JP7081146B2 - ガス分析装置 - Google Patents
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- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
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Description
[先行技術文献]
[特許文献]
[特許文献1] 特開2008-70314号公報
Claims (11)
- 被測定ガス中に含まれる成分を分析するガス分析装置であって、
発光波長の異なる発光素子を2つ有し、前記被測定ガスにレーザー光を照射する発光部と、
受光素子を有し、前記被測定ガスを通過した前記レーザー光を受光する受光部と、
前記レーザー光が通過する光路に配置された少なくとも一つの光学素子を移動して、前記レーザー光の光路長を変化させる駆動部と、
前記光学素子の位置が、前記レーザー光の波長の1/2倍だけ異なる2つの状態において前記受光部が検出した各信号に基づいて、前記被測定ガスの濃度を算出する算出部と
を備え、
前記発光部は、2つの前記発光素子を順次選択して発光させ、
前記駆動部は、前記レーザー光の光軸方向の第1方向において、順次発光しているそれぞれの前記発光素子の発光波長に応じた位置に前記受光素子を順次移動させた後に、前記レーザー光の光軸方向の前記第1方向と反対の第2方向において、順次発光しているそれぞれの前記発光素子の発光波長に応じた位置に前記受光素子を順次移動させる
ガス分析装置。 - 被測定ガス中に含まれる成分を分析するガス分析装置であって、
発光波長の異なる発光素子を2つ有し、前記被測定ガスにレーザー光を照射する発光部と、
受光素子を有し、前記被測定ガスを通過した前記レーザー光を受光する受光部と、
前記レーザー光が通過する光路に配置された少なくとも一つの光学素子を移動して、前記レーザー光の光路長を変化させる駆動部と、
前記光学素子の位置が、前記レーザー光の波長の3/2倍だけ異なる2つの状態において前記受光部が検出した各信号に基づいて、前記被測定ガスの濃度を算出する算出部と
を備え、
前記発光部は、2つの前記発光素子を順次選択して発光させ、
前記駆動部は、前記レーザー光の光軸方向の第1方向において、順次発光しているそれぞれの前記発光素子の発光波長に応じた位置に前記受光素子を順次移動させた後に、前記レーザー光の光軸方向の前記第1方向と反対の第2方向において、順次発光しているそれぞれの前記発光素子の発光波長に応じた位置に前記受光素子を順次移動させる
ガス分析装置。 - 前記駆動部は、前記光学素子を、前記レーザー光の波長の1/2倍の振幅で移動させる
請求項1に記載のガス分析装置。 - 前記受光部は、前記駆動部が前記光学素子を移動させる周期と同期して、前記レーザー光の強度を測定する
請求項3に記載のガス分析装置。 - 前記発光部は、いずれかの前記発光素子を選択して発光させ、
前記駆動部は、発光している前記発光素子の発光波長に応じた振幅で前記受光素子を移動させる
請求項1から4のいずれか一項に記載のガス分析装置。 - 前記発光部は、前記発光素子の熱を放熱させる放熱部を更に有し、
前記駆動部は、前記受光素子を移動させる
請求項1から5のいずれか一項に記載のガス分析装置。 - 被測定ガス中に含まれる成分を分析するガス分析装置であって、
前記被測定ガスにレーザー光を照射する発光部と、
前記被測定ガスを通過した前記レーザー光を受光する受光部と、
前記レーザー光が通過する光路に配置された少なくとも一つの光学素子を移動して、前記レーザー光の光路長を変化させる駆動部と、
前記光学素子の位置が、前記レーザー光の波長の1/2倍だけ異なる2つの状態において前記受光部が検出した各信号に基づいて、前記被測定ガスの濃度を算出する算出部と
を備え、
前記発光部は発光素子を有し、
前記受光部は受光素子を有し、
前記発光部は、
前記発光素子の熱を放熱させる放熱部と、
前記発光素子と前記放熱部との相対位置を固定せずに、前記発光素子と前記放熱部との間を熱的に接続する接続部と
を有し、
前記駆動部は、前記発光素子を移動させる
ガス分析装置。 - 被測定ガス中に含まれる成分を分析するガス分析装置であって、
前記被測定ガスにレーザー光を照射する発光部と、
前記被測定ガスを通過した前記レーザー光を受光する受光部と、
前記レーザー光が通過する光路に配置された少なくとも一つの光学素子を移動して、前記レーザー光の光路長を変化させる駆動部と、
前記光学素子の位置が、前記レーザー光の波長の3/2倍だけ異なる2つの状態において前記受光部が検出した各信号に基づいて、前記被測定ガスの濃度を算出する算出部と
を備え、
前記発光部は発光素子を有し、
前記受光部は受光素子を有し、
前記発光部は、
前記発光素子の熱を放熱させる放熱部と、
前記発光素子と前記放熱部との相対位置を固定せずに、前記発光素子と前記放熱部との間を熱的に接続する接続部と
を有し、
前記駆動部は、前記発光素子を移動させる
ガス分析装置。 - 前記受光部は、前記受光素子が出力する信号を増幅する増幅器が設けられた回路基板を更に有し、
前記駆動部は、前記受光素子および前記回路基板を移動させる
請求項1から8のいずれか一項に記載のガス分析装置。 - 前記駆動部は、前記光学素子が移動する位置の振幅波形を、三角波で制御する
請求項1から9のいずれか一項に記載のガス分析装置。 - 前記駆動部は、前記光学素子が移動する位置の振幅波形を、矩形波で制御する
請求項1から9のいずれか一項に記載のガス分析装置。
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JP2017251920A JP7081146B2 (ja) | 2017-12-27 | 2017-12-27 | ガス分析装置 |
US16/168,674 US10677719B2 (en) | 2017-12-27 | 2018-10-23 | Gas analyzing apparatus |
FR1871288A FR3075961B1 (fr) | 2017-12-27 | 2018-10-24 | Installation d'analyse des gaz |
CN201811250399.3A CN109975240B (zh) | 2017-12-27 | 2018-10-25 | 气体分析装置 |
DE102018218684.7A DE102018218684A1 (de) | 2017-12-27 | 2018-10-31 | Gasanalysegerät |
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KR20200034564A (ko) * | 2018-09-20 | 2020-03-31 | 주식회사 제우스 | 플로우셀장치 |
JP7056627B2 (ja) * | 2019-05-17 | 2022-04-19 | 横河電機株式会社 | 分光分析装置及び分光分析方法 |
US11079324B2 (en) * | 2019-07-15 | 2021-08-03 | Spectrasensors, Inc. | Spectrometer with wide-scan tunable diode laser |
JP7259813B2 (ja) * | 2020-07-31 | 2023-04-18 | 横河電機株式会社 | ガス分析システム及びガス分析方法 |
CN112964667B (zh) * | 2021-02-05 | 2022-11-25 | 清华大学 | 一种受限空间设备内温度和组分集成化在线测量系统 |
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DE102015222312B4 (de) * | 2015-11-12 | 2019-07-04 | Robert Bosch Gmbh | Vorrichtung und Verfahren zur Gas- und Partikelmessung |
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