JP6894760B2 - 光電変換装置及び撮像システム - Google Patents

光電変換装置及び撮像システム Download PDF

Info

Publication number
JP6894760B2
JP6894760B2 JP2017098194A JP2017098194A JP6894760B2 JP 6894760 B2 JP6894760 B2 JP 6894760B2 JP 2017098194 A JP2017098194 A JP 2017098194A JP 2017098194 A JP2017098194 A JP 2017098194A JP 6894760 B2 JP6894760 B2 JP 6894760B2
Authority
JP
Japan
Prior art keywords
photoelectric conversion
impurity diffusion
electrode layer
diode
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2017098194A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018195977A (ja
JP2018195977A5 (https=
Inventor
和昭 田代
和昭 田代
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2017098194A priority Critical patent/JP6894760B2/ja
Priority to US15/976,399 priority patent/US10630923B2/en
Publication of JP2018195977A publication Critical patent/JP2018195977A/ja
Publication of JP2018195977A5 publication Critical patent/JP2018195977A5/ja
Application granted granted Critical
Publication of JP6894760B2 publication Critical patent/JP6894760B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/02Control of position or course in two dimensions
    • G05D1/021Control of position or course in two dimensions specially adapted to land vehicles
    • G05D1/0231Control of position or course in two dimensions specially adapted to land vehicles using optical position detecting means
    • G05D1/0246Control of position or course in two dimensions specially adapted to land vehicles using optical position detecting means using a video camera in combination with image processing means
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/60Noise processing, e.g. detecting, correcting, reducing or removing noise
    • H04N25/63Noise processing, e.g. detecting, correcting, reducing or removing noise applied to dark current
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/77Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/78Readout circuits for addressed sensors, e.g. output amplifiers or A/D converters
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/813Electronic components shared by multiple pixels, e.g. one amplifier shared by two pixels
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • H10D8/20Breakdown diodes, e.g. avalanche diodes
    • H10D8/25Zener diodes 

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Electromagnetism (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP2017098194A 2017-05-17 2017-05-17 光電変換装置及び撮像システム Active JP6894760B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2017098194A JP6894760B2 (ja) 2017-05-17 2017-05-17 光電変換装置及び撮像システム
US15/976,399 US10630923B2 (en) 2017-05-17 2018-05-10 Photoelectric conversion apparatus and imaging system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017098194A JP6894760B2 (ja) 2017-05-17 2017-05-17 光電変換装置及び撮像システム

Publications (3)

Publication Number Publication Date
JP2018195977A JP2018195977A (ja) 2018-12-06
JP2018195977A5 JP2018195977A5 (https=) 2020-08-06
JP6894760B2 true JP6894760B2 (ja) 2021-06-30

Family

ID=64272191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017098194A Active JP6894760B2 (ja) 2017-05-17 2017-05-17 光電変換装置及び撮像システム

Country Status (2)

Country Link
US (1) US10630923B2 (https=)
JP (1) JP6894760B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7527806B2 (ja) * 2020-02-19 2024-08-05 キヤノン株式会社 光電変換装置、撮像システム、移動体
CN115398626A (zh) 2020-04-27 2022-11-25 松下知识产权经营株式会社 摄像装置
WO2022106161A1 (en) * 2020-11-23 2022-05-27 Asml Netherlands B.V. Semiconductor charged particle detector for microscopy

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5159422A (en) 1987-06-17 1992-10-27 Canon Kabushiki Kaisha Photoelectric conversion device
US6069393A (en) 1987-06-26 2000-05-30 Canon Kabushiki Kaisha Photoelectric converter
US5366921A (en) 1987-11-13 1994-11-22 Canon Kabushiki Kaisha Process for fabricating an electronic circuit apparatus
JPH0294565A (ja) 1988-09-30 1990-04-05 Toshiba Corp 固体撮像装置
DE4321789C2 (de) * 1993-06-30 1999-12-09 Siemens Ag Festkörperbildwandler
JPH114374A (ja) * 1997-06-12 1999-01-06 Nikon Corp 撮像装置
US6800836B2 (en) 2000-07-10 2004-10-05 Canon Kabushiki Kaisha Image pickup device, radiation image pickup device and image processing system
US6717151B2 (en) 2000-07-10 2004-04-06 Canon Kabushiki Kaisha Image pickup apparatus
JP2002353433A (ja) * 2001-05-25 2002-12-06 Canon Inc 固体撮像装置
US6870209B2 (en) * 2003-01-09 2005-03-22 Dialog Semiconductor Gmbh CMOS pixel with dual gate PMOS
US7268332B2 (en) * 2004-01-26 2007-09-11 Semiconductor Energy Laboratory Co., Ltd. Display device and driving method of the same
US7420406B2 (en) * 2004-10-12 2008-09-02 Infineon Technologies Ag Method and circuit arrangement for setting an initial value on a charge-storage element
US7642580B2 (en) * 2007-06-20 2010-01-05 Apitina Imaging Corporation Imager pixel structure and circuit
JP5404112B2 (ja) 2009-03-12 2014-01-29 キヤノン株式会社 固体撮像素子、その駆動方法及び撮像システム
WO2011058684A1 (ja) * 2009-11-12 2011-05-19 パナソニック株式会社 固体撮像装置
JP2012164892A (ja) 2011-02-08 2012-08-30 Panasonic Corp 固体撮像装置
CN103493475B (zh) * 2011-04-28 2017-03-08 松下知识产权经营株式会社 固体摄像装置以及使用了该固体摄像装置的摄像机系统
US8766325B2 (en) * 2011-10-17 2014-07-01 Rohm Co., Ltd. Semiconductor device
JP6141024B2 (ja) 2012-02-10 2017-06-07 キヤノン株式会社 撮像装置および撮像システム
JP6108884B2 (ja) * 2013-03-08 2017-04-05 キヤノン株式会社 光電変換装置及び撮像システム
JP6368115B2 (ja) 2013-05-10 2018-08-01 キヤノン株式会社 固体撮像装置およびカメラ
JP6207351B2 (ja) 2013-11-12 2017-10-04 キヤノン株式会社 固体撮像装置および撮像システム
JP6171997B2 (ja) 2014-03-14 2017-08-02 ソニー株式会社 固体撮像素子およびその駆動方法、並びに電子機器
JP2016021445A (ja) * 2014-07-11 2016-02-04 キヤノン株式会社 光電変換装置、および、撮像システム
JP6420650B2 (ja) * 2014-12-10 2018-11-07 株式会社Subaru 車外環境認識装置
JP6579774B2 (ja) 2015-03-30 2019-09-25 キヤノン株式会社 固体撮像装置およびカメラ
JP6494368B2 (ja) 2015-03-30 2019-04-03 キヤノン株式会社 固体撮像装置およびカメラ
JP2017098809A (ja) 2015-11-26 2017-06-01 キヤノン株式会社 光電変換装置、および、撮像システム
JP6702711B2 (ja) 2015-12-17 2020-06-03 キヤノン株式会社 光電変換装置、および、撮像システム
JP2018093263A (ja) 2016-11-30 2018-06-14 キヤノン株式会社 光電変換装置、光電変換装置の駆動方法、および、撮像システム

Also Published As

Publication number Publication date
JP2018195977A (ja) 2018-12-06
US10630923B2 (en) 2020-04-21
US20180338099A1 (en) 2018-11-22

Similar Documents

Publication Publication Date Title
US11309440B2 (en) Imaging device and imaging system
US10805563B2 (en) Solid state imaging device having a charge draining mechanism
US10535688B2 (en) Imaging device and imaging system
JP7534902B2 (ja) 光電変換装置、撮像装置、半導体装置及び光電変換システム
US10944931B2 (en) Solid state imaging device and imaging system
JP6727831B2 (ja) 光電変換装置、および、撮像システム
JP6808316B2 (ja) 撮像装置、および、撮像システム
JP7395300B2 (ja) 光電変換装置、光電変換システム、および移動体
US10483301B2 (en) Imaging apparatus and imaging system
JP7020770B2 (ja) 撮像装置、および、撮像システム
JP2018120981A (ja) 固体撮像装置、撮像システム、および固体撮像装置の製造方法
US10818708B2 (en) Solid-state imaging device and imaging system
JP7000020B2 (ja) 光電変換装置、撮像システム
US11631712B2 (en) Photoelectric conversion device, imaging system, and moving body with upper electrode and conductive layer at same potential or connected to each other
US10728471B2 (en) Photoelectric conversion device with a voltage control unit connected to a reset transistor and a capacitive element, and associated imaging system
US20180151760A1 (en) Photoelectric conversion device, drive method of photoelectric conversion device, and imaging system
JP2020047780A (ja) 光検出装置
JP6894760B2 (ja) 光電変換装置及び撮像システム
JP7027175B2 (ja) 半導体装置および機器
EP2981069B1 (en) Photoelectric conversion apparatus and photoelectric conversion system
US12068342B2 (en) Photoelectric conversion device, imaging system, and movable body
US11201180B2 (en) Photoelectric conversion apparatus and photoelectric conversion system
US20250310666A1 (en) Conversion apparatus, system, moving object, and equipment
JP2020096147A (ja) 光電変換装置、光電変換システム、移動体
JP2018142937A (ja) 光電変換装置、撮像システム、移動体

Legal Events

Date Code Title Description
RD05 Notification of revocation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7425

Effective date: 20171214

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20180126

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20200518

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20200518

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20210208

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20210216

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210419

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20210506

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20210604

R151 Written notification of patent or utility model registration

Ref document number: 6894760

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151