JP6839127B2 - 圧力センサ、圧力センサの製造方法 - Google Patents

圧力センサ、圧力センサの製造方法 Download PDF

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Publication number
JP6839127B2
JP6839127B2 JP2018078208A JP2018078208A JP6839127B2 JP 6839127 B2 JP6839127 B2 JP 6839127B2 JP 2018078208 A JP2018078208 A JP 2018078208A JP 2018078208 A JP2018078208 A JP 2018078208A JP 6839127 B2 JP6839127 B2 JP 6839127B2
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Japan
Prior art keywords
pressure sensor
sensor
electrodes
sensor units
conductive film
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JP2018078208A
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English (en)
Japanese (ja)
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JP2019184509A (ja
JP2019184509A5 (https=
Inventor
豊島　良一
良一 豊島
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Nippon Mektron KK
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Nippon Mektron KK
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Application filed by Nippon Mektron KK filed Critical Nippon Mektron KK
Priority to JP2018078208A priority Critical patent/JP6839127B2/ja
Priority to US16/621,223 priority patent/US20200200617A1/en
Priority to CN201980002648.3A priority patent/CN110709680B/zh
Priority to PCT/JP2019/012849 priority patent/WO2019202928A1/ja
Priority to TW108112905A priority patent/TW201944043A/zh
Publication of JP2019184509A publication Critical patent/JP2019184509A/ja
Publication of JP2019184509A5 publication Critical patent/JP2019184509A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0654—Protection against aggressive medium in general against moisture or humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
JP2018078208A 2018-04-16 2018-04-16 圧力センサ、圧力センサの製造方法 Active JP6839127B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2018078208A JP6839127B2 (ja) 2018-04-16 2018-04-16 圧力センサ、圧力センサの製造方法
US16/621,223 US20200200617A1 (en) 2018-04-16 2019-03-26 Pressure sensor and method for manufacturing pressure sensor
CN201980002648.3A CN110709680B (zh) 2018-04-16 2019-03-26 压力传感器和压力传感器的制造方法
PCT/JP2019/012849 WO2019202928A1 (ja) 2018-04-16 2019-03-26 圧力センサ及び圧力センサの製造方法
TW108112905A TW201944043A (zh) 2018-04-16 2019-04-12 壓力傳感器和壓力傳感器的製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018078208A JP6839127B2 (ja) 2018-04-16 2018-04-16 圧力センサ、圧力センサの製造方法

Publications (3)

Publication Number Publication Date
JP2019184509A JP2019184509A (ja) 2019-10-24
JP2019184509A5 JP2019184509A5 (https=) 2020-02-27
JP6839127B2 true JP6839127B2 (ja) 2021-03-03

Family

ID=68238912

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018078208A Active JP6839127B2 (ja) 2018-04-16 2018-04-16 圧力センサ、圧力センサの製造方法

Country Status (5)

Country Link
US (1) US20200200617A1 (https=)
JP (1) JP6839127B2 (https=)
CN (1) CN110709680B (https=)
TW (1) TW201944043A (https=)
WO (1) WO2019202928A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020017013A1 (ja) * 2018-07-19 2020-01-23 Ｐｏｓｈ Ｗｅｌｌｎｅｓｓ Ｌａｂｏｒａｔｏｒｙ株式会社 検出装置、シートベルト、及び運転手監視システム
US11493392B2 (en) * 2019-10-03 2022-11-08 Ricoh Company, Ltd. Sensor sheet, robot hand, and glove
JP7164837B2 (ja) * 2020-02-21 2022-11-02 Tdk株式会社 圧力センサ
JP7276225B2 (ja) * 2020-03-31 2023-05-18 豊田合成株式会社 センサユニット
KR102833785B1 (ko) * 2020-06-03 2025-07-11 주식회사 엘지에너지솔루션 전지셀 압력 측정 장치 및 방법
WO2022104792A1 (zh) * 2020-11-23 2022-05-27 原见精机股份有限公司 接触感应器与运用其的自动化系统
LU102398B1 (en) * 2021-01-11 2022-07-11 Innovationlab Gmbh Sensor device
KR20230085008A (ko) * 2021-12-06 2023-06-13 주식회사 엘지에너지솔루션 배터리 압력 측정 센서 및 이를 포함하는 배터리 압력 측정 장치
EP4449828A4 (en) * 2021-12-17 2025-04-09 Exro Technologies Inc. ARTICLE FOR POWER INVERTER AND POWER INVERTER

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004037350A (ja) * 2002-07-05 2004-02-05 Nitta Ind Corp 抵抗型センサ
JP2007010482A (ja) * 2005-06-30 2007-01-18 Toshiba Hokuto Electronics Corp 面圧力センサー
JP5331546B2 (ja) * 2008-04-24 2013-10-30 株式会社フジクラ 圧力センサモジュール及び電子部品
CN104089737B (zh) * 2014-06-25 2015-08-05 西安交通大学 一种高灵敏度叠层式挠曲电压力传感器
US10048141B2 (en) * 2014-12-24 2018-08-14 Nippon Mektron, Ltd. Pressure sensing element and pressure sensor
CN105865668B (zh) * 2015-01-20 2019-12-10 北京纳米能源与系统研究所 压力传感成像阵列、设备及其制作方法
WO2017058655A1 (en) * 2015-09-29 2017-04-06 Apple Inc. Pressure measurement designs
GB2549451A (en) * 2016-02-17 2017-10-25 The Helping Hand Company (Ledbury) Ltd Support evaluation device
CN107144375A (zh) * 2016-03-01 2017-09-08 鸿富锦精密工业（深圳）有限公司 高密度传感器模组

Also Published As

Publication number Publication date
JP2019184509A (ja) 2019-10-24
WO2019202928A1 (ja) 2019-10-24
CN110709680A (zh) 2020-01-17
CN110709680B (zh) 2022-04-12
US20200200617A1 (en) 2020-06-25
TW201944043A (zh) 2019-11-16

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