves in the vertical direction.
The resin molding apparatus according to claim 1, wherein the first protruding member is arranged on the upper wedge member.
搬送機構を用いて金属部分および位置決め穴を含む成形対象物を上成形型と下成形型の間に搬送する工程と、
前記下成形型の上面から突出部材を突出させる工程と、
前記成形対象物の前記位置決め穴の位置と前記下成形型に設けられた位置決め部材の位置とを合わせた状態で、前記下成形型の上面から突出した前記突出部材に前記搬送機構から前記成形対象物を受け渡す工程と、
前記突出部材で前記成形対象物の前記金属部分を支持した状態で、前記突出部材を下方に駆動して前記成形対象物を前記下成形型に載置する工程と、
前記上成形型と前記下成形型とを型締めして前記成形対象物をトランスファー成形する工程と、
前記上成形型と前記下成形型とを型開きする工程とを含む、樹脂成形品の製造方法。
A process of transporting a molding object including a metal part and a positioning hole between an upper molding die and a lower molding die using a transport mechanism.
The step of projecting the projecting member from the upper surface of the lower molding die and
In a state where the position of the positioning hole of the molding object and the position of the positioning member provided in the lower molding die are aligned with each other, the projecting member protruding from the upper surface of the lower molding die is subjected to the molding target from the conveying mechanism. The process of delivering things and
A step of driving the projecting member downward to place the object to be molded on the lower molding die while the metal portion of the object to be molded is supported by the projecting member.
A step of molding the upper molding die and the lower molding die to transfer molding the object to be molded.
A method for producing a resin molded product, which comprises a step of opening the upper molding die and the lower molding die.
前記成形対象物を前記載置する工程は、前記突出部材で前記成形対象物の前記金属部分を支持した状態を一定時間維持してから、前記突出部材を下方に駆動して前記成形対象物を前記下成形型に載置する、請求項3に記載の樹脂成形品の製造方法。 In the step of preliminarily placing the object to be molded, the projecting member is maintained in a state where the metal portion of the object to be molded is supported for a certain period of time, and then the projecting member is driven downward to move the object to be molded. The method for producing a resin molded product according to claim 3, which is placed on the lower molding mold. 前記下成形型の上面から前記突出部材を突出させる工程は、第1の傾斜面を有する上楔部材と、前記第1の傾斜面と対向する第2の傾斜面を有する下楔部材とを含む機構を用いて、前記第1の傾斜面と前記第2の傾斜面とを互いに摺動させながら前記下楔部材を第1の水平方向に移動させることに伴なって前記上楔部材を上昇させ、前記上楔部材上に配置された前記突出部材を上方に駆動することを含む、請求項3または請求項4に記載の樹脂成形品の製造方法。 The step of projecting the projecting member from the upper surface of the lower molding mold includes an upper wedge member having a first inclined surface and a lower wedge member having a second inclined surface facing the first inclined surface. Using the mechanism, the upper wedge member is raised as the lower wedge member is moved in the first horizontal direction while sliding the first inclined surface and the second inclined surface with each other. The method for manufacturing a resin molded product according to claim 3 or 4, which comprises driving the protruding member arranged on the upper wedge member upward. 前記突出部材を下方に駆動して前記成形対象物を前記下成形型に載置する工程は、前記下楔部材を前記第1の水平方向とは反対の第2の水平方向に移動させることに伴なって前記上楔部材を下降させ、前記上楔部材上に配置された前記突出部材を下方に駆動することを含む、請求項5に記載の樹脂成形品の製造方法。 In the step of driving the protruding member downward and placing the molding object on the lower molding die, the lower wedge member is moved in a second horizontal direction opposite to the first horizontal direction. The method for producing a resin molded product according to claim 5, further comprising lowering the upper wedge member and driving the protruding member arranged on the upper wedge member downward.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004253412A (en) 2003-02-18 2004-09-09 Towa Corp Method and device for sealing up electronic component with resin
JP2006049697A (en) 2004-08-06 2006-02-16 Renesas Technology Corp Manufacturing method of semiconductor device, and molding die

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6382717A (en) * 1986-09-26 1988-04-13 Yazaki Corp Mold equipment of transfer molding tool
JPH0713985B2 (en) * 1988-02-05 1995-02-15 三菱電機株式会社 Resin molding equipment for semiconductor devices
JP2635193B2 (en) * 1990-01-23 1997-07-30 三菱電機株式会社 Resin sealing device, resin sealing method, and resin sealed semiconductor device for semiconductor device
JPH03110845U (en) * 1990-02-27 1991-11-13
JPH06132336A (en) * 1992-10-16 1994-05-13 Nippon Steel Corp Transfer molding device
JP3611612B2 (en) * 1994-11-28 2005-01-19 Towa株式会社 Mold for resin sealing molding of electronic parts
SG11201508166RA (en) * 2013-05-29 2015-12-30 Apic Yamada Corp Resin molding apparatus and resin molding method
JP6062810B2 (en) * 2013-06-14 2017-01-18 アピックヤマダ株式会社 Resin mold and resin mold apparatus
JP5934156B2 (en) * 2013-08-20 2016-06-15 Towa株式会社 Substrate transport and supply method and substrate transport and supply apparatus
JP6321482B2 (en) * 2013-09-26 2018-05-09 エイブリック株式会社 Semiconductor manufacturing equipment
JP6067832B1 (en) * 2015-12-24 2017-01-25 エムテックスマツムラ株式会社 Resin molding die and resin molding equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004253412A (en) 2003-02-18 2004-09-09 Towa Corp Method and device for sealing up electronic component with resin
JP2006049697A (en) 2004-08-06 2006-02-16 Renesas Technology Corp Manufacturing method of semiconductor device, and molding die

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