JP7005180B2 - スケール本体及びエンコーダ - Google Patents
スケール本体及びエンコーダ Download PDFInfo
- Publication number
- JP7005180B2 JP7005180B2 JP2017111311A JP2017111311A JP7005180B2 JP 7005180 B2 JP7005180 B2 JP 7005180B2 JP 2017111311 A JP2017111311 A JP 2017111311A JP 2017111311 A JP2017111311 A JP 2017111311A JP 7005180 B2 JP7005180 B2 JP 7005180B2
- Authority
- JP
- Japan
- Prior art keywords
- scale
- elements
- scanning
- scale elements
- scale body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2046—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable ferromagnetic element, e.g. a core
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2053—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
- G01D5/225—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the mutual induction between the two coils
- G01D5/2275—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the mutual induction between the two coils by a movable non-ferromagnetic conductive element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2451—Incremental encoders
- G01D5/2452—Incremental encoders incorporating two or more tracks having an (n, n+1, ...) relationship
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
前記測定方向Xに対して平行に互いに離間して延在し、互いに結合されていて、1つの中間空間を包囲している2つの側壁を有する導電性材料から成る1つの支持形材と、
前記支持形材に配置され、前記中間空間内で前記2つの側壁のうちの一方の側壁に対向していて、この側壁に対して離間して配置され、前記測定方向Xに対して平行に延在し、導電性材料から成る連続する複数の第1目盛要素と、
前記支持形材に配置され、前記中間空間内で前記2つの側壁のうちの他方の側壁に対向していて、この側壁に対して離間して配置され、前記測定方向Xに対して平行に延在し、導電性材料から成る連続する複数の第2目盛要素とを有する。
3 側壁
4 側壁
5 結合ウェブ
6 第1目盛要素
7 第2目盛要素
8 ブリッジ
9 取り付け要素
10 測定装置
11 第1センサ
12 第2センサ
13 評価装置
14 第1回路基板
15 第2回路基板
16 中間層
17 軟磁性のコア
18 非導電性又は非常に難導電性の層
19 非導電性又は非常に難導電性の層
20 物体
101 スケール本体
103 側壁
104 側壁
105 結合ウェブ
106 第1目盛要素
107 第2目盛要素
108 ブリッジ
109 取り付け要素
111 第1励磁巻線
112 第1走査巻線
113 第1走査巻線
101.1 スケール本体
103.1 側壁
104.1 側壁
105.1 結合ウェブ
106.1 第1目盛要素
107.1 第2目盛要素
108.1 ブリッジ
109.1 取り付け要素
Claims (16)
- 測定方向Xに沿って電磁誘導式に位置を測定するためのスケール本体において、当該スケール本体は、
前記測定方向Xに対して平行に互いに離間して延在し、1つのウェブ(5)又は結合部を介して互いに結合されていて、1つの中間空間を包囲している2つの側壁(3,103,103.1,4,104,104.1)を有する導電性材料から成る1つの支持形材と、
前記支持形材に配置され、前記2つの側壁のうちの一方の側壁(3,103,103.1)に対向していて、この側壁(3,103,103.1)に対して離間して配置され、前記測定方向Xに対して平行に延在し、導電性材料から成る連続する複数の第1目盛要素(6,106,106.1)と、
前記支持形材に配置され、前記2つの側壁のうちの他方の側壁(4,104,104.1)に対向していて、この側壁(4,104,104.1)に対して離間して配置され、前記測定方向Xに対して平行に延在し、導電性材料から成る連続する複数の第2目盛要素(7,107,107.1)とを有し、
当該複数の第1目盛要素(6,106,106.1)を、当該複数の第2目盛要素(7,107,107.1)と一緒に電磁誘導式に走査するため、連続する前記複数の第1目盛要素(6,106,106.1)と、連続する前記複数の第2目盛要素(7,107,107.1)とは、1つの走査装置(10)の軟磁性材料から成り、ミューメタルから構成されているか又は軟磁性の1つのコア(17)とその両側でその上に配置された非導電性で軟磁性の複数の層(18,19)とから構成されている少なくとも1つの中間層(16)であって、当該中間層(16)を有する前記走査装置(10)用の間隙を形成している当該スケール本体。 - 当該複数の第1目盛要素(6,106,106.1)と、当該複数の第2目盛要素(7,107,107.1)とはそれぞれ、測定方向Xに互いに離間した櫛形の要素である請求項1に記載のスケール本体。
- 当該複数の目盛要素(6,7)の基礎部と、前記測定方向Xに対して直角に前記基礎部に対して離間しているこれらの目盛要素(6,7)の終端部とが、これらの目盛要素(6,7)に対向している前記側壁(3,4)に結合されている請求項1に記載のスケール本体。
- 当該複数の第1目盛要素(6,106,106.1)の基礎部が、当該複数の第2目盛要素(7,107,107.1)に結合されていて、これらの第1目盛要素(6,106,106.1)の前記基礎部に対して離間して配置された終端部がそれぞれ、対向している前記側壁(3,103,103.1)に結合されていて、これらの第2目盛要素(7,107,107.1)の前記基礎部に対して離間して配置された終端部がそれぞれ、対向している前記側壁(4,104,104.1)に結合されている請求項1に記載のスケール本体。
- 当該複数の第1目盛要素(6,106,106.1)と当該対向している側壁(3,103,103.1)との結合部分と、当該複数の第2目盛要素(7,107,107.1)と当該対向している側壁(4,104,104.1)との結合部分の両地点のうちの少なくとも1つの地点の基礎部又は終端部がそれぞれ、結合すべき前記目盛要素(6,106,106.1,7,107,107.1)の幅(B1)の一部である幅(B2)を有する1つの隘路を備えている請求項3に記載のスケール本体。
- 当該複数の目盛要素(6,106,106.1,7,107,107.1)の終端部と当該離間して対向している側壁(3,103,103.1,4,104,104.1)との結合部分がそれぞれ、結合すべき前記目盛要素(6,106,106.1,7,107,107.1)の幅(B1)の一部であり、測定方向Xに幅(B2)を有する1つのブリッジ(8,108,108.1)によって形成されている請求項5に記載のスケール本体。
- 当該複数のブリッジ(8,108,108.1)はそれぞれ、前記目盛要素(6,106,106.1,7,107,107.1)の中央に配置されている請求項6に記載のスケール本体。
- 前記スケール本体は、成形によって生成された導電性材料から成る自己支持形の形材である請求項1に記載のスケール本体。
- 前記スケール本体は、押出成形形材である請求項8に記載のスケール本体。
- 前記押出成形形材は、アルミニウム材料から成る請求項9に記載のスケール本体。
- 前記形材は、金属板を成形することによって製造されている請求項8に記載のスケール本体。
- 当該連続する複数の第1目盛要素(6,106,106.1)と、当該連続する複数の第2目盛要素(7,107,107.1)とは、絶対位置測定のために、複数の第1目盛要素(6,106,106.1)を有する1つの経路にわたって形成されている請求項1に記載のスケール本体。
- 当該連続する複数の第1目盛要素(6,106,106.1)が、第1目盛周期(P1)を有する周期的なインクリメンタル目盛であり、当該連続する複数の第2目盛要素(7,107,107.1)が、前記第1目盛周期(P1)とは相違する第2目盛周期(P2)を有する周期的なインクリメンタル目盛であることによって、前記スケール本体は、当該絶対位置測定のためにノギス原理にしたがって形成されている請求項12に記載のスケール本体。
- 請求項1~13のいずれか1項に記載の1つのスケール本体(1,101,101.1)を備え、且つ複数の第1目盛要素(6,106,106.1)を走査するための1つの第1センサ(11)と複数の第2目盛要素(7,107,107.1)を走査するための1つの第2センサ(12)とを有し、間隙内に配置された1つの走査装置(10)を備えるエンコーダにおいて、
前記第1センサ(11)が、電磁的な交番磁場を生成するための1つの励磁巻線(111)と、前記複数の第1目盛要素(6,106,106.1)内の、位置に依存して変調された電磁的な交番磁場を検出するための1つの走査巻線(112,113)とを有し、 前記第2センサ(12)が、電磁的な交番磁場を生成するための1つの励磁巻線(121)と、前記複数の第2目盛要素(7,107,107.1)内の、位置に依存して変調された電磁的な交番磁場を検出するための1つの走査巻線(122,123)とを有する当該エンコーダ。 - 軟磁性材料から成る少なくとも1つの中間層(16)が、前記第1センサ(11)の前記走査巻線(112,113)と前記第2センサ(12)の前記走査巻線(122,123)との間に配置されている請求項14に記載のエンコーダ。
- 前記コア(17)は、軟磁性で導電性の金属から成り、前記複数の層(18,19)はそれぞれ、軟磁性粒子が封入されている非導電性のマトリックス材料から成る請求項14又は15に記載のエンコーダ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP16173324.1 | 2016-06-07 | ||
EP16173324.1A EP3255384B1 (de) | 2016-06-07 | 2016-06-07 | Massverkörperung sowie positionsmesseinrichtung |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017219547A JP2017219547A (ja) | 2017-12-14 |
JP7005180B2 true JP7005180B2 (ja) | 2022-01-21 |
Family
ID=56112876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017111311A Active JP7005180B2 (ja) | 2016-06-07 | 2017-06-06 | スケール本体及びエンコーダ |
Country Status (5)
Country | Link |
---|---|
US (1) | US10378926B2 (ja) |
EP (1) | EP3255384B1 (ja) |
JP (1) | JP7005180B2 (ja) |
CN (1) | CN107478146B (ja) |
ES (1) | ES2701307T3 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2701307T3 (es) * | 2016-06-07 | 2019-02-21 | Heidenhain Gmbh Dr Johannes | Medida materializada así como dispositivo de medición de posición |
US11680826B2 (en) * | 2018-11-26 | 2023-06-20 | Integrated Device Technology, Inc. | Inductive position sensor for electronic throttle control |
JP7346879B2 (ja) * | 2019-04-02 | 2023-09-20 | 村田機械株式会社 | 磁気式リニアセンサ |
EP3736542B1 (de) * | 2019-05-08 | 2021-07-07 | Dr. Johannes Heidenhain GmbH | Anordnung zum endseitigen befestigen eines sich in einer längsrichtung erstreckenden trägers mit einer messteilung zur positionsmessung zumindest in längsrichtung an einer anbaufläche eines grundkörpers |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004245591A (ja) | 2003-02-10 | 2004-09-02 | Sony Precision Technology Inc | スケール装置 |
US20130090890A1 (en) | 2011-10-10 | 2013-04-11 | Advanced Sensor Technology Limited | Absolute position measuring device and method |
DE102013220749A1 (de) | 2012-10-26 | 2014-05-15 | Robert Bosch Gmbh | Positionsmesssystem |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3635258C1 (de) * | 1986-02-27 | 1987-10-01 | Peter Schuster | Magnetkraftsystem fuer reibungsarmen Transport von Lasten |
JPH0293714U (ja) * | 1989-01-13 | 1990-07-25 | ||
DE59305801D1 (de) * | 1993-12-08 | 1997-04-17 | Heidenhain Gmbh Dr Johannes | Längenmesssystem |
JP2818800B2 (ja) * | 1994-02-23 | 1998-10-30 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 位置に依存する信号を発生する装置 |
JPH07260408A (ja) * | 1994-03-23 | 1995-10-13 | Sony Magnescale Inc | アブソリュート型スケール装置 |
EP0743508A2 (en) * | 1995-05-16 | 1996-11-20 | Mitutoyo Corporation | Induced current position transducer |
GB9523991D0 (en) * | 1995-11-23 | 1996-01-24 | Scient Generics Ltd | Position encoder |
DE19645605A1 (de) * | 1996-11-06 | 1998-05-07 | Heidenhain Gmbh Dr Johannes | Positionsmeßeinrichtung und Verfahren zur Montage eines Abtastelementes einer Positionsmeßeinrichtung |
JP3787228B2 (ja) * | 1997-11-07 | 2006-06-21 | 松下電器産業株式会社 | 位置決め装置 |
DE19802036B4 (de) * | 1998-01-21 | 2006-11-30 | Dr. Johannes Heidenhain Gmbh | Verfahren und Vorrichtung zur mechanischen Justage von Teilungsträgern |
DE19941318A1 (de) * | 1999-08-31 | 2001-03-15 | Heidenhain Gmbh Dr Johannes | Optische Positionsmeßeinrichtung |
JP2003042826A (ja) * | 2001-07-27 | 2003-02-13 | Ryoka E-Tec Kk | 液体タンク用液面計 |
ATE414890T1 (de) * | 2001-09-04 | 2008-12-15 | Heidenhain Gmbh Dr Johannes | Positionsmesseinrichtung und verfahren zum betrieb einer positionsmesseinrichtung |
DE10311098B4 (de) * | 2003-03-07 | 2016-06-30 | Dr. Johannes Heidenhain Gmbh | Winkelmesseinrichtung und Verfahren zur Herstellung der Winkelmesseinrichtung |
DE10317736A1 (de) * | 2003-04-11 | 2004-10-28 | Dr. Johannes Heidenhain Gmbh | Abtasteinheit für eine Positionsmesseinrichtung zum optischen Abtasten einer Maßverkörperung |
DE10338991A1 (de) * | 2003-08-18 | 2005-03-17 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
DE102009043293A1 (de) * | 2009-09-29 | 2011-03-31 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
DE102011082663A1 (de) * | 2011-09-14 | 2013-03-14 | Dr. Johannes Heidenhain Gmbh | Abtastbaugruppe eines Positionsmesssystems |
DE102012221566A1 (de) * | 2012-11-26 | 2014-05-28 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
US9267819B2 (en) * | 2014-06-12 | 2016-02-23 | Mitutoyo Corporation | Absolute position encoder scale having plates alternating with varying recesses |
DE102015224589A1 (de) * | 2015-12-08 | 2017-06-08 | Dr. Johannes Heidenhain Gmbh | Induktive Positionsmesseinrichtung |
ES2701307T3 (es) * | 2016-06-07 | 2019-02-21 | Heidenhain Gmbh Dr Johannes | Medida materializada así como dispositivo de medición de posición |
DE102016211150A1 (de) * | 2016-06-22 | 2017-12-28 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
ES2718236T3 (es) * | 2016-12-20 | 2019-06-28 | Heidenhain Gmbh Dr Johannes | Dispositivo óptico de medición de posición |
-
2016
- 2016-06-07 ES ES16173324T patent/ES2701307T3/es active Active
- 2016-06-07 EP EP16173324.1A patent/EP3255384B1/de active Active
-
2017
- 2017-05-24 US US15/603,472 patent/US10378926B2/en active Active
- 2017-06-05 CN CN201710412039.8A patent/CN107478146B/zh active Active
- 2017-06-06 JP JP2017111311A patent/JP7005180B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004245591A (ja) | 2003-02-10 | 2004-09-02 | Sony Precision Technology Inc | スケール装置 |
US20130090890A1 (en) | 2011-10-10 | 2013-04-11 | Advanced Sensor Technology Limited | Absolute position measuring device and method |
DE102013220749A1 (de) | 2012-10-26 | 2014-05-15 | Robert Bosch Gmbh | Positionsmesssystem |
Also Published As
Publication number | Publication date |
---|---|
JP2017219547A (ja) | 2017-12-14 |
CN107478146B (zh) | 2020-04-14 |
EP3255384B1 (de) | 2018-11-28 |
EP3255384A1 (de) | 2017-12-13 |
CN107478146A (zh) | 2017-12-15 |
US10378926B2 (en) | 2019-08-13 |
US20170350728A1 (en) | 2017-12-07 |
ES2701307T3 (es) | 2019-02-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7005180B2 (ja) | スケール本体及びエンコーダ | |
JP6333345B2 (ja) | 電磁誘導式エンコーダ | |
US7049924B2 (en) | Electromagnetic induction type position sensor | |
US4612502A (en) | Magnetic length or angle measuring system having improved magnetic sensor arrangement | |
US10557727B2 (en) | Inductive displacement sensors | |
JP6537931B2 (ja) | 積層構造中のレイヤを有するアブソリュート型位置エンコーダ用スケール | |
US9013192B2 (en) | Inductive measuring device for detecting lengths and angles | |
US10564008B2 (en) | Inductive displacement sensors | |
JP6131588B2 (ja) | 電流センサ | |
CN108375333A (zh) | 用于位置测量的传感器 | |
US10564007B2 (en) | Inductive movement sensors | |
JP6873543B2 (ja) | 電磁誘導式アブソリュート型位置エンコーダ | |
JP3559225B2 (ja) | 誘電型位置検出装置 | |
JP2004333478A (ja) | 電磁誘導式回転センサ及びこの電磁誘導式回転センサを備えたシャフトエンコーダ | |
JP2017106920A5 (ja) | ||
US7812597B2 (en) | Inductive magnetic position sensor | |
EP4009004A1 (en) | Eddy current sensor device for measuring a linear displacement | |
US20200240812A1 (en) | Electromagnetic induction type encoder | |
JP4248324B2 (ja) | アクチュエータ | |
JP6134964B2 (ja) | 誘導型変位検出装置 | |
JP2005077150A (ja) | 誘導型位置検出装置 | |
JP7431032B2 (ja) | 電磁誘導式エンコーダ | |
JP6121657B2 (ja) | 差動磁場印加装置及び差動磁場印加方法 | |
JP2022063610A (ja) | 電磁誘導式エンコーダ | |
JP5481640B2 (ja) | 多重冗長型リニアセンサ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200206 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20200703 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20210224 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210303 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210601 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210825 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20211110 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20211208 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220105 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7005180 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |