JP7018267B2 - サイアロン焼結体、その製法、複合基板及び電子デバイス - Google Patents

サイアロン焼結体、その製法、複合基板及び電子デバイス Download PDF

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JP7018267B2
JP7018267B2 JP2017129086A JP2017129086A JP7018267B2 JP 7018267 B2 JP7018267 B2 JP 7018267B2 JP 2017129086 A JP2017129086 A JP 2017129086A JP 2017129086 A JP2017129086 A JP 2017129086A JP 7018267 B2 JP7018267 B2 JP 7018267B2
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Prior art keywords
sintered body
sialon
sialon sintered
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raw material
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English (en)
Japanese (ja)
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JP2018048059A (ja
Inventor
祐輝 野本
勝弘 井上
啓 田中
祐司 勝田
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NGK Insulators Ltd
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NGK Insulators Ltd
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Priority to US15/703,034 priority Critical patent/US10399906B2/en
Priority to DE102017008649.4A priority patent/DE102017008649B4/de
Priority to TW106131734A priority patent/TWI762509B/zh
Priority to KR1020170119462A priority patent/KR102395407B1/ko
Priority to CN201710846104.8A priority patent/CN107840664B/zh
Publication of JP2018048059A publication Critical patent/JP2018048059A/ja
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    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/597—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon oxynitride, e.g. SIALONS
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C04B35/645—Pressure sintering
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3418—Silicon oxide, silicic acids or oxide forming salts thereof, e.g. silica sol, fused silica, silica fume, cristobalite, quartz or flint
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/38—Non-oxide ceramic constituents or additives
    • C04B2235/3852—Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
    • C04B2235/3865—Aluminium nitrides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/38—Non-oxide ceramic constituents or additives
    • C04B2235/3852—Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
    • C04B2235/3873—Silicon nitrides, e.g. silicon carbonitride, silicon oxynitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/963—Surface properties, e.g. surface roughness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H2009/02165—Tuning
    • H03H2009/02173—Tuning of film bulk acoustic resonators [FBAR]

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2017129086A 2016-09-20 2017-06-30 サイアロン焼結体、その製法、複合基板及び電子デバイス Active JP7018267B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US15/703,034 US10399906B2 (en) 2016-09-20 2017-09-13 Sialon sintered body, method for producing the same, composite substrate, and electronic device
DE102017008649.4A DE102017008649B4 (de) 2016-09-20 2017-09-14 Sialon-sinterkörper, verfahren zu dessen herstellung, verbundsubstrat und dessen verwendung in einer elektronischen vorrichtung
TW106131734A TWI762509B (zh) 2016-09-20 2017-09-15 矽鋁氮氧化物燒結體、其製法、複合基板及電子元件
KR1020170119462A KR102395407B1 (ko) 2016-09-20 2017-09-18 사이알론 소결체, 그 제조법, 복합 기판 및 전자 디바이스
CN201710846104.8A CN107840664B (zh) 2016-09-20 2017-09-19 硅铝氧氮陶瓷烧结体、其制法、复合基板及电子器件

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
WOPCT/JP2016/77627 2016-09-20
JP2016077627 2016-09-20

Publications (2)

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JP2018048059A JP2018048059A (ja) 2018-03-29
JP7018267B2 true JP7018267B2 (ja) 2022-02-10

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JP (1) JP7018267B2 (zh)
TW (1) TWI762509B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102156574B1 (ko) * 2020-01-23 2020-09-17 주식회사 화인테크 머시너블 세라믹 복합체 및 이의 제조방법

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60191064A (ja) * 1984-03-13 1985-09-28 株式会社トクヤマ 透光性サイアロンの製造方法
JPH0597533A (ja) * 1991-03-15 1993-04-20 Toshiba Corp セラミツクス−金属接合用組成物およびセラミツクス−金属接合体
JPH085727B2 (ja) * 1991-03-20 1996-01-24 新日本製鐵株式会社 セラミックスと金属との接合方法
US5413972A (en) * 1993-12-23 1995-05-09 The Dow Chemical Company SiAlON composites and method of preparing the same
JPH07196380A (ja) * 1993-12-28 1995-08-01 Nippon Cement Co Ltd 非酸化物セラミックスと金属との接合方法
JP2004091272A (ja) * 2002-09-02 2004-03-25 Matsushita Masashi βサイアロン燒結体
CN102272074B (zh) * 2008-08-29 2014-05-28 Skf股份公司 大型陶瓷部件及其制造方法

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Publication number Publication date
TWI762509B (zh) 2022-05-01
TW201827384A (zh) 2018-08-01
JP2018048059A (ja) 2018-03-29

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