JP6941577B2 - Environment forming device - Google Patents

Description

The present invention relates to an environment forming apparatus provided with a processing chamber capable of accommodating an object to be processed.

Conventionally, there has been known an environment forming device that performs a process of exposing all the objects to be processed to air having the same temperature by supplying air whose temperature has been adjusted by an air conditioner to a processing chamber containing the objects to be processed. As such an environment forming device, as described in Patent Document 1, a test in which all samples are exposed to air at the same temperature by supplying air whose temperature has been adjusted by an air conditioner to a test chamber containing the samples. Environmental test equipment to be performed is known.

JP-A-2010-107218

The environment forming device is devised so that the temperature of the air does not fluctuate depending on the position of the object to be treated in the treatment chamber, but in reality, it is difficult to make the temperature of the air uniform in the treatment chamber. There is. Therefore, it may be difficult to expose all the objects to be processed arranged in the processing chamber to air having the same temperature.

Therefore, for example, for each of the plurality of processing objects that can be accommodated in the processing chamber, an auxiliary air conditioner capable of adjusting the temperature of the air supplied to each processing object is individually provided and supplied to each processing object. It is conceivable to individually adjust the temperature of the air to the same temperature. However, in this case, the air conditioner that supplies air to the processing chamber and the same number of auxiliary air conditioners as the number of objects to be processed arranged in the processing chamber are operated in parallel, which is a great use when the processing is performed for a long time. The problem arises that energy is required.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an environment forming apparatus capable of exposing a processing object housed in a processing chamber to air at a desired temperature while saving energy. ..

The environment forming apparatus according to the present invention includes a processing chamber capable of accommodating an object to be processed, a main air-conditioning unit that adjusts the temperature of air and supplies the temperature-adjusted air to the processing chamber, and a plurality of treatment chambers. An auxiliary air conditioner that is individually provided for each position and adjusts the temperature of the air to supply the temperature-adjusted air to each position, and detects the temperature of the air at positions different from the plurality of positions. Based on the room temperature detection unit, the temperature detection unit that is individually provided for each of the plurality of positions and detects the temperature of the air or the temperature of the object to be processed at each position, and the temperature detected by the room temperature detection unit. , While adjusting the temperature of the air by the main air conditioning unit, it corresponds to the second position based on the temperature detected by the temperature detection unit corresponding to the second position different from the first position among the plurality of positions. The auxiliary air-conditioning unit adjusts the temperature of the air, and further, the adjusting ability of the air temperature adjustment performed by the main air-conditioning unit is corrected based on the temperature detected by the temperature detection unit corresponding to the first position. A control unit is provided , and the first position is a position corresponding to the temperature detection unit that has detected the highest temperature among the plurality of temperature detection units or the temperature detection unit that has detected the lowest temperature. The control unit has the first position so that the temperature detected by the temperature detection unit corresponding to the second position is the same as the temperature detected by the temperature detection unit corresponding to the first position. by the auxiliary air conditioning unit that corresponds to a two position Ru to perform the temperature adjustment of the air.
In addition, another environment forming apparatus according to the present invention includes a processing chamber capable of accommodating an object to be processed, a main air-conditioning unit that adjusts the temperature of air and supplies the temperature-adjusted air to the processing chamber, and the processing. An auxiliary air-conditioning unit that is individually provided for each of a plurality of positions in the room, adjusts the temperature of the air, and supplies the temperature-adjusted air to each position, and air at a position different from the plurality of positions. A room temperature detection unit that detects the temperature of the above, a temperature detection unit that is individually provided for each of the plurality of positions and detects the temperature of the air or the temperature of the object to be processed at each position, and the detection by the room temperature detection unit. Based on the temperature, the second is based on the temperature detected by the temperature detection unit corresponding to the second position different from the first position among the plurality of positions while adjusting the temperature of the air by the main air conditioning unit. The temperature of the air is adjusted by the auxiliary air-conditioning unit corresponding to the position, and the temperature adjustment ability of the air performed by the main air-conditioning unit is adjusted to the temperature detected by the temperature detection unit corresponding to the first position. The first position includes a control unit that corrects based on the above, and the first position is a position corresponding to the temperature detection unit that has detected the temperature closest to a predetermined value among the plurality of temperature detection units. , The auxiliary air conditioning unit corresponding to the second position so that the temperature detected by the temperature detection unit corresponding to the second position becomes the same as the temperature detected by the temperature detection unit corresponding to the first position. Have the air temperature adjusted.

In this configuration, the temperature of the air is adjusted by the main air-conditioning unit based on the temperature detected by the room temperature detection unit. Therefore, the temperature of the air at a position different from the room temperature detection unit and the temperature of the object to be processed in the vicinity of the position may not be adjusted to a desired temperature.

However, in this configuration, the adjustment ability of the air temperature adjustment performed by the main air conditioning unit is further corrected based on the temperature detected by the temperature detection unit corresponding to the first position. Therefore, the temperature of the air supplied to the processing chamber can be corrected to the temperature of the air at the first position or the temperature based on the temperature of the object to be processed in the vicinity of the first position. Thereby, the temperature of the air supplied to the processing chamber can be adjusted to the temperature of the air at the first position or the temperature based on the temperature of the object to be processed in the vicinity of the first position.

On the other hand, the temperature of the air individually supplied to the second position different from the first position is adjusted by the auxiliary air conditioning unit corresponding to the second position based on the temperature detected by the temperature detection unit corresponding to the second position. Will be done. Therefore, the temperature of the air individually supplied to the second position is set to the temperature of the air in the second position or the object to be processed in the vicinity of the second position without operating the auxiliary air conditioning unit corresponding to the first position. It can be adjusted to a temperature based on the temperature of.

Therefore, according to this configuration, energy saving can be achieved as compared with the case where the main air-conditioning unit and all the auxiliary air-conditioning units are operated. Further, it is possible to supply air adjusted to a temperature based on the temperature of the air at each position or the temperature of the object to be processed in the vicinity of each position to a plurality of positions in the processing chamber. As a result, the object to be processed can be exposed to air at a desired temperature at a plurality of positions in the processing chamber.

Further, according to this configuration, the temperature of the air at the second position or the temperature of the object to be processed near the second position is the temperature of the air at the first position or the temperature of the object to be processed near the first position. to be the same as, Ru to perform the temperature adjustment of the air by the auxiliary air conditioning unit corresponding to the second position. Therefore, the object to be processed can be exposed to air having the same temperature at a plurality of positions.
For example, the temperature of the air at the first position or the temperature of the object to be processed near the first position may be higher than the temperature of the air at the second position or the temperature of the object to be processed near the second position. ..
In this case, the auxiliary air-conditioning unit corresponding to the second position raises the temperature of the air individually supplied to the second position without adjusting the temperature of the air individually supplied to the second position. You can only make adjustments. Therefore, instead of providing an adjustable cooler that lowers the air temperature, at least an adjustable heater that raises the air temperature is provided to simplify the auxiliary air conditioning unit corresponding to the second position. Can be configured.

The control unit includes a cascade controller having a primary control and a secondary control, the primary regulator, said temperature detecting unit detecting temperature primary measurements by corresponding to the first position A first set value input unit for inputting the set temperature of the air supplied to the processing chamber as a set value on the primary side, and a first set value input unit for inputting the set temperature of the air supplied to the processing chamber as the set value on the primary side. The set temperature is corrected according to the difference from the set value on the primary side, the set temperature after the correction is output as an output value of the primary regulator, and the secondary regulator is operated by the room temperature detection unit. A second measurement value input unit in which the detection temperature is input as a measurement value on the secondary side and a second setting value input unit in which the output value of the primary controller is input as a setting value on the secondary side are provided. The temperature of the air may be adjusted by the main air-conditioning unit so that the measured value on the secondary side becomes the same as the set value on the secondary side.

According to this configuration, if the temperature of the air in the first position or the temperature of the object to be processed in the vicinity of the first position matches the set temperature, the primary regulator is the temperature of the air in the first position or the first position. Since there is no difference between the temperature of the object to be processed near one position and the set temperature, the set temperature is output as the output value of the primary controller without correcting the set temperature. In this case, the secondary controller causes the main air-conditioning unit to adjust the temperature of the air so that the temperature detected by the room temperature detection unit becomes the same as the set temperature which is the output value of the primary controller. As a result, the temperature of the air supplied to the processing chamber can be adjusted so that the temperature detected by the room temperature detection unit becomes the same as the set temperature.

On the other hand, when the temperature of the air in the first position or the temperature of the object to be processed in the vicinity of the first position is different from the set temperature, the primary controller performs the processing in the temperature of the air in the first position or in the vicinity of the first position. The set temperature is corrected according to the difference between the temperature of the object and the set temperature, and the set temperature after the correction is output. In this case, the secondary controller causes the main air-conditioning unit to adjust the temperature of the air so that the temperature detected by the room temperature detection unit becomes the same as the set temperature after the correction.

As a result, if the temperature of the air at the first position or the temperature of the object to be processed near the first position is different from the set temperature, the primary regulator is at the temperature of the air at the first position or near the first position. Instead of correcting the temperature of the air at the arrangement position of the room temperature detection unit according to the difference between the temperature of the object to be processed and the set temperature, the set temperature can be corrected according to the difference. In line with this, in the secondary controller, the room temperature is detected instead of having the main air conditioner adjust the temperature of the air so that the temperature of the corrected air at the arrangement position of the room temperature detection unit becomes the same as the set temperature. The temperature of the air can be adjusted by the main air-conditioning unit so that the temperature of the air at the arrangement position of the unit becomes the same as the set temperature after correction by the primary controller.

Therefore, according to this configuration, the temperature of the air can be adjusted so that the temperature of the air at the first position or the temperature of the object to be processed in the vicinity of the first position becomes the same as the set temperature.

Further, the temperature of the air individually supplied to the second position different from the first position is adjusted by the auxiliary air conditioning unit corresponding to the second position based on the temperature detected by the temperature detection unit corresponding to the second position. Will be done. Therefore, the temperature of the air individually supplied to the second position is set to the temperature of the air in the second position or the object to be processed in the vicinity of the second position without operating the auxiliary air conditioning unit corresponding to the first position. It can be adjusted to a temperature based on the temperature of.

Therefore, according to this configuration, energy saving can be achieved as compared with the case where the main air-conditioning unit and all the auxiliary air-conditioning units are operated. Further, it is possible to supply air adjusted to a temperature based on the temperature of the air at each position or the temperature of the object to be processed in the vicinity to a plurality of positions in the processing chamber. As a result, the object to be processed can be exposed to air at a desired temperature at a plurality of positions in the processing chamber.

For example, so that the temperature of the air at the second position or the temperature of the object to be processed near the second position is the same as the temperature of the air at the first position or the temperature of the object to be processed near the first position. If the temperature of the air is adjusted by the auxiliary air conditioning unit corresponding to the second position, the object to be processed can be exposed to the air having the same temperature at a plurality of positions.

Further, the auxiliary air-conditioning unit may be provided with a heater that directly heats the air.

According to this configuration, since the air is directly heated by the heater corresponding to the second position, the temperature of the air individually supplied to the second position can be rapidly raised.

In addition, another environment forming apparatus according to the present invention includes a processing chamber capable of accommodating an object to be processed, a main air-conditioning unit that adjusts the temperature of air and supplies the temperature-adjusted air to the processing chamber, and the processing. An auxiliary air-conditioning unit that is individually provided for each of a plurality of positions in the room, adjusts the temperature of the air, and supplies the temperature-adjusted air to each position, and is individually provided for each of the plurality of positions. Based on the temperature detection unit that detects the temperature of the air or the temperature of the object to be processed at each position and the temperature detection unit that corresponds to the first position among the plurality of positions, the first While adjusting the temperature of the air by the main air conditioning unit without operating the auxiliary air conditioning unit corresponding to the position, the temperature detection unit corresponding to the second position different from the first position among the plurality of positions is used. A control unit that adjusts the temperature of air by the auxiliary air conditioning unit corresponding to the second position based on the detected temperature is provided.

In this configuration, the temperature of the air is adjusted by the main air conditioning unit based on the temperature detected by the temperature detection unit corresponding to the first position, so that the temperature of the air supplied to the processing chamber is set to the temperature of the air at the first position or The temperature can be adjusted based on the temperature of the object to be processed near the first position.

On the other hand, the temperature of the air individually supplied to the second position different from the first position is adjusted by the auxiliary air conditioning unit corresponding to the second position based on the temperature detected by the temperature detection unit corresponding to the second position. Will be done. Therefore, the temperature of the air individually supplied to the second position is set to the temperature of the air in the second position or the object to be processed in the vicinity of the second position without operating the auxiliary air conditioning unit corresponding to the first position. It can be adjusted to a temperature based on the temperature of.

Therefore, according to this configuration, energy saving can be achieved as compared with the case where the main air-conditioning unit and all the auxiliary air-conditioning units are operated. Further, it is possible to supply air adjusted to a temperature based on the temperature of the air at each position or the temperature of the object to be processed in the vicinity of each position to a plurality of positions in the processing chamber. As a result, the object to be processed can be exposed to air at a desired temperature at a plurality of positions in the processing chamber.

For example, so that the temperature of the air at the second position or the temperature of the object to be processed near the second position is the same as the temperature of the air at the first position or the temperature of the object to be processed near the first position. If the temperature of the air is adjusted by the auxiliary air conditioning unit corresponding to the second position, the object to be processed can be exposed to the air having the same temperature at a plurality of positions.
In addition, another environment forming apparatus according to the present invention includes a processing chamber capable of accommodating an object to be processed, a main air-conditioning unit that adjusts the temperature of air and supplies the temperature-adjusted air to the processing chamber, and the processing. An auxiliary air-conditioning unit that is individually provided for each of a plurality of positions in the room, adjusts the temperature of the air, and supplies the temperature-adjusted air to each position, and is individually provided for each of the plurality of positions. Based on the temperature detection unit that detects the temperature of air or the temperature of the object to be processed at each position and the temperature detected by the temperature detection unit corresponding to the first position among the plurality of positions, the main air conditioner While adjusting the temperature of the air by the unit, the auxiliary air conditioning corresponding to the second position is based on the temperature detected by the temperature detection unit corresponding to the second position different from the first position among the plurality of positions. A control unit that adjusts the temperature of air by the unit is provided, and the first position is a position corresponding to the temperature detection unit that has detected the highest temperature among the plurality of temperature detection units, and a plurality of the temperature. It is a position corresponding to the temperature detection unit that has detected the lowest temperature in the detection unit, or a position corresponding to the temperature detection unit that has detected the temperature closest to a predetermined value among the plurality of temperature detection units. The control unit corresponds to the second position so that the temperature detected by the temperature detection unit corresponding to the second position is the same as the temperature detected by the temperature detection unit corresponding to the first position. Ru to perform the temperature adjustment of the air by the auxiliary air conditioning unit.
For example, the temperature of the air at the first position or the temperature of the object to be processed near the first position may be higher than the temperature of the air at the second position or the temperature of the object to be processed near the second position. ..
In this case, the auxiliary air-conditioning unit corresponding to the second position raises the temperature of the air individually supplied to the second position without adjusting the temperature of the air individually supplied to the second position. You can only make adjustments. Therefore, instead of providing an adjustable cooler that lowers the air temperature, at least an adjustable heater that raises the air temperature is provided to simplify the auxiliary air conditioning unit corresponding to the second position. Can be configured.

According to the present invention, it is possible to provide an environment forming apparatus capable of exposing a processing object housed in a processing chamber to air at a desired temperature while saving energy.

It is a block diagram which shows an example of the schematic structure of the environmental test apparatus. It is a figure which shows an example of temperature adjustment of the arrangement position of two samples. It is a flowchart which shows an example of the operation of an environmental test apparatus. It is a flowchart which shows an example of the control flow of the main air-conditioning part. It is a block diagram which shows another example of the schematic structure of the environmental test apparatus. It is a block diagram which shows another example of the schematic structure of the environmental test apparatus. It is a figure which shows an example of temperature adjustment of the arrangement position of three samples.

(overall structure)
Hereinafter, an embodiment of the environment forming apparatus according to the present invention will be described. In the present embodiment, an environmental test device will be described as an example of the environment forming device according to the present invention. FIG. 1 is a block diagram showing an example of a schematic configuration of the environmental test apparatus 1. As shown in FIG. 1, the environmental test apparatus 1 adjusts the temperature of the air supplied into the test chamber (processing chamber) 9 and the test chamber 9 capable of accommodating the two samples (processed objects) SPa and SPb. It is provided with an air-conditioning chamber 8, an operation unit 50, and a control unit 10 for performing the operation.

The partition wall 89 between the test chamber 9 and the air conditioning chamber 8 is provided with an air outlet 83 and a suction port 84. The upper wall 88 of the air conditioning chamber 8 is provided with two outlets 91a and 91b. In the test chamber 9, mounting tables (not shown) for mounting the sample are arranged at two predetermined locations different from each other. An outlet 95a is provided in the vicinity of the mounting table of the sample SPA on one side wall of the test chamber 9. An outlet 95b is provided in the vicinity of the mounting table of the sample SPb on one side wall of the test chamber 9. An air supply duct 94a is piped between the air outlet 91a and the air outlet 95a. An air supply duct 94b is piped between the air outlet 91b and the air outlet 95b.

The air conditioner room 8 is provided with an air conditioner 81 and a blower 82. The air conditioner 81 adjusts the temperature of the air in the air conditioner chamber 8 by heating or cooling the air in the air conditioner chamber 8. The heating capacity and cooling capacity of the air by the air conditioner 81 are adjusted by the control unit 10. As a result, the ability of the air conditioner 81 to adjust the temperature of the air is adjusted.

The blower 82 is arranged so as to cause air circulation between the air conditioning chamber 8 and the test chamber 9. For example, the blower 82 is arranged in the vicinity of the upper wall 88 in the air conditioning chamber 8. The blower 82 generates wind at a predetermined wind speed. The air whose temperature has been adjusted by the air conditioner 81 is blown out from the air outlet 83 into the test chamber 9 by the wind generated by the blower 82. As a result, the temperature-controlled air is supplied into the test chamber 9. That is, the air conditioner 81 and the blower 82 constitute an example of the main air conditioner according to the present invention. Hereinafter, when the air conditioner 81 and the blower 82 related to the temperature adjustment of the air supplied from the air outlet 83 into the test chamber 9 are collectively referred to, they are referred to as the main air conditioner unit 80.

As described above, by blowing air from the air conditioning chamber 8 into the test chamber 9, the air in the test chamber 9 is sucked into the air conditioning chamber 8 from the suction port 84. By repeating the circulation of air between the air conditioning chamber 8 and the test chamber 9 in this way, the temperature of the air in the test chamber 9 is adjusted.

The air whose temperature has been adjusted by the air conditioner 81 by the wind generated by the blower 82 is blown out from the air outlet 91a into the air supply duct 94a, and also from the air outlet 91b into the air supply duct 94b.

The air supply duct 94a is provided with a heater 93a and a blower 92a. The heater 93a directly heats the air in the air supply duct 94a. The heating capacity of air by the heater 93a is adjusted by the control unit 10. The blower 92a generates wind at a wind speed input by the user using the operation unit 50 described later. The wind speed of the wind generated by the blower 92a may be predetermined. The air in the air conditioning chamber 8 blown into the air supply duct 94a is guided to the heater 93a by the wind generated by the blower 92a, the temperature is adjusted by the heater 93a, and then the air is blown out from the outlet 95a into the test chamber 9. Will be done. As a result, the air whose temperature is adjusted by the heater 93a is individually supplied to the sample Spa arranged in the vicinity of the outlet 95a. That is, the heater 93a and the blower 92a constitute an example of the auxiliary air-conditioning unit individually provided with respect to the arrangement position of the sample Spa according to the present invention. Hereinafter, when the heater 93a and the blower 92a related to the temperature adjustment of the air individually supplied to the arrangement position of the sample Spa are collectively referred to, they are referred to as an auxiliary air conditioning unit 90a.

Like the air supply duct 94a, the air supply duct 94b is provided with a heater 93b and a blower 92b. Since the heater 93b and the blower 92b have the same configuration as the heater 93a and the blower 92a, detailed description thereof will be omitted. The air in the air conditioning chamber 8 blown into the air supply duct 94b is guided to the heater 93b by the wind generated by the blower 92b, the temperature is adjusted by the heater 93b, and then the air is blown out from the outlet 95b into the test chamber 9. Will be done. As a result, the air whose temperature is adjusted by the heater 93b is individually supplied to the sample SPb arranged in the vicinity of the outlet 95b. That is, the heater 93b and the blower 92b constitute an example of the auxiliary air-conditioning unit individually provided with respect to the arrangement position of the sample SPb according to the present invention. Hereinafter, when the heater 93b and the blower 92b related to the temperature adjustment of the air individually supplied to the arrangement position of the sample SPb are collectively referred to, they are referred to as an auxiliary air conditioning unit 90b.

Hereinafter, a and b in the reference code of each component indicate a subscript, and when each component is generically referred to, a reference code in which the subscript is deleted shall be used. For example, when the samples SPa and SPb are collectively referred to as the sample SP, and when the auxiliary air conditioning units 90a and 90b are collectively referred to, the auxiliary air conditioning unit 90 is referred to.

The test room 9 is further provided with a room temperature sensor TR (room temperature detection unit). The room temperature sensor TR is composed of, for example, a temperature sensor, and detects the temperature of air at a position different from the arrangement position of the two samples SPa and SPb. The room temperature sensor TR is provided, for example, in the vicinity of the air outlet 83 in the test chamber 9 and detects the temperature of the air in the vicinity of the air outlet 83. Hereinafter, the temperature of the air detected by the room temperature sensor TR is referred to as the temperature detected by the room temperature sensor TR PVT.

In the test chamber 9, further, for each of the two sample SPa and SPb placement positions, the temperature of the air at each placement position or the temperature of the sample SP in the vicinity of each placement position is detected. Temperature detection units Ta and Tb are provided separately. The temperature detection unit Ta is provided in the vicinity of the mounting table of the sample Spa. The temperature detection unit Ta is composed of, for example, a temperature sensor, and detects the temperature of air at a position near the mounting table of the sample SPA. Similarly, the temperature detection unit Tb is provided in the vicinity of the mounting table of the sample SPb. The temperature detection unit Tb is composed of, for example, a temperature sensor, and detects the temperature of air at a position near the mounting table of the sample SPb.

The temperature detection unit T is composed of, for example, a thermocouple that can be attached to the surface of each sample SP, an infrared sensor that can detect the surface temperature of each sample SP in a non-contact state with each sample SP, and the like. May be good. As a result, the temperature detection unit T may detect the surface temperature of each sample SP as the temperature of each sample SP. Alternatively, the temperature detection unit T may be configured by an internal temperature detection sensor that can be inserted into each sample SP. As a result, the temperature detection unit T may detect the temperature inside each sample SP as the temperature of each sample SP. Hereinafter, the temperature of the air detected by the temperature detection unit T or the temperature of the sample SP will be referred to as the temperature detected by the temperature detection unit T PV.

The arrangement positions of the blowers 82, 92a, 92b, the outlets 83, 91a, 91b, 95a, 95b, the suction port 84, the room temperature sensor TR, and the temperature detection units Ta, Tb are not limited to the arrangement positions shown in FIG.

The operation unit 50 receives various instructions and information inputs to the environmental test apparatus 1. The operation unit 50 includes a display device and a touch panel device (not shown).

The display device is composed of, for example, a liquid crystal display or the like, and displays various information such as an operation screen and a message of the environmental test device 1 under the control of the control unit 10. The operation screen includes an operation screen for inputting test conditions and the like. The test conditions include a target value of the temperature of the air supplied into the test chamber 9 (hereinafter, set temperature SVT), a wind speed of the wind generated in the blowers 92a and 92b, a test execution time, and the like.

The touch panel device is provided on the information display surface of the display device, and when a soft key in the operation screen displayed on the display device is operated, the touch panel device receives the input of the soft key and the instruction associated with the operation. .. The operation unit 50 is not limited to the touch panel device, and may be configured to include a keyboard, switches, and the like for inputting information.

The information input by the operation unit 50, the temperature PVT detected by the room temperature sensor TR, and the temperature PV detected by the temperature detection unit T are input to the control unit 10. The control unit 10 controls each unit included in the environmental test device 1 such as the air conditioner 81. Specifically, the control unit 10 is composed of a PLC (programmable logic controller) including a CPU, RAM, ROM, and the like. The control unit 10 controls the air conditioner 81 and the like by executing the sequence program stored in the RAM and the system program (firmware) stored in the ROM by the CPU.

Specifically, the functions of the control unit 10 include a test execution unit 15, a correction unit 11, a main adjustment unit 12, two auxiliary adjustment units 14a and 14b, and a specific unit 13.

The test execution unit 15 receives the information and instructions input by the operation unit 50, and executes the test according to the received information and instructions. The correction unit 11 corrects the adjusting ability of the air temperature adjustment performed by the main air conditioning unit 80 based on the reference temperature PV1 described later input from the specific unit 13. The master control unit 12 controls the main air conditioning unit 80 based on the temperature PVT detected by the room temperature sensor TR.

The auxiliary adjusting unit 14a controls the auxiliary air conditioning unit 90a based on the temperature PVa detected by the temperature detecting unit Ta. The auxiliary adjusting unit 14b controls the auxiliary air conditioning unit 90b based on the temperature PVb detected by the temperature detecting unit Tb.

The identification unit 13 specifies the arrangement position of the sample SP having the higher air temperature or the higher temperature as the first position among the arrangement positions of the two samples SPa and SPb. Then, the specific unit 13 causes the auxiliary adjustment unit 14 corresponding to the second position different from the specified first position to control the auxiliary air conditioning unit 90 corresponding to the second position. Here, the auxiliary air-conditioning unit 90 corresponding to the second position refers to the auxiliary air-conditioning unit 90 that adjusts the temperature of the air supplied to the second position.

(Outline of temperature adjustment of each sample SP)
Next, the outline of the temperature adjustment of each sample SP in the environmental test apparatus 1 of the present embodiment will be described. FIG. 2 is a diagram showing an example of temperature adjustment of the arrangement positions of the two sample SPs. Specifically, in the environmental test apparatus 1 of the present embodiment, the temperature of the air is adjusted by the main air conditioning unit 80 so that the temperature PVT detected by the room temperature sensor TR becomes the set temperature SVT.

At this time, for example, as shown in FIG. 2A, the temperature detection unit T corresponding to the first position specified by the specific unit 13 corresponds to the reference temperature PV1 detected and the second position different from the first position. It is assumed that the temperature PV2 detected by the temperature detection unit T is lower than the set temperature SVT. Alternatively, as shown in FIG. 2B, it is assumed that the reference temperature PV1 is higher than the set temperature SVT and the temperature PV2 is lower than the set temperature SVT. Alternatively, as shown in FIG. 2C, it is assumed that the reference temperature PV1 and the temperature PV2 are both higher than the set temperature SVT.

In these cases, in the environmental test apparatus 1 of the present embodiment, as shown by the solid arrows in FIGS. 2 (A) to 2 (C), the main air-conditioning unit 80 sets the reference temperature PV1 to the set temperature SVT. The ability to adjust the temperature of the air is corrected. Further, as shown by the broken line arrows in FIGS. 2A to 2C, the temperature of the air is adjusted by the auxiliary air conditioning unit 90 corresponding to the second position so that the temperature PV2 becomes the same as the reference temperature PV1. It is said.

(Operation of environmental test device 1)
Hereinafter, the operation of the environmental test apparatus 1 will be specifically described with reference to FIG. In the description, the details of the test execution unit 15, the correction unit 11, the main adjustment unit 12, the two auxiliary adjustment units 14a and 14b, and the specific unit 13 will also be described. FIG. 3 is a flowchart showing an example of the operation of the environmental test apparatus 1.

It is assumed that the user places the two samples SPa and SPb on a mounting table arranged at a predetermined position in the test chamber 9, and then inputs the test conditions and the test start instruction using the operation unit 50. In this case, as shown in FIG. 3, the test execution unit 15 receives the input test conditions and the test start instruction, sets the accepted test conditions, and then starts the test (step S11). Specifically, in step S11, the test execution unit 15 sets the test conditions by storing the received test conditions in the RAM. After that, the test execution unit 15 starts the test.

When the test execution unit 15 starts the test, the test execution unit 15 causes the main adjustment unit 12 to control the main air conditioning unit 80 (step S12). As a result, the temperature of the air in the air conditioning chamber 8 is adjusted by the main air conditioning unit 80, and the temperature-adjusted air is supplied into the test chamber 9 from the air outlet 83. The temperature-controlled air is individually supplied to the placement position of each sample SP through the air supply duct 94. The temperature adjustment of the air by the main air-conditioning unit 80 in step S12 is also performed based on the reference temperature PV1 detected by the temperature detection unit T corresponding to the first position, and the details will be described later.

When the control of the main air-conditioning unit 80 is started, the specific unit 13 specifies the auxiliary air-conditioning unit 90 to be operated (step S13).

Specifically, in step S13, the specific unit 13 first determines the arrangement position of the sample SP corresponding to the temperature detection unit T that has detected the highest temperature among the two temperature detection units Ta and Tb. Specify as a position. At this time, as shown in FIG. 1, the specific unit 13 outputs the temperature PV detected by the temperature detection unit T corresponding to the first position to the correction unit 11 as the reference temperature PV1. The reference temperature PV1 is used when the correction unit 11 corrects the adjusting ability of the temperature adjustment by the main air conditioning unit 80. Then, the identification unit 13 specifies the arrangement position of the sample SP different from the first position among the arrangement positions of the two samples SPa and SPb as the second position, and the air supplied to the specified second position. The auxiliary air-conditioning unit 90 that adjusts the temperature of the above is specified as the auxiliary air-conditioning unit 90 to be worked.

For example, in step S13, when the temperature PVa detected by the temperature detection unit Ta is higher than the temperature PVb detected by the temperature detection unit Tb (PVa> PVb), the identification unit 13 specifies the arrangement position of the sample SPA as the first position. Then, the temperature PVa detected by the temperature detection unit Ta corresponding to the arrangement position of the sample SPA is output to the correction unit 11 as the reference temperature PV1. Then, the specifying unit 13 specifies the arrangement position of the sample SPb as the second position, and specifies the auxiliary air-conditioning unit 90b corresponding to the arrangement position of the sample SPb as the auxiliary air-conditioning unit 90 to be operated.

Next, the specific unit 13 sets a parameter indicating the adjusting ability of the air temperature adjustment to be performed by the auxiliary air conditioning unit 90 of the operation target specified in step S13 (step S14). In the present embodiment, the parameter indicating the adjustment ability is an individually set temperature SV (for example, SVb) indicating a target value of the temperature of the air individually supplied to the second position by the auxiliary air conditioning unit 90 (for example, 90b) to be operated. Suppose that

Specifically, in step S14, the specific unit 13 sets the reference temperature PV1 (for example, PVa) output to the correction unit 11 in step S13 as the individually set temperature SV (for example, SVb), and sets the operation target auxiliary air conditioning unit 90 (for example, PVa). For example, it is output to the auxiliary adjustment unit 14 (for example, 14b) corresponding to 90b). As a result, the specific unit 13 sets the individually set temperature SV (for example, SVb) in the auxiliary adjustment unit 14 (for example, 14b).

When the parameter indicating the adjustment ability is set, the auxiliary adjustment unit 14 corresponding to the auxiliary air-conditioning unit 90 of the operation target specified in step S13 controls the auxiliary air-conditioning unit 90 of the operation target (step S15). ..

Specifically, in step S15, the auxiliary adjusting unit 14 (for example, 14b) corresponding to the auxiliary air conditioning unit 90 (for example, 90b) to be operated performs the so-called PID control to perform the so-called PID control, and the temperature detecting unit corresponding to the second position. Auxiliary operation target so that the detection temperature PV (for example, PVb) by T (for example, Tb) becomes the same as the individually set temperature SV (for example, SVb) (= reference temperature PV1 (for example, PVa)) set in step S14. The heating capacity of the heater 93 (for example, 93b) included in the air conditioning unit 90 (for example, 90b) is adjusted.

Further, the auxiliary adjusting unit 14 (for example, 14b) corresponding to the auxiliary air-conditioning unit 90 (for example, 90b) to be operated is included in the test conditions stored in the RAM, and the auxiliary air-conditioning unit 90 (for example, 90b) to be operated is included. ), The wind speed of the wind generated by the blower 92 (for example, 92b) is referred to. Then, the auxiliary adjusting unit 14 (for example, 14b) causes the blower 92 (for example, 92b) to generate wind at the referenced wind speed while adjusting the heating capacity of the heater 93 (for example, 93b).

When the control of the auxiliary air conditioning unit 90 is started, the test execution unit 15 determines whether or not to end the test being executed (step S16). Specifically, in step S16, the test execution unit 15 is included in the test conditions set in step S11 from the time when the correction unit 11 and the main adjustment unit 12 start the control of the main air conditioning unit 80 in step S12. If the test execution time has elapsed, it is determined that the test is completed. In other cases, it is determined that the test is not completed.

When the test execution unit 15 determines that the test is completed in step S16 (YES in step S16), the test execution unit 15 causes the main adjustment unit 12 to end the control of the main air conditioning unit 80. Further, the test execution unit 15 outputs an instruction to end the control of the auxiliary air conditioning unit 90 during operation to the specific unit 13. The specific unit 13 receives the instruction and causes the auxiliary adjusting unit 14 corresponding to the operating auxiliary air-conditioning unit 90 to end the control of the auxiliary air-conditioning unit 90 (step S18). As a result, the test execution unit 15 ends the test.

On the other hand, when the test execution unit 15 determines that the test is not completed in step S16 (NO in step S16), whether or not a predetermined time has elapsed from the time when the control of the auxiliary air conditioning unit 90 is started in step S15. Is determined (step S17).

When the test execution unit 15 determines that a predetermined time has not elapsed since the control of the auxiliary air conditioning unit 90 was started in step S15 (NO in step S17), the test execution unit 15 repeats the processes after step S16. As a result, the temperature adjustment of the air by the auxiliary air conditioning unit 90 started in step S15 is continued for the predetermined time until the test is completed.

On the other hand, when it is determined that a predetermined time has elapsed from the time when the control of the auxiliary air conditioning unit 90 is started in step S15 (YES in step S17), the test execution unit 15 causes the processing after step S13 to be performed. As a result, the auxiliary air-conditioning unit 90 to be operated is re-specified, and the specified auxiliary air-conditioning unit 90 is controlled.

(Details of control of main air conditioning unit 80)
Next, the details of the control of the main air conditioning unit 80 in step S12 will be described. FIG. 4 is a flowchart showing an example of the control flow of the main air conditioning unit 80.

When the test is started by the test execution unit 15, as shown in FIG. 4, parameters indicating the adjusting ability of the air temperature adjustment to be performed by the main air conditioning unit 80 are set (step S21). In the present embodiment, the parameter indicating the adjusting ability is assumed to be a set temperature SVT indicating a target value of the temperature of the air supplied into the test chamber 9 by the main air conditioning unit 80.

Specifically, in step S21, the test execution unit 15 outputs the set temperature SVT included in the test conditions stored in the RAM in step S11 to the correction unit 11. As a result, the set temperature SVT is set in the correction unit 11. Further, the correction unit 11 outputs the set temperature SVT input from the test execution unit 15 to the main adjustment unit 12. As a result, the set temperature SVT is set in the master control unit 12.

When the setting of the parameter indicating the adjustment ability is completed, the main adjustment unit 12 starts the control of the main air conditioning unit 80 (step S22).

Specifically, in step S22, the main adjusting unit 12 performs so-called PID control so that the temperature PVT detected by the room temperature sensor TR becomes the same as the set temperature SVT set in step S21. Adjust the heating capacity or cooling capacity of. Further, the master control unit 12 causes the blower 82 to generate a wind having a predetermined wind speed while adjusting the heating capacity or the cooling capacity of the air conditioner 81.

When the control of the main air-conditioning unit 80 is started, the correction unit 11 sets a parameter indicating the adjustment ability of the air temperature adjustment by the main air-conditioning unit 80 based on the reference temperature PV1 input from the specific unit 13 in step S13. Correct (step S23).

Specifically, in step S23, the correction unit 11 adjusts the temperature adjustment of the air to be performed by the main air conditioning unit 80 set in step S21 based on the reference temperature PV1 input from the specific unit 13. The set temperature SVT, which is the indicated parameter, is corrected. Then, the correction unit 11 outputs the corrected set temperature RSVT to the main adjustment unit 12.

For example, in step S23, the correction unit 11 calculates the difference between the set temperature SVT and the reference temperature PV1 by subtracting the reference temperature PV1 input from the specific unit 13 from the set set temperature SVT. .. Then, when the difference shows a positive value, the correction unit 11 improves the heating capacity of the air conditioner 81 included in the main air conditioner unit 80 so that the reference temperature PV1 becomes the same as the set temperature SVT. The larger the absolute value of the difference, the higher the set temperature SVT is corrected.

On the other hand, when the difference shows a negative value, the correction unit 11 improves the cooling capacity of the air conditioner 81 included in the main air conditioner unit 80 so that the reference temperature PV1 becomes the same as the set temperature SVT. The larger the absolute value of the difference, the lower the set temperature SVT is corrected.

After step S23, the master control unit 12 determines that the temperature PVT detected by the room temperature sensor TR and the corrected set temperature RSVT input from the correction unit 11 are the same as those of the air performed by the main air conditioning unit 80. The adjustment ability of the temperature adjustment is corrected (step S24).

Specifically, it is assumed that the temperature PVT detected by the room temperature sensor TR in step S24 is lower than the corrected set temperature RSVT input from the correction unit 11 in step S23. In this case, the master control unit 12 performs so-called PID control so that the temperature PVT detected by the room temperature sensor TR becomes the same as the corrected set temperature RSVT input from the correction unit 11 in step S23. Adjust the adjustment capability of the machine 81.

On the other hand, it is assumed that the temperature PVT detected by the room temperature sensor TR is higher than the corrected set temperature RSVT input from the correction unit 11 in step S23. In this case, the master control unit 12 performs so-called PID control so that the temperature PVT detected by the room temperature sensor TR becomes the same as the corrected set temperature RSVT input from the correction unit 11 in step S23. Adjust the adjustment capability of the machine 81.

After step S24, the processes after step S23 are repeated.

As described above, in the configuration of the present embodiment, the temperature of the air is adjusted by the main air-conditioning unit 80 based on the temperature PVT detected by the room temperature sensor TR. Therefore, the temperature of the air at a position different from that of the room temperature sensor TR and the temperature of the sample (for example, sample Spa) in the vicinity of the position may not be adjusted to a desired temperature.

However, in the configuration of the present embodiment, the adjusting ability of the air temperature adjustment performed by the main air conditioning unit 80 is further controlled by the temperature detection unit T (for example, Ta) corresponding to the first position to detect the temperature PV (for example, PVa). It is corrected based on the reference temperature PV1 which is. Therefore, the temperature of the air supplied into the test chamber 9 can be corrected to the temperature of the air at the first position or the temperature based on the temperature of the sample SP in the vicinity of the first position. Thereby, the temperature of the air supplied into the test chamber 9 can be adjusted to the temperature based on the temperature of the air at the first position or the temperature of the sample SP in the vicinity of the first position.

On the other hand, the temperature of the air individually supplied to the second position different from the first position is determined by the auxiliary air conditioning unit 90 (for example, 90b) corresponding to the second position and the temperature detection unit T (for example, 90b) corresponding to the second position. The temperature is adjusted based on the temperature detected by Tb) PV (for example, PVb). Therefore, the temperature of the air individually supplied to the second position is set to the temperature of the air at the second position or the temperature of the air at the second position without operating the auxiliary air conditioning unit 90 (for example, 90a) corresponding to the first position. The temperature can be adjusted based on the temperature of the sample SP in the vicinity.

Therefore, according to the configuration of the present embodiment, energy saving can be achieved as compared with the case where the main air-conditioning unit 80 and all the auxiliary air-conditioning units 90 are operated. Further, it is possible to supply air adjusted to a temperature based on the temperature of the air at each position or the temperature of the sample SP in the vicinity of each position to a plurality of positions in the test chamber 9. As a result, the sample SP can be exposed to air at a desired temperature at a plurality of positions in the test chamber 9.

In the configuration of the present embodiment, the temperature of the air at the second position or the temperature of the sample SP near the second position is the temperature of the air at the first position or the temperature of the sample SP near the first position. The temperature of the air is adjusted by the auxiliary air-conditioning unit 90 corresponding to the second position so that the temperature becomes the same as the reference temperature PV1. Therefore, the two sample SPs arranged at the first position and the second position can be exposed to air having the same temperature.

In the configuration of the present embodiment, the adjusting ability of the air temperature adjustment performed by the main air conditioning unit 80 is corrected so that the reference temperature PV1 becomes the set temperature SVT. Therefore, the temperature of the air at the second position or the temperature PV2 of the sample SP in the vicinity of the second position is set so as to follow the change so that the reference temperature PV1 becomes the same as the set temperature SVT. It can be changed to be the same as the temperature SVT. As a result, the two sample SPs arranged at the first position and the second position can be exposed to the air having the set temperature SVT.

Further, in the configuration of the present embodiment, among the two temperature detection units Ta and Tb corresponding to the arrangement positions of the two samples SPa and SPb, the arrangement corresponding to the temperature detection unit T that has detected the highest temperature. The position is specified as the first position. That is, the temperature of the air at the first position or the temperature of the sample SP near the first position is higher than the temperature of the air at the second position or the temperature of the sample SP near the second position. Further, the temperature PV (for example, PVb) detected by the temperature detection unit T (for example, Tb) corresponding to the second position is the same as the temperature PV (for example, PVa) detected by the temperature detection unit T (for example, Ta) corresponding to the first position. The temperature of the air is adjusted by the auxiliary air-conditioning unit 90 (for example, 90b) corresponding to the second position.

Therefore, the temperature of the air individually supplied to the second position is adjusted by the auxiliary air conditioning unit 90 corresponding to the second position without adjusting the temperature of the air individually supplied to the second position. Only the adjustment to raise it can be made. Therefore, as shown in FIG. 1, the second position is provided with at least an adjustable heater 93 that raises the temperature of the air, without providing an adjustable cooler that lowers the temperature of the air. The corresponding auxiliary air conditioning unit 90 can be simply configured.

Further, in the configuration of the present embodiment, the auxiliary air conditioning unit 90 is configured to include a heater 93 that directly heats the air. Therefore, since the air is directly heated by the heater 93 corresponding to the second position, the temperature of the air individually supplied to the second position can be rapidly raised.

(Modified Embodiment)
It should be noted that the above embodiment is merely an example of the embodiment according to the present invention, and does not mean that the present invention is limited to the above embodiment. For example, it may be a modified embodiment shown below.

(1) As shown in FIG. 5, the control unit 10 may be configured to include a cascade regulator 16 having a primary regulator 161 and a secondary regulator 162.

The primary controller 161 is set with the first measurement value input unit 1611 in which the reference temperature PV1 which is the temperature of the air at the first position or the temperature of the sample SP near the first position is input as the measurement value on the primary side. A first set value input unit 1612, in which the temperature SVT is input as a set value on the primary side, is provided. Then, the primary controller 161 corrects the set temperature SVT according to the difference between the reference temperature PV1 which is the measured value on the primary side and the set temperature SVT which is the set value on the primary side, and corrects the set temperature SVT after the correction. Is output as the output value of the primary controller 161. That is, the primary regulator 161 together with the above-mentioned correction unit 11 (FIG. 1) that corrects the adjustment ability of the air temperature adjustment performed by the main air-conditioning unit 80 based on the reference temperature PV1 input from the specific unit 13. Works in the same way.

The secondary controller 162 has a secondary measurement value input unit 1621 in which the temperature PVT detected by the room temperature sensor TR is input as a measurement value on the secondary side, and a corrected set temperature RSVT which is an output value of the primary controller 161. A second set value input unit 1622, which is input as a set value on the secondary side, is provided. Then, in the secondary controller 162, the main air-conditioning unit 80 controls the air so that the detected temperature PVT, which is the measured value on the secondary side, becomes the same as the corrected set temperature RSVT, which is the set value on the secondary side. Have the temperature adjusted. That is, the secondary controller 162 functions in the same manner as the above-mentioned master control unit 12 (FIG. 1) that controls the main air conditioning unit 80 based on the temperature PVT detected by the room temperature sensor TR.

According to this configuration, when the reference temperature PV1 which is the temperature of the air at the first position or the temperature of the sample SP near the first position matches the set temperature SVT, the primary controller 161 is set to the first position. Since there is no difference between the temperature of the air or the temperature of the sample SP in the vicinity of the first position and the set temperature SVT, the set temperature SVT is not corrected and the set temperature SVT is output as the output value of the primary controller 161. In this case, the secondary controller 162 causes the main air-conditioning unit 80 to adjust the temperature of the air so that the temperature PVT detected by the room temperature sensor TR becomes the same as the set temperature SVT which is the output value of the primary controller 161. Thereby, the temperature of the air supplied into the test chamber 9 can be adjusted so that the temperature PVT detected by the room temperature sensor TR becomes the same as the set temperature SVT.

On the other hand, when the reference temperature PV1 which is the temperature of the air at the first position or the temperature of the sample near the first position is different from the set temperature SVT, the primary controller 161 is the temperature of the air at the first position or the first position. The set temperature SVT is corrected according to the difference between the temperature of the sample SP in the vicinity of and the set temperature SVT, and the corrected set temperature RSVT is output. In this case, the secondary controller 162 causes the main air-conditioning unit 80 to adjust the temperature of the air so that the temperature PVT detected by the room temperature sensor TR becomes the same as the set temperature RSVT after the correction.

As a result, when the temperature of the air at the first position or the temperature of the sample SP near the first position is different from the set temperature SVT, the primary controller 161 is set to the temperature of the air at the first position or near the first position. Instead of correcting the temperature of the air at the outlet 83 according to the difference between the temperature of a certain sample SP and the set temperature SVT, the set temperature SVT can be corrected according to the difference. In accordance with this, in the secondary regulator 162, instead of having the main air conditioner 80 adjust the temperature of the air at the air outlet 83 after the correction so that the temperature of the air at the air outlet 83 becomes the same as the set temperature SVT, the air outlet is adjusted. The temperature of the air can be adjusted by the main air conditioning unit 80 so that the temperature of the air in the 83 becomes the same as the set temperature RSVT corrected by the primary controller 161.

Therefore, according to this configuration, the temperature of the air can be adjusted so that the temperature of the air at the first position or the temperature of the sample SP in the vicinity of the first position becomes the same as the set temperature SVT.

(2) As shown in FIG. 6, the room temperature sensor TR may not be provided in the test chamber 9 so that the control unit 10 does not function as the correction unit 11. Then, the specific unit 13 may output the reference temperature PV1 which is the temperature PV detected by the temperature detection unit T corresponding to the first position to the master control unit 12. Then, the main air-conditioning unit 80 may be controlled by the main air-conditioning unit 12 so that the main air-conditioning unit 80 adjusts the temperature of the air supplied into the test chamber 9 so that the reference temperature PV1 becomes the same as the set temperature SVT. ..

In this configuration, the temperature of the air is adjusted by the main air conditioning unit 80 based on the reference temperature PV1 which is the detection temperature PV by the temperature detection unit T corresponding to the first position, so that the air supplied to the test chamber 9 is adjusted. The temperature can be adjusted to a temperature based on the temperature of the air at the first position or the temperature of the sample SP in the vicinity of the first position.

On the other hand, the temperature of the air individually supplied to the second position different from the first position is based on the temperature PV detected by the temperature detection unit T corresponding to the second position by the auxiliary air conditioning unit 90 corresponding to the second position. The temperature is adjusted. Therefore, the temperature of the air individually supplied to the second position is set to the temperature of the air at the second position or the sample SP in the vicinity of the second position without operating the auxiliary air conditioning unit 90 corresponding to the first position. It can be adjusted to a temperature based on the temperature of.

Therefore, according to this configuration, energy saving can be achieved as compared with the case where the main air-conditioning unit 80 and all the auxiliary air-conditioning units 90 are operated. Further, it is possible to supply air adjusted to a temperature based on the temperature of the air at each position or the temperature of the sample SP in the vicinity of each position to a plurality of positions in the test chamber 9. As a result, the sample SP can be exposed to air at a desired temperature at a plurality of positions in the test chamber 9.

In this configuration, the temperature of the air at the second position or the temperature of the sample SP near the second position is the reference temperature PV1 which is the temperature of the air at the first position or the temperature of the sample SP near the first position. The temperature of the air is adjusted by the auxiliary air-conditioning unit 90 corresponding to the second position so as to be the same. Therefore, the two sample SPs arranged at the first position and the second position can be exposed to air having the same temperature.

(3) The number of sample SPs that can be accommodated in the test chamber 9 is not limited to two. A mounting table for arranging three or more sample SPs may be provided in the test chamber 9. In accordance with this, the outlet 95 similar to the outlets 95a and 95b and the temperature detection unit T similar to the temperature detection units Ta and Tb may be provided in the vicinity of the mounting table of each sample SP on the side wall of the test chamber 9. good. Then, on the upper wall 88 and the like of the air conditioning chamber 8, as with the outlets 91a and 91b, the same number of outlets 91 as the number of sample SPs that can be accommodated in the test chamber 9 are provided, and each outlet 91 and the test chamber 9 are provided. An air supply duct 94 similar to the air supply ducts 94a and 94b may be piped between the air outlets 95 and the air outlets 95 provided in the above. Then, each of the air supply ducts 94 piped may be provided with the heaters 93a and 93b and the same heaters 93 and blowers 92 as the blowers 92a and 92b. In this way, the environmental test apparatus 1 may be provided with the same number of auxiliary air-conditioning units 90 as the number of sample SPs that can be accommodated in the test chamber 9, similar to the auxiliary air-conditioning units 90a and 90b.

In this case, the control unit 10 functions as the auxiliary adjustment unit 14 as many as the number of sample SPs that can be accommodated in the test chamber 9, like the auxiliary adjustment units 14a and 14b, and each auxiliary adjustment unit 14 functions as each auxiliary air conditioning unit. The unit 90 may be controlled individually. In line with this, in step S13, the number of sample SPs that can be accommodated in the test chamber 9 by the specific unit 13 corresponding to the arrangement position of the same number of sample SPs that can be accommodated in the test chamber 9. The arrangement position of the sample SP corresponding to the temperature detection unit T that has detected the highest temperature among the detection temperature PVs detected by the same number of temperature detection units T as the above may be specified as the first position. Then, the identification unit 13 specifies the arrangement position of the plurality of sample SPs different from the first position as the second position, and adjusts the temperature of the air supplied to the specified second position. 90 may be specified as the auxiliary air-conditioning unit 90 to be worked.

FIG. 7 is a diagram showing an example of temperature adjustment of the arrangement positions of the three sample SPs. For example, in this configuration, it is assumed that the number of sample SPs that can be accommodated in the test chamber 9 is three. Then, when the temperature of the air is adjusted by the main air conditioning unit 80 so that the temperature PVT detected by the room temperature sensor TR becomes the set temperature SVT, the temperature of the air at the first position or the vicinity of the first position is obtained. The reference temperature PV1 which is the temperature of the sample SP and the temperature of the air at the two second positions or the temperatures PV2a and PV2b of the two sample SPs in the vicinity of the two second positions are shown in FIG. 7 (A). As shown by the black circles in (C), it is assumed that the set temperature is different from the SVT.

FIG. 7A shows the reference temperature PV1, the temperature of the air at the second position of the one, the temperature PV2b of the sample SP in the vicinity of the second position of the one, and the temperature of the air at the other second position. It is shown that the temperature PV2a of the sample SP in the vicinity of the other second position is lower than the set temperature SVT. FIG. 7B shows that the reference temperature PV1 is higher than the set temperature SVT, and the temperature PV2b and the temperature PV2a are lower than the set temperature SVT. FIG. 7C shows that the reference temperature PV1, the temperature PV2b, and the temperature PV2a are all higher than the set temperature SVT.

In these cases, in this configuration, as shown by the solid arrows in FIGS. 7A to 7C, the temperature of the air is adjusted by the main air conditioning unit 80 so that the reference temperature PV1 becomes the set temperature SVT. The adjustment ability of is corrected. Further, as shown by the dashed arrows in FIGS. 7A to 7C, the temperature of the air at the two second positions or the temperature PV2a of the two sample SPs in the vicinity of the two second positions. , PV2b is the same as the reference temperature PV1, and the temperature of the air is adjusted by the auxiliary air-conditioning unit 90 corresponding to each second position.

Therefore, the temperature of the air at the two second positions or the vicinity of the two second positions is followed by following the change of the reference temperature PV1 so as to be the same as the set temperature SVT. The temperatures PV2a and PV2b of the sample SP can be changed so as to be the same as the set temperature SVT. As a result, the three sample SPs arranged at the first position and the two second positions can be exposed to the air at the set temperature SVT.

(4) The auxiliary air conditioning unit 90 may be provided with a heater such as a heat exchanger capable of heating the air in the air supply duct 94 instead of the heater 93.

(5) In the configurations of the above-described embodiment and the modified embodiment, in step S13, the specific unit 13 has one of the same number of temperature detection units T detected by the temperature detection unit T as the number of sample SPs that can be accommodated in the test chamber 9. The placement position of the sample SP corresponding to the temperature detection unit T that detected the highest temperature was specified as the first position. However, the method in which the specific unit 13 specifies the first position in step S13 is not limited to this.

For example, in step S13, the temperature detection in which the specific unit 13 detects the temperature closest to a predetermined value such as the average value of the detection temperature PV by the temperature detection unit T having the same number of sample SPs that can be accommodated in the test chamber 9. The arrangement position of the sample SP corresponding to the part T may be specified as the first position. In line with this, the auxiliary air conditioning unit 90 may be provided with not only a heater such as a heater 93 but also a cooler capable of cooling the air in the air supply duct 94. In this case, in step S15, the auxiliary adjusting unit 14 that controls the auxiliary air conditioning unit 90 performs so-called PID control, so that the temperature PV detected by the temperature detecting unit T corresponding to the second position is set in step S14. The heating capacity of the heater 93 and / or the cooling capacity of the cooler included in the auxiliary air-conditioning unit 90 to be operated may be adjusted so as to be the same as the individually set temperature SV (= reference temperature PV1).

Alternatively, in step S13, the specific unit 13 corresponds to the temperature detection unit T that detects the lowest temperature among the temperature detection units T detected by the temperature detection unit T as many as the number of sample SPs that can be accommodated in the test chamber 9. The placement position of the sample SP to be used may be specified as the first position. In line with this, the auxiliary air conditioning unit 90 may be provided with a cooler capable of cooling the air in the air supply duct 94 instead of the heater 93 or the like. In this case, in step S15, the auxiliary adjusting unit 14 that controls the auxiliary air conditioning unit 90 performs so-called PID control, so that the temperature PV detected by the temperature detecting unit T corresponding to the second position is set in step S14. The cooling capacity of the cooler included in the auxiliary air-conditioning unit 90 to be operated may be adjusted so as to be the same as the individually set temperature SV (= reference temperature PV1).

(6) In the configurations of the above-described embodiment and the modified embodiment, the outlet 95 and the temperature detection unit Ta, which are the same as the outlets 95a and 95b, are located in the vicinity of the mounting table where each sample SP is arranged in the test chamber 9. An example has been described in which a temperature detection unit T similar to Tb is provided, and an auxiliary air conditioning unit 90a and 90b similar to the auxiliary air conditioning unit 90a and 90b for supplying temperature-adjusted air are provided at the arrangement position of each sample SP. However, regardless of the arrangement position of the sample SP that can be accommodated in the test chamber 9, the outlet 95 similar to the outlet 95a and 95b and the temperature detection units Ta and Tb are located at a plurality of positions in the test chamber 9. A temperature detection unit T may be provided. In accordance with this, auxiliary air-conditioning units 90 similar to the auxiliary air-conditioning units 90a and 90b for supplying temperature-controlled air may be provided at the plurality of positions.

In this case, for example, by arranging only one large sample SP in the test chamber 9 and performing the above-mentioned control, the temperature of the air supplied into the test chamber 9 by the main air conditioning unit 80 is adjusted to the set temperature. It is possible to supply air whose temperature has been adjusted to a set temperature by a plurality of auxiliary air conditioning units 90 from a plurality of outlets 95 to the large sample SP. As a result, the large sample SP can be uniformly exposed to air at a set temperature. Further, by providing the air outlet 95, the temperature detection unit T, and the auxiliary air conditioning unit 90, which are smaller than the number of sample SPs, and performing the above-mentioned control, it is possible to expose a plurality of sample SPs to uniformly temperature-controlled air. ..

Further, in the above-described embodiment and the modified embodiment, the environment-forming device 1 has been described as an example of the environment-forming device according to the present invention. It can also be applied to an apparatus for uniformly treating a treatment object by supplying temperature-controlled air to the treatment object in the treatment chamber.

1 Environmental test equipment (environment formation equipment)
8 Air-conditioning room 9 Test room (processing room)
10 Control unit 11 Correction unit 12 Main adjustment unit 13 Specific unit 14, 14a, 14b Auxiliary adjustment unit 15 Test execution unit 16 Cascade adjuster 50 Operation unit 80 Main air conditioning unit 81 Air conditioner 82 Blower 83 Air outlet 84 Suction port 88 Upper wall 89 Partition wall 90, 90a, 90b Auxiliary air conditioning unit 91, 91a, 91b Air outlet 92, 92a, 92b Blower 93, 93a, 93b Heater 94, 94a, 94b Air supply duct 95, 95a, 95b Air outlet 161 Primary regulator 162 Secondary controller 1611 1st measured value input unit 1612 1st set value input unit 1621 2nd measured value input unit 1622 2nd set value input unit PV, PVa, PVb Temperature detected by temperature detector PVT Room temperature detected by sensor Temperature detected by the room temperature detector)
PV1 Reference temperature PVR measured value RSVT Corrected set temperature SVT Set temperature SV Individual set temperature SP, Spa, SPb Sample (processed object)
T, Ta, Tb temperature detector TR room temperature sensor (room temperature detector)

Claims (6)

A processing room that can accommodate processing objects and
A main air-conditioning unit that adjusts the temperature of the air and supplies the temperature-adjusted air to the processing chamber.
An auxiliary air-conditioning unit that is individually provided for each of the plurality of positions in the processing chamber, adjusts the temperature of the air, and supplies the temperature-adjusted air to each position.
A room temperature detector that detects the temperature of the air at positions different from the plurality of positions,
A temperature detection unit that is individually provided for each of the plurality of positions and detects the temperature of air or the temperature of the object to be processed at each position.
Based on the temperature detected by the room temperature detection unit, while adjusting the temperature of the air by the main air conditioning unit, the temperature detected by the temperature detection unit corresponding to the second position different from the first position among the plurality of positions Based on this, the temperature of the air is adjusted by the auxiliary air-conditioning unit corresponding to the second position, and the temperature adjustment ability of the air performed by the main air-conditioning unit is further adjusted to the temperature corresponding to the first position. A control unit that corrects based on the temperature detected by the detection unit,
With
The first position is a position corresponding to the temperature detection unit that has detected the highest temperature among the plurality of temperature detection units, or a position corresponding to the temperature detection unit that has detected the lowest temperature.
The control unit corresponds to the second position so that the temperature detected by the temperature detection unit corresponding to the second position is the same as the temperature detected by the temperature detection unit corresponding to the first position. An environment forming device that adjusts the temperature of air by the auxiliary air conditioning unit. A processing room that can accommodate processing objects and
A main air-conditioning unit that adjusts the temperature of the air and supplies the temperature-adjusted air to the processing chamber.
An auxiliary air-conditioning unit that is individually provided for each of the plurality of positions in the processing chamber, adjusts the temperature of the air, and supplies the temperature-adjusted air to each position.
A room temperature detector that detects the temperature of the air at positions different from the plurality of positions,
A temperature detection unit that is individually provided for each of the plurality of positions and detects the temperature of air or the temperature of the object to be processed at each position.
Based on the temperature detected by the room temperature detection unit, while adjusting the temperature of the air by the main air conditioning unit, the temperature detected by the temperature detection unit corresponding to the second position different from the first position among the plurality of positions Based on this, the temperature of the air is adjusted by the auxiliary air-conditioning unit corresponding to the second position, and the temperature adjustment ability of the air performed by the main air-conditioning unit is further adjusted to the temperature corresponding to the first position. A control unit that corrects based on the temperature detected by the detection unit,
With
The first position is a position corresponding to the temperature detection unit that has detected the temperature closest to the predetermined value among the plurality of temperature detection units.
The control unit corresponds to the second position so that the temperature detected by the temperature detection unit corresponding to the second position is the same as the temperature detected by the temperature detection unit corresponding to the first position. An environment forming device that adjusts the temperature of air by the auxiliary air conditioning unit. The control unit includes a cascade regulator having a primary regulator and a secondary regulator.
The primary regulator is
The first measurement value input unit in which the temperature detected by the temperature detection unit corresponding to the first position is input as the measurement value on the primary side, and the set temperature of the air supplied to the processing chamber are input as the setting value on the primary side. The set temperature is corrected according to the difference between the measured value on the primary side and the set value on the primary side, and the set temperature after the correction is adjusted to the primary. Output as the output value of the device,
The secondary regulator is
A second measurement value input unit in which the temperature detected by the room temperature detection unit is input as a measurement value on the secondary side, and a second setting value input unit in which the output value of the primary regulator is input as a setting value on the secondary side. The environment forming apparatus according to claim 1 or 2, wherein the temperature of the air is adjusted by the main air-conditioning unit so that the measured value on the secondary side becomes the same as the set value on the secondary side. .. The environment forming device according to any one of claims 1 to 3, wherein the auxiliary air conditioning unit includes a heater that directly heats air. A processing room that can accommodate processing objects and
A main air-conditioning unit that adjusts the temperature of the air and supplies the temperature-adjusted air to the processing chamber.
An auxiliary air-conditioning unit that is individually provided for each of the plurality of positions in the processing chamber, adjusts the temperature of the air, and supplies the temperature-adjusted air to each position.
A temperature detection unit that is individually provided for each of the plurality of positions and detects the temperature of air or the temperature of the object to be processed at each position.
Based on the temperature detected by the temperature detection unit corresponding to the first position among the plurality of positions, the temperature of the air is adjusted by the main air conditioning unit without operating the auxiliary air conditioning unit corresponding to the first position. At the same time, the temperature of the air is adjusted by the auxiliary air-conditioning unit corresponding to the second position based on the temperature detected by the temperature detection unit corresponding to the second position different from the first position among the plurality of positions. Control unit and
An environment forming device equipped with. A processing room that can accommodate processing objects and
A main air-conditioning unit that adjusts the temperature of the air and supplies the temperature-adjusted air to the processing chamber.
An auxiliary air-conditioning unit that is individually provided for each of the plurality of positions in the processing chamber, adjusts the temperature of the air, and supplies the temperature-adjusted air to each position.
A temperature detection unit that is individually provided for each of the plurality of positions and detects the temperature of air or the temperature of the object to be processed at each position.
Based on the temperature detected by the temperature detection unit corresponding to the first position among the plurality of positions, the temperature of the air is adjusted by the main air conditioning unit, and the position is different from the first position among the plurality of positions. A control unit that adjusts the temperature of the air by the auxiliary air conditioning unit corresponding to the second position based on the temperature detected by the temperature detection unit corresponding to the two positions.
With
The first position is a position corresponding to the temperature detection unit that has detected the highest temperature among the plurality of temperature detection units, and the temperature detection that has detected the lowest temperature among the plurality of temperature detection units. It is a position corresponding to the unit or a position corresponding to the temperature detection unit that has detected the temperature closest to a predetermined value among the plurality of temperature detection units.
The control unit corresponds to the second position so that the temperature detected by the temperature detection unit corresponding to the second position is the same as the temperature detected by the temperature detection unit corresponding to the first position. The temperature of the air is adjusted by the auxiliary air conditioning unit.
Environmental forming apparatus.

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