JP7037168B2 - Residual stress reduction method for glass substrate and residual stress reduction device for glass substrate - Google Patents

Description

The present invention relates to a method for reducing residual stress on a glass substrate and a device for reducing residual stress on a glass substrate.

In order to cut a glass substrate into product dimensions, a scribe line is formed on the glass substrate by a wheel, and the glass substrate is divided along the scribe line by bending the glass substrate (see, for example, Patent Document 1). ).
However, residual stress remains in the scribe line due to the force applied by the wheel blade and the stress applied during the break. Therefore, cracks are likely to occur spontaneously on the surface of the glass substrate in the horizontal direction, and the cracks further grow due to moisture or the like over time.

Further, there is known a technique for improving the strength of the end face of a glass substrate by irradiating the end face (edge) of the glass substrate with a laser beam to perform melt chamfering (see, for example, Patent Document 2). In this melt chamfering, fine cracks on the edge of the substrate disappear and the end face strength is improved.
However, in this method, residual stress is generated in the vicinity of the molten portion. Then, the possibility that the substrate is cracked due to the residual stress increases. Specifically, there is an increased possibility that internal defects will grow over time and fracture due to subsequent scratches, and fracture may occur within several tens of minutes depending on the magnitude of residual stress.

Japanese Unexamined Patent Publication No. 6-144875 Japanese Patent No. 5245819

In consideration of the above, a method for reducing the residual stress at the edge of the glass substrate has been conventionally developed. For example, in a method of reducing the residual stress of a glass substrate, slow cooling is performed after raising the temperature. Specifically, first, the entire glass substrate is uniformly heated to a temperature above the glass transition point, then it is held for a certain period of time, and finally it is slowly cooled to room temperature. Generally, it takes several hours or more for the heating, holding, and slow cooling steps.
This method has an advantage that the residual stress at the edge of the glass substrate can be almost completely removed. In addition, there is an advantage that a plurality of glass substrates can be processed simultaneously in the furnace.

However, since the entire substrate is heated above the glass transition point, it cannot be applied to glass products integrated with a material having low heat resistance such as resin. FIG. 30 shows a glass product in which resin materials P1 and P2 are integrally formed on a glass substrate G.
Further, since it takes several hours or more for one residual stress reduction process, it is not possible to reduce the residual stress immediately after the residual stress is generated. Therefore, it is difficult to apply it to a glass substrate having a high probability of fracture occurring within several tens of minutes due to high residual stress.

A first object of the present invention is to make it possible to reduce the residual stress of a glass substrate integrated with a material having low heat resistance such as resin.
A second object of the present invention is to make it possible to reduce the residual stress before the fracture occurs even for a glass substrate which is usually fractured within several tens of minutes due to a high residual stress.

Hereinafter, a plurality of aspects will be described as means for solving the problem. These aspects can be arbitrarily combined as needed.

The method for reducing residual stress of a glass substrate according to a seemingly present invention includes the following steps.
◎ Laser light irradiation step to heat the part of the glass substrate with high residual stress by irradiating it with laser light.
◎ A cooling step that cools the heated part by being irradiated with laser light.
In this method, since the portion of the glass substrate having a high residual stress is heated, the residual stress of the glass substrate integrated with a material having low heat resistance such as resin can be reduced. This is because the entire glass substrate is not heated, so that the resin and the like are less likely to be affected by heat.
Further, in this method, the residual stress is reduced in the heating region by heating the glass substrate for about 1 picosecond to 100 seconds, so that even a glass substrate that normally breaks within several tens of minutes is broken. Residual stress can be reduced before
"The portion with high residual stress is heated" means that the glass substrate has a portion that is not heated.
"Reducing residual stress" means that the growth of internal defects over time is suppressed, and the residual stress is reduced to the extent that the glass substrate to which no external force is applied does not crack within a predetermined time.
In this method, since the heated region is cooled by being irradiated with the laser beam, the residual stress can be reduced in the plurality of heated regions even if the adjacent regions are sequentially heated at relatively short time intervals. This is because by cooling, the region that becomes hot does not expand in the direction in which the plurality of heating regions are arranged, so that the effect of reducing the residual stress is maintained. As a result, the takt time is shortened.
Cooling may be performed at all times or may be performed after laser light irradiation.
The cooling portion may be only the heated portion, or may be the entire glass substrate including the heated portion.

In the laser light irradiation step, a plurality of laser lights may be irradiated to a plurality of points at the same time.
With this method, residual stress can be reduced in a short time.

In the laser light irradiation step, the laser light may be repeatedly applied to different points.
In this method, as a result of increasing the area irradiated by the laser, the area of the area where the residual stress is reduced increases.

The residual stress reducing device for a glass substrate according to another aspect of the present invention includes a laser device and a cooling device.
The laser device irradiates a portion of the glass substrate with high residual stress with a laser beam to heat the glass substrate.
The cooling device cools the portion heated by being irradiated with the laser beam.
In this device, since the portion of the glass substrate having a high residual stress is heated, the residual stress of the glass substrate integrated with a material having low heat resistance such as resin can be reduced. This is because the entire glass substrate is not heated, so that the resin and the like are less likely to be affected by heat.
In addition, in this device, by heating the glass substrate for about 1 picosecond to 100 seconds, the residual stress is reduced in the heating region, so that even a glass substrate that normally breaks within several tens of minutes can be broken. Residual stress can be reduced before
In this device, since the heated region is cooled by being irradiated with the laser beam, the residual stress can be reduced in the plurality of heated regions even if the adjacent regions are sequentially heated at relatively short time intervals. This is because by cooling, the region that becomes hot does not expand in the direction in which the plurality of heating regions are arranged, so that the effect of reducing the residual stress is maintained. As a result, the takt time is shortened.
Cooling may be performed at all times or may be performed after laser light irradiation.
The cooling portion may be only the heated portion, or may be the entire glass substrate including the heated portion.

The laser apparatus may simultaneously irradiate a plurality of laser beams to a plurality of locations.
With this device, residual stress can be reduced in a short time.

The laser apparatus may repeatedly irradiate different points with the laser beam.
In this device, as the area irradiated by the laser increases, the area of the area where the residual stress is reduced increases.

According to the present invention, the residual stress of a glass substrate integrated with a material having low heat resistance such as resin can be reduced. This is because the entire glass substrate is not heated, so that the resin and the like are less likely to be affected by heat. Further, according to the present invention, it is possible to reduce the residual stress before the fracture occurs even for the glass substrate which is usually fractured within several tens of minutes due to the high residual stress. This is because the residual stress is reduced in the heating region by heating one or a plurality of places on the glass substrate for about 1 picosecond to 100 seconds and performing this heating once or a plurality of times while shifting the heating position.

The schematic diagram of the laser irradiation apparatus of 1st Embodiment of this invention. The schematic diagram of the glass substrate which shows the movement of a laser spot. A cross-sectional photograph of a glass substrate that has been melt-chamfered. The graph which shows the change of the retardation from the end face of the melt chamfered glass substrate toward the center side. The schematic diagram of the glass substrate which shows the movement of a laser spot. The schematic diagram of the glass substrate which shows the movement of a laser spot. The schematic diagram of the glass substrate which shows the movement of a laser spot. The schematic diagram of the glass substrate which shows the movement of a laser spot. Schematic plan view showing variations in the shape of the laser spot. Schematic plan view showing variations in the shape of the laser spot. Schematic plan view showing variations in the shape of the laser spot. The schematic diagram of the glass substrate which shows the movement of a laser spot. The schematic diagram of the glass substrate which shows the movement of the laser spot of 2nd Embodiment. The schematic diagram of the glass substrate which shows the movement of a laser spot. The schematic diagram of the glass substrate which shows the movement of a laser spot. The schematic diagram of the glass substrate which shows the movement of a laser spot. Schematic plan view showing variations in the shape and spacing of heated regions. Schematic plan view showing variations in the shape and spacing of heated regions. The schematic diagram which shows the branching of a laser spot using a diffractive optical element or a transmission type spatial light modulator. The schematic diagram which shows the branching of a laser spot using a reflection type spatial light modulator. The schematic diagram which shows the beam formation by a cylindrical lens. Schematic diagram showing beam formation by a galvano scanner. The schematic diagram which shows the beam formation by a polygon mirror. Schematic plan view showing the positional relationship between the shielding plate and the glass substrate. Schematic front view showing the positional relationship between the shielding plate and the glass substrate. The schematic plan view of the laser irradiation apparatus of the 2nd modification of 2nd Embodiment. Schematic front view of the laser irradiation device. The schematic diagram which shows the formation of the beam of 3 points. A graph showing changes in laser pulse and ray angle over time. Schematic plan view of a conventional glassware integrated with a material with low heat resistance.

1. 1. 1st Embodiment (1) Laser Irradiation Device FIG. 1 shows an overall configuration of a laser irradiation device 1 according to an embodiment of the present invention. FIG. 1 is a schematic diagram of a laser irradiation device according to a first embodiment of the present invention.
The laser irradiation device 1 has a function of reducing the residual stress in the vicinity of the end face by heating the portion of the glass substrate G having a high residual stress.

The glass substrate G includes one made of only glass and one in which other members such as resin are combined with glass. Typical examples of the types of glass include soda glass and non-alkali glass used for displays and instrument panels, but the types are not limited to these. Specifically, the thickness of the glass is 3 mm or less, for example, in the range of 0.004 to 3 mm, preferably in the range of 0.2 to 0.4 mm.

The laser irradiation device 1 includes a laser device 3. The laser device 3 includes a laser oscillator 15 for irradiating the glass substrate G with laser light, and a laser control unit 17. The laser control unit 17 can control the drive of the laser oscillator 15 and the laser power.

The laser device 3 has a transmission optical system 5 that transmits laser light to the mechanical drive system side, which will be described later. The transmission optical system 5 includes, for example, a condenser lens 19, a plurality of mirrors (not shown), a prism (not shown), and the like.
The laser irradiation device 1 has a drive mechanism 11 that changes the size of a spot of laser light by moving the position of the condenser lens 19 in the optical axis direction.

The laser irradiation device 1 has a processing table 7 on which the glass substrate G is placed. The machining table 7 is moved by the table drive unit 13. The table drive unit 13 has a moving device (not shown) that moves the machining table 7 in the horizontal direction with respect to the head (not shown). The moving device is a known mechanism having a guide rail, a motor, and the like.

The laser irradiation device 1 includes a control unit 9. The control unit 9 has a processor (for example, a CPU), a storage device (for example, ROM, RAM, HDD, SSD, etc.), and various interfaces (for example, an A / D converter, a D / A converter, a communication interface, etc.). It is a computer system. The control unit 9 performs various control operations by executing a program stored in the storage unit (corresponding to a part or all of the storage area of the storage device).
The control unit 9 may be composed of a single processor, or may be composed of a plurality of independent processors for each control.

The control unit 9 can control the laser control unit 17. The control unit 9 can control the drive mechanism 11. The control unit 9 can control the table drive unit 13.
Although not shown, the control unit 9 is connected to a sensor that detects the size, shape, and position of the glass substrate G, a sensor and a switch for detecting the state of each device, and an information input device.

FIG. 1 shows a substrate cooling device 35 that cools a substrate with jet air from the front side or the back side of the glass substrate G. The operation of the substrate cooling device 35 is controlled by the control unit 9. The cooling medium for cooling is not particularly limited.
The substrate cooling device may be realized by making the table on which the glass is placed a water-cooled table.
A substrate cooling mechanism may be mounted on the laser irradiation device 1.

(2) Melt chamfering operation As an example of processing in which residual stress is generated in the glass substrate G, an operation of melting chamfering the end face of the glass substrate G will be described with reference to FIGS. 2 to 4. FIG. 2 is a schematic diagram of a glass substrate showing the movement of a laser spot. FIG. 3 is a cross-sectional photograph of a glass substrate that has been melt chamfered. FIG. 4 is a graph showing the change in retardation from the end face of the melt-chamfered glass substrate toward the center side.
As shown in FIG. 2, a laser beam is applied to the glass substrate G in the vicinity of the end face portion 21 of the glass substrate G, and the laser spot S is further scanned along the end face 20 of the glass substrate G. At this time, the laser spot S is set so as to be at a position, for example, 10 μm to 150 μm away from the end surface 20 of the glass substrate G toward the inside (center side) of the substrate.

By irradiating and scanning the laser spot S as described above, the portion 21 near the end face of the glass substrate G is heated. In particular, by irradiating the laser beam of mid-infrared light, the laser beam is absorbed while being transmitted to the inside of the glass substrate G. Therefore, the end surface 20 of the glass substrate G is heated relatively uniformly not only on the front surface side which is the irradiation surface of the laser beam but also on the inside and the entire back surface side of the glass substrate G. Therefore, the end surface 20 of the glass substrate G is melted so that the central portion of the substrate thickness bulges outward, and as a result, the end surface 20 is chamfered as shown in FIG.

As a result of the above, as shown in FIG. 4, the retardation (nm) is high in the portion near the end face of the glass substrate G (for example, the region from the end face 20 to 200 μm). The retardation is a phase difference generated in the light transmitted through the object, and is a value proportional to the stress acting in the object. High retardation of an object to which no external force is applied means high residual stress.

(3) Residual stress reduction treatment The residual stress reduction treatment will be described with reference to FIGS. 5 to 8. 5 to 8 are schematic views of a glass substrate showing the movement of the laser spot of the first embodiment.

In FIG. 5, the laser spot S1 irradiates a point near the end face portion 21.
In FIG. 6, the laser spot S2 is irradiated to another point at a different position in the portion near the end face 21.
In FIG. 7, the laser spot S3 is irradiated to another point at a different position in the portion near the end face 21.
In FIG. 8, the laser spot S4 is irradiated to another point at a different position in the portion near the end face 21.

When a laser spot is irradiated to one point on the residual stress generation region Z for a predetermined time and heated to a temperature equal to or higher than the glass transition point, the residual stress is reduced in that region. Therefore, as is clear from FIGS. 5 to 8, by sequentially heating one point for a predetermined time, the laser spots S1 to S4 are continuously irradiated to adjacent positions in the end face direction, and as a result, the laser spots S1 to S4 are irradiated to the adjacent positions. The portion 21 near the end face is irradiated as a whole.
However, the number of laser spots, the position, the order of irradiation, and the proportion of the laser spots in the vicinity of the end face 21 are not limited to this embodiment.

In this embodiment, the residual stress generation region Z (shaded area) is set to a temperature equal to or higher than the glass transition point by repeating heating one point for a predetermined time and shifting the position to heat one point for a predetermined time. Therefore, the residual stress of the entire end face vicinity portion 21 is reduced.
In this embodiment, the laser spot S is finally irradiated to the entire end face vicinity portion 21 to reduce the residual stress of the entire end face vicinity portion 21. However, when the residual stress is reduced only in a part of the end face vicinity portion 21, the laser spot S may irradiate only a specific region of the end face near portion 21, or the entire end face vicinity portion 21. Only about half of the area may be irradiated.

(4) Shape of Laser Spot in Residual Stress Reduction Treatment Based on experiments, the present inventors need to suppress the high temperature region to a narrow range in the direction along the end face 20 in the residual stress reduction treatment. I found something and came up with the present invention.
In this embodiment, the residual stress in the heated region is reduced by heating one point in the end face vicinity portion 21 for a predetermined time. 9, 10 and 11 are schematic plan views showing variations in the shape of the laser spot S.
FIG. 9 shows a circular laser spot S100 and an elliptical laser spot S101 long in the direction orthogonal to the end face 20. FIG. 10 shows long elliptical laser spots S102, S103 along the end face 20. FIG. 11 shows a long laser spot S104 along the end face 20 that covers the entire end face 20. When the laser spots S100, S101, S102, and S103 were used, the residual stress in the heating region was reduced by adjusting the laser output and the predetermined time for heating. However, the residual stress reducing effect was higher in the order of S100≈S101>S102> S103. When the laser spot S104 was used, the residual stress was not reduced even if the laser output and the predetermined time for heating were adjusted.
In view of the experimental results shown above, the present inventors have found that it is necessary to suppress the high temperature region to a narrow range in the direction along the end face 20 in the residual stress reduction treatment, and the present invention has been made. It came to.

When the laser spot S is circular, it is preferable that the laser spot S has a diameter of, for example, 4 μm to 20 mm. The larger the diameter of the laser spot S, the larger the processing area per heating, and the shorter the time required to reduce the residual stress in the predetermined area.
As shown in FIGS. 9 and 10, the laser spot S may be elliptical. However, the longer the width in the direction along the end face 20 of the laser spot S with respect to the width in the direction intersecting the end face 20 of the laser spot S, the lower the residual stress reducing effect. The width in the direction along the end face 20 of the laser spot S is preferably 10 times or less the width in the direction intersecting the end face 20 of the laser spot S.

The predetermined time for heating depends on the temperature of the heating region during heating. That is, the higher the output, the higher the temperature in the heating region, and the shorter the residual stress is. The higher the output, the shorter the predetermined time for heating and the shorter the takt time.
The predetermined time for heating is preferably, for example, about 1 picosecond to 100 seconds. The minimum predetermined time is 1 picosecond, which is known as the minimum value of the time (relaxation time) required for structural relaxation of glass. The lower the temperature in the heating region, the longer the relaxation time, and when the temperature in the heating region is about the glass transition point, it is preferable that the predetermined time for heating is about 100 seconds, which is the relaxation time.
In order to extremely shorten the predetermined time for heating, it is necessary to heat the glass substrate G to a high temperature in a short time, and the required output is significantly increased. Therefore, in practice, the merit of shortening the tact time and the increase in output are obtained. The heating conditions are determined in consideration of the cost increase due to the above.

The laser output needs to be a value that can be heated up to the glass transition point or higher. This is appropriately set according to the size of the laser spot, the laser wavelength, the type of glass, and the plate thickness. When the temperature of the heated portion of the glass substrate G is about the glass transition point, deformation of the heated portion is hardly confirmed. When the temperature of the heating portion is higher, the heating portion melts and the shape changes. The higher the laser output, the lower the viscosity of the heated portion, and the greater the deformation in a short time. According to the present invention, the residual stress is reduced even when the laser output is high and the shape of the glass substrate G is deformed. However, when the present invention is applied to a product in which the allowable amount of deformation of the glass substrate G is limited, the upper limit of the laser output is set so that the viscosity of the glass substrate G does not decrease and the amount of deformation does not exceed the allowable value. Should be set.
An example of conditions for heating a non-alkali glass having a thickness of 200 μm for a predetermined time will be described. 3W, 20s using a CO ₂ laser (wavelength 10.6 μm) with a spot size of 4 mm. The conditions may be 4W and 4s. The conditions may be 6W and 2s.

The type (wavelength) of the laser is not particularly limited.
The direction of heat input to the glass substrate G is not particularly limited. The heat may be input from the front surface of the glass substrate G, the heat may be input from the back surface, or the heat may be input from the end surface 20.
In the above embodiment, the residual stress reduction treatment is performed after the melt chamfering is completed, but the melt chamfering treatment and the residual stress reduction treatment may be performed in parallel on one glass substrate G. Specifically, by using two laser beams, the residual stress reduction treatment is started in the middle of the melt chamfering operation, and after that, both treatments are performed at the same time. In that case, the total processing time is shortened.
In order to use a plurality of laser beams, a plurality of laser oscillators may be prepared, or the laser beam may be branched from one laser oscillator.

As a result of the above, the portion near the end face of the glass substrate G (that is, the residual stress generation region Z) is heated to the glass transition point or higher, and as a result, the residual stress is reduced.
In this method, the portion near the end face of the glass substrate G is heated (that is, the entire glass substrate G is not heated), so that the portion near the end face of the glass substrate G integrated with a material having low heat resistance such as resin is heated. The residual stress of 21 can be reduced. This is because the resin and the like are less likely to be affected by heat. Further, by heating the glass substrate for about 1 picosecond to 100 seconds and performing this heating once or multiple times while shifting the position, the residual stress is reduced in the heating region, so that the high residual stress usually causes several tens. Even for a glass substrate that breaks within minutes, the residual stress can be reduced before the break occurs.

(5) Shortening of tact time by cooling When the above-mentioned predetermined time heating method is performed while shifting the position, heating at a predetermined time is performed sequentially, such as first heating, shifting for the second heating, shifting for the third heating, and so on. Will be. At this time, in order to shorten the tact time, it is necessary to shorten the time interval between the heating operations. However, for example, in the order of the heating positions shown in FIG. 12, the region adjacent to the immediately preceding heating region is the next heating region. In this case, for example, the second heating needs to wait until the temperature of the first heating portion drops. The reason is, for example, that the second heating region is combined with the first heating region and the above-mentioned "when the high temperature portion of the case where the portion near the end face of the glass substrate G is heated becomes longer along the end face". Because it corresponds.

When the above-mentioned staggered irradiation is performed, the time interval between the heating operations can be shortened by cooling the substrate. FIG. 1 shows a substrate cooling device 35 that cools a substrate with jet air from the front side or the back side of the glass substrate G.
In this case, the first heating region is cooled by air cooling or the like, and then the second heating is performed. As a result, the time interval can be shortened even when heating is performed in the order shown in FIG.

The reason why the time interval can be shortened as described above is that the next laser beam is irradiated after the heated portion is cooled by being irradiated with the laser beam, so that the next laser beam is in the vicinity of the previously heated portion. This is because the region that becomes hot does not expand in the direction along the end face due to cooling even if the irradiation is performed. That is, this is because it corresponds to the above-mentioned "case where the high temperature portion in the case of heating the portion near the end face of the glass substrate G is suppressed narrowly along the end face".
Cooling may be performed at all times or may be performed after laser light irradiation.

The cooling medium for cooling is not particularly limited.
The substrate cooling device may be realized by making the table on which the glass is placed a water-cooled table.
A substrate cooling mechanism may be mounted on the laser irradiation device 1.

2. 2. 2nd Embodiment The predetermined time irradiation method of the 1st embodiment employs a one-point heating method in which each point is irradiated with a laser, but the laser irradiation may irradiate a plurality of points at the same time.
Such an example will be described as a second embodiment with reference to FIGS. 13 to 16. In this multi-point simultaneous irradiation method, the processing speed is substantially increased. 13 to 16 are schematic views of a glass substrate showing the movement of the laser spot of the second embodiment.

In FIG. 13, two discrete laser spots S1 are irradiated on the end face vicinity portion 21.
FIG. 14 shows a situation in which the residual stress is reduced in the portion near the end face 21 by the operation of FIG.

In FIG. 15, two discrete laser spots S2 are irradiated on the end face vicinity portion 21. At this time, the two laser spots S2 are irradiated at positions different from those of the previous two laser spots S1, that is, they are shifted to each other. Further, the two laser spots S2 correspond to the remaining residual stress generation region Z.
FIG. 16 shows a situation in which the residual stress is reduced in the portion near the end face 21 by the operation of FIG.

In the multi-point simultaneous heating method, when the number of heating regions is n points, n times the output is required as compared with the one-point heating method of the first embodiment. Further, in the shielding method described later, a higher output is required depending on the area of the shielding portion.
The heating conditions per point are the same as in the first embodiment.

The interval between the heating regions is preferably 0.5 times or more the width of one heating region. If the spacing between the heating regions is too narrow, the plurality of heating regions will be connected, which is equivalent to irradiating one long laser spot along the residual stress generation region Z. That is, the effect of reducing the residual stress is lowered in response to the above-mentioned "when the shape of the heating region becomes long along the residual stress generation region Z". 17 and 18 are used to show variations in spacing from the shape of the heated region. 17 and 18 are schematic plan views showing variations in the shape and spacing of the heated regions.

FIG. 17 shows three circular laser spots S105. The laser spot S105 has the same shape as the laser spot S100 of FIG. 9, and has a high residual stress reducing effect. Further, the interval between the laser spots S105 is set to be about the same as the width of the laser spots S105.
FIG. 18 shows three elliptical laser spots S106 that are long in the direction intersecting the end face 20. The laser spot S106 has the same shape as the laser spot S101 of FIG. 9, and has a high residual stress reducing effect. Further, the interval between the laser spots S106 is set to be about the same as the width of the laser spots S106.
There are many combinations of laser spot shapes and intervals other than the above.

The processing speed of the residual stress reduction treatment depends on the number of heating regions. For example, when the width of the heating region is 8 mm, 10 points are simultaneously heated, the heating time is 1 s, and the residual stress reduction width per heating region is 4 mm, the processing speed per irradiation is 4 mm × 10 / 1s = 40 mm / s.

A method of simultaneously heating at multiple points using an optical branching element will be described with reference to FIGS. 19 and 20. FIG. 19 is a schematic diagram showing branching of a laser spot using a diffractive optical element or a transmission type spatial light modulator. FIG. 20 is a schematic diagram showing branching of a laser spot using a reflective spatial light modulator.
In FIG. 19, a diffractive optical element (DOE) 31 or a transmissive spatial light modulator (SLM) 31 is shown.
In FIG. 20, a reflective spatial light modulator (SLM) 33 is shown. Also shown are two mirrors 34.

When the multi-point simultaneous heating method as shown in FIGS. 13 to 16 is performed while shifting the positions, the heating is sequentially performed for a predetermined time, such as the first heating, the second heating by shifting, the third heating by shifting, and so on. Will be done. At this time, in order to shorten the tact time, it is necessary to shorten the time interval between the heating operations. However, for example, when any of the second heating regions at a plurality of locations is adjacent to any of the first heating regions at a plurality of locations, the temperature of the first heating portion is lowered in the second heating. You have to wait until you do. The reason is, for example, that the second heating region is combined with the first heating region and the above-mentioned "when the high temperature portion of the case where the portion near the end face of the glass substrate G is heated becomes longer along the end face". Because it corresponds.

When the above-mentioned staggered irradiation is performed, the time interval between the heating operations can be shortened by cooling the substrate. For cooling, as shown in FIG. 1 of the first embodiment, a substrate cooling device 35 that cools the substrate with jet air from the front side or the back side of the glass substrate G is used. In this case, the first heating region is cooled by air cooling or the like, and then the second heating is performed. Thereby, for example, even when the second heating region becomes a region adjacent to the first heating region, the time interval can be shortened.

The reason why the time interval can be shortened as described above is that the next laser beam is irradiated after the heated portion is cooled by being irradiated with the laser beam, so that the next laser beam is in the vicinity of the previously heated portion. This is because the region that becomes hot does not expand in the direction along the end face due to cooling even if it is irradiated with. That is, this is because it corresponds to the above-mentioned "case where the high temperature portion of the case where the portion near the end surface of the glass substrate G is heated is suppressed narrowly along the end surface".
Cooling may be performed at all times or may be performed after laser light irradiation.
Similar to the first embodiment, the configuration, cooling means, and arrangement position of the cooling device are not particularly limited.

(1) First Modification Example In the second embodiment, a method of simultaneously heating at multiple points using an optical branching element has been described, but simultaneous heating at multiple points may be performed by a shielding method. A method of simultaneously heating multiple points by a shielding method will be described as a first modification with reference to FIGS. 21 to 25. FIG. 21 is a schematic diagram showing beam formation by a cylindrical lens. FIG. 22 is a schematic diagram showing beam formation by a galvano scanner. FIG. 23 is a schematic diagram showing beam formation by a polygon mirror. FIG. 24 is a schematic plan view showing the positional relationship between the shielding plate and the glass substrate. FIG. 25 is a schematic front view showing the positional relationship between the shielding plate and the glass substrate.
A cylindrical lens 41 (FIG. 21), a galvano scanner 43 (FIG. 22), a polygon mirror 45 (FIG. 23), or the like forms an elongated beam along the end face 20.

Then, as shown in FIGS. 24 and 25, the laser beam B is partially shielded by using the shielding plate 47 to form a plurality of laser spots S. The shielding plate 47 has a plurality of shielding portions 47a arranged with a gap in the end face direction.
The shielding plate 47 needs to reflect or absorb the laser beam. When absorbing, it is necessary to have heat resistance. If it absorbs laser light but does not have sufficient heat resistance, it is necessary to provide a forced cooling mechanism for the shielding plate.
A mechanism (not shown) for moving the shielding plate 47 along the end face portion 21 of the glass substrate G may be provided. In this case, the positions of the plurality of laser spots S can be changed, and by repeating this, the laser spots S can be irradiated to the entire end face vicinity portion 21.
Also in the first modification of the second embodiment, by cooling the first heating region by air cooling or the like and then performing the second heating, the time interval between the heating operations can be shortened, and the tact time of the residual stress reduction treatment can be shortened. Can be shortened.

(2) Second Modification Example In the second embodiment, a method of simultaneously heating at multiple points using an optical branching element has been described, but simultaneous heating at multiple points may be performed by a method of scanning laser light one pulse at a time. A method of simultaneously heating multiple points by scanning laser light one pulse at a time will be described as a second modification with reference to FIGS. 26 to 29. FIG. 26 is a schematic plan view of the laser irradiation device of the second modification of the second embodiment. FIG. 27 is a schematic front view of the laser irradiation device. FIG. 28 is a schematic diagram showing the formation of three laser spots using the galvano scanner 43. FIG. 29 is a graph showing changes in the laser pulse and the ray angle with respect to time.
As shown in FIGS. 26 and 27, the laser irradiation device 1A includes a laser oscillator 15, a beam expander 49, a condenser lens 19, and a galvano scanner 43. Then, the laser irradiation device 1A uses the galvano scanner 43 to control the irradiation position of each pulse of the laser light, and irradiates the laser light to a plurality of points at the same time in a pseudo manner to create a state in which multiple points are heated at the same time. ..

In the example of FIG. 28, the position of the laser spot is moved by 10 mm on the sample surface by changing the beam angle of the laser beam by 1 ° with the galvano scanner. When the light beam angle is changed in synchronization with the laser pulse oscillating at 500 Hz as shown in FIG. 29, the laser light reciprocates once in a 20 mm region with a period of 12 milliseconds, and each of the three laser spots has one cycle (1 cycle (1 cycle). The laser beam is irradiated only for 2 milliseconds out of 12 milliseconds). Further, the region between the three laser spots is not irradiated with the laser beam. In this case, since the cycle in which the laser beam is scanned is sufficiently fast, if this operation is repeated for a predetermined time (for example, 1 second), the three points are simultaneously heated for a predetermined time.
Also in the second modification of the second embodiment, by cooling the first heating region by air cooling or the like and then performing the second heating, the time interval between the heating operations can be shortened, and the tact time of the residual stress reduction treatment can be shortened. Can be shortened.

3. 3. Other Embodiments Although the plurality of embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and various modifications can be made without departing from the gist of the invention. In particular, the plurality of embodiments and modifications described herein can be arbitrarily combined as needed.
The present invention is also applied when melt chamfering is not performed.
The present invention is also applied when the residual stress generation region is not the portion near the end face of the glass substrate G, for example, the central portion.

The present invention can be widely applied to a method for reducing residual stress on a glass substrate and a device for reducing residual stress on a glass substrate.

1: Laser irradiation device 3: Laser device 5: Transmission optical system 7: Processing table 9: Control unit 11: Drive mechanism 13: Table drive unit 15: Laser oscillator 17: Laser control unit 19: Condensing lens 20: End face 21: Near the end face 35: Substrate cooling device 41: Cylindrical lens 43: Galvano scanner 45: Polygon mirror 47: Shielding plate G: Glass substrate S: Laser spot Z: Residual stress generation region

Claims (6)

It is a method to reduce the residual stress of the glass substrate.
A laser light irradiation step of irradiating a part of the portion of the glass substrate having a high residual stress with a laser light to heat the glass substrate.
A cooling step of cooling the portion heated by being irradiated with the laser beam,
Equipped with
The laser beam irradiation step sequentially executes irradiation of one or more laser beams to different points, and then performs the laser beam irradiation step.
The cooling step sequentially executes cooling of the heated portion after each laser light irradiation step .
A method for reducing residual stress on a glass substrate. The laser light irradiation step according to claim 1, wherein a plurality of laser beams branched by using a diffractive optical element, a transmissive spatial light modulator, or a reflective spatial light modulator are simultaneously irradiated to a plurality of locations as the plurality of laser beams. The method for reducing residual stress on a glass substrate according to the above method. The method for reducing residual stress of a glass substrate according to claim 1 or 2, wherein the glass substrate is a glass substrate integrated with a resin . A device that reduces the residual stress of the glass substrate, the laser device that irradiates a part of the part of the glass substrate with high residual stress to heat it, and the part that is heated by irradiating the laser light. Equipped with a cooling device to cool ,
The laser device sequentially executes to irradiate different spots with one or more laser beams.
The cooling device is a residual stress reducing device for a glass substrate that sequentially cools the portion irradiated with the laser beam after the laser beam is sequentially executed to irradiate different portions . The fourth aspect of claim 4, wherein the laser apparatus simultaneously irradiates a plurality of locations as the plurality of laser beams with the laser beam branched by using a diffractive optical element, a transmission type spatial light modulator, or a reflection type spatial light modulator. Residual stress reduction device for glass substrates. The residual stress reducing device for a glass substrate according to claim 4 or 5, wherein the glass substrate is a glass substrate integrally integrated with a resin .

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