JP6842682B2 - 水晶振動素子およびその製造方法 - Google Patents

水晶振動素子およびその製造方法 Download PDF

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Publication number
JP6842682B2
JP6842682B2 JP2019542052A JP2019542052A JP6842682B2 JP 6842682 B2 JP6842682 B2 JP 6842682B2 JP 2019542052 A JP2019542052 A JP 2019542052A JP 2019542052 A JP2019542052 A JP 2019542052A JP 6842682 B2 JP6842682 B2 JP 6842682B2
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main surface
central portion
excitation electrode
crystal
electrode
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Japanese (ja)
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JPWO2019054349A1 (ja
Inventor
有彌 井田
有彌 井田
和彦 指崎
和彦 指崎
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2019542052A 2017-09-13 2018-09-11 水晶振動素子およびその製造方法 Active JP6842682B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017175921 2017-09-13
JP2017175921 2017-09-13
PCT/JP2018/033552 WO2019054349A1 (ja) 2017-09-13 2018-09-11 水晶振動素子およびその製造方法

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JPWO2019054349A1 JPWO2019054349A1 (ja) 2020-09-24
JP6842682B2 true JP6842682B2 (ja) 2021-03-17

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JP2019542052A Active JP6842682B2 (ja) 2017-09-13 2018-09-11 水晶振動素子およびその製造方法

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JP (1) JP6842682B2 (zh)
CN (1) CN111052602B (zh)
TW (1) TWI676353B (zh)
WO (1) WO2019054349A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112970195B (zh) * 2019-03-29 2024-03-08 株式会社村田制作所 振子和振子的制造方法
WO2021049087A1 (ja) * 2019-09-09 2021-03-18 株式会社村田製作所 共振装置、集合基板、及び共振装置の製造方法
TWI828371B (zh) * 2022-10-17 2024-01-01 台灣晶技股份有限公司 壓電振動元件

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09139650A (ja) * 1995-11-15 1997-05-27 Nippon Dempa Kogyo Co Ltd 水晶振動子及びその製造方法
JP4007172B2 (ja) * 2002-12-03 2007-11-14 ソニー株式会社 マイクロマシンおよびその製造方法
JP4434082B2 (ja) * 2004-09-07 2010-03-17 株式会社村田製作所 圧電共振子の製造方法
JP4305542B2 (ja) * 2006-08-09 2009-07-29 エプソントヨコム株式会社 Ａｔカット水晶振動片及びその製造方法
JP5219676B2 (ja) * 2008-07-31 2013-06-26 日本電波工業株式会社 水晶振動子用素子、水晶振動子及び電子部品
FR2981204B1 (fr) * 2011-10-05 2014-07-04 Centre Nat Rech Scient Resonateurs a ondes de volume sur structures verticales micro-usinees.
JP2014123890A (ja) * 2012-12-21 2014-07-03 Sii Crystal Technology Inc 圧電振動片の製造方法、圧電振動片、圧電振動子、発振器、電子機器及び電波時計
JP2014127743A (ja) * 2012-12-25 2014-07-07 Nippon Dempa Kogyo Co Ltd 水晶振動子
JP5541377B2 (ja) * 2013-01-31 2014-07-09 日本電波工業株式会社 水晶振動子用素子、水晶振動子及び電子部品
CN107408935B (zh) * 2015-03-03 2018-11-09 株式会社村田制作所 晶体振子
JP2017034454A (ja) * 2015-07-31 2017-02-09 日本電波工業株式会社 電子部品及び電子部品の製造方法
CN105262456B (zh) * 2015-10-09 2018-07-31 锐迪科微电子（上海）有限公司 一种高性能薄膜体声波谐振器及其制造方法

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Publication number Publication date
JPWO2019054349A1 (ja) 2020-09-24
TW201931766A (zh) 2019-08-01
CN111052602A (zh) 2020-04-21
TWI676353B (zh) 2019-11-01
WO2019054349A1 (ja) 2019-03-21
CN111052602B (zh) 2023-09-29

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