JP6837717B2 - ウェーハの加工方法 - Google Patents
ウェーハの加工方法 Download PDFInfo
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- JP6837717B2 JP6837717B2 JP2017094917A JP2017094917A JP6837717B2 JP 6837717 B2 JP6837717 B2 JP 6837717B2 JP 2017094917 A JP2017094917 A JP 2017094917A JP 2017094917 A JP2017094917 A JP 2017094917A JP 6837717 B2 JP6837717 B2 JP 6837717B2
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- Prior art keywords
- wafer
- protective film
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- Prior art date
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- 238000003672 processing method Methods 0.000 title claims description 29
- 230000001681 protective effect Effects 0.000 claims description 243
- 239000007788 liquid Substances 0.000 claims description 85
- 239000011347 resin Substances 0.000 claims description 42
- 229920005989 resin Polymers 0.000 claims description 42
- 230000002093 peripheral effect Effects 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 10
- 230000006837 decompression Effects 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 description 262
- 230000004048 modification Effects 0.000 description 17
- 238000012986 modification Methods 0.000 description 17
- 239000000853 adhesive Substances 0.000 description 12
- 230000001070 adhesive effect Effects 0.000 description 12
- 239000000463 material Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 230000005611 electricity Effects 0.000 description 4
- 239000003292 glue Substances 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000007654 immersion Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02013—Grinding, lapping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02016—Backside treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68318—Auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/6834—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to protect an active side of a device or wafer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
- H01L2221/68386—Separation by peeling
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Dicing (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
11a 表面
11b 裏面
11c 外周縁
11d デバイス領域
11e 外周余剰領域
13 分割予定ライン(ストリート)
15 デバイス
17 バンプ(凹凸)
21 保護フィルム
23 液体
25 シート(キャリアシート)
27 液状樹脂
29 保護部材
31 シート(離型シート)
2 保護フィルム密着装置
4 支持テーブル
4a 支持面
4b ガイド部
6 保護フィルム保持ユニット
6a 保持面
6b 第1流路
6c 第2流路
8 バルブ
10 吸引源
12 バルブ
14 圧縮エアー供給源
16 バルブ
18 バルブ
20 ヒーター
22 保護部材固定装置
24 保持テーブル
24a 凹部
24b 吸引路
26 紫外線光源
28 プレート
30 バルブ
32 吸引源
34 ウェーハ保持ユニット
34a 下面
42 研削装置
44 保持テーブル(チャックテーブル)
44a 保持面
46 研削ユニット
48 スピンドル
50 マウント
52 研削ホイール
54 ホイール基台
56 研削砥石
62 ウェーハ保持ユニット
62a 保持面
64 剥離ユニット
66 ヒーター
72 減圧チャンバ
72a 箱体
72b 扉体
72c 開口部
74 排気管
76 バルブ
78 吸気管
80 バルブ
82 軸受
84 ウェーハ保持ユニット
84a 下面
86 ヒーター
88 剥離ユニット
92 保持テーブル
92a 保持面
94 ヒーター
96 ローラー
Claims (7)
- 凹凸のあるデバイスが形成されたデバイス領域と該デバイス領域を囲む外周余剰領域とを表面に有するウェーハの該表面に液体を供給する液体供給ステップと、
該液体を介して該保護フィルムを該ウェーハの該表面側に押し当て、該保護フィルムを該凹凸に倣って該表面側に密着させる保護フィルム密着ステップと、
外的刺激によって硬化する硬化型の液状樹脂からなる保護部材で該保護フィルムを被覆し、該ウェーハの該表面側が該保護部材で覆われた保護部材付きウェーハを形成する保護部材付きウェーハ形成ステップと、
チャックテーブルの保持面で該保護部材付きウェーハの該保護部材側を保持した状態で、該ウェーハの裏面を研削し、該ウェーハを薄くする研削ステップと、
薄くなった該ウェーハから該保護部材及び該保護フィルムを剥離する剥離ステップと、を備えることを特徴とするウェーハの加工方法。 - 該剥離ステップでは、該保護フィルムと該ウェーハの該表面との間に存在する該液体を加熱して気化させることを特徴とする請求項1に記載のウェーハの加工方法。
- 該剥離ステップでは、該保護部材付きウェーハを減圧チャンバに投入し、該保護フィルムと該ウェーハの該表面との間に存在する該液体を減圧して気化させることを特徴とする請求項1に記載のウェーハの加工方法。
- 該液体供給ステップでは、該液体を該ウェーハの中心部に供給することを特徴とする請求項1から請求項3のいずれかに記載のウェーハの加工方法。
- 該保護フィルム密着ステップでは、該保護フィルムの該ウェーハに対面する面とは反対側の面に気体を噴射することで該ウェーハの該表面側に該保護フィルムを押し当てることを特徴とする請求項1から請求項4のいずれか記載のウェーハの加工方法。
- 該保護フィルム密着ステップでは、押圧ローラーを用いて該ウェーハの該表面側に該保護フィルムを押し当てることを特徴とする該請求項1から請求項4のいずれかに記載のウェーハの加工方法。
- 該保護部材付きウェーハ形成ステップでは、平坦なシートに塗布された該液状樹脂に該保護フィルムを介して該ウェーハを押し当てた後、該液状樹脂を外的刺激で硬化させて該ウェーハに該液状樹脂からなる該保護部材を固定することを特徴とする請求項1から請求項6のいずれかに記載のウェーハの加工方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017094917A JP6837717B2 (ja) | 2017-05-11 | 2017-05-11 | ウェーハの加工方法 |
TW107112475A TWI754737B (zh) | 2017-05-11 | 2018-04-12 | 晶圓之加工方法 |
SG10201803743RA SG10201803743RA (en) | 2017-05-11 | 2018-05-03 | Wafer processing method |
CN201810430170.1A CN108878340B (zh) | 2017-05-11 | 2018-05-08 | 晶片的加工方法 |
KR1020180053234A KR102445610B1 (ko) | 2017-05-11 | 2018-05-09 | 웨이퍼의 가공 방법 |
DE102018207252.3A DE102018207252B4 (de) | 2017-05-11 | 2018-05-09 | Waferbearbeitungsverfahren |
US15/977,359 US10332777B2 (en) | 2017-05-11 | 2018-05-11 | Wafer processing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017094917A JP6837717B2 (ja) | 2017-05-11 | 2017-05-11 | ウェーハの加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018190938A JP2018190938A (ja) | 2018-11-29 |
JP6837717B2 true JP6837717B2 (ja) | 2021-03-03 |
Family
ID=63962722
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017094917A Active JP6837717B2 (ja) | 2017-05-11 | 2017-05-11 | ウェーハの加工方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US10332777B2 (ja) |
JP (1) | JP6837717B2 (ja) |
KR (1) | KR102445610B1 (ja) |
CN (1) | CN108878340B (ja) |
DE (1) | DE102018207252B4 (ja) |
SG (1) | SG10201803743RA (ja) |
TW (1) | TWI754737B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7071782B2 (ja) * | 2017-12-28 | 2022-05-19 | 株式会社ディスコ | ウェーハの加工方法 |
JP2022126401A (ja) | 2021-02-18 | 2022-08-30 | キオクシア株式会社 | 製造装置及びその動作方法、及び半導体装置の製造方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3556399B2 (ja) | 1996-07-29 | 2004-08-18 | 株式会社ディスコ | 半導体ウエーハの研磨方法 |
JP4397625B2 (ja) * | 2003-06-02 | 2010-01-13 | 株式会社ディスコ | チップの剥離方法 |
US7226812B2 (en) * | 2004-03-31 | 2007-06-05 | Intel Corporation | Wafer support and release in wafer processing |
JP2007266191A (ja) * | 2006-03-28 | 2007-10-11 | Nec Electronics Corp | ウェハ処理方法 |
JP5317267B2 (ja) * | 2008-11-14 | 2013-10-16 | 株式会社タカトリ | ウエハのマウント装置 |
JP4918181B2 (ja) * | 2010-06-02 | 2012-04-18 | 三井化学東セロ株式会社 | 半導体ウェハ表面保護用シート、およびそれを用いた半導体ウェハの保護方法と半導体装置の製造方法 |
JP5348360B1 (ja) | 2011-12-13 | 2013-11-20 | 日立化成株式会社 | 半導体装置の製造方法 |
JP2013162096A (ja) * | 2012-02-08 | 2013-08-19 | Fujitsu Semiconductor Ltd | 半導体チップの製造方法及びラミネート装置 |
JP6061590B2 (ja) | 2012-09-27 | 2017-01-18 | 株式会社ディスコ | 表面保護部材および加工方法 |
JP2014165338A (ja) * | 2013-02-25 | 2014-09-08 | Disco Abrasive Syst Ltd | レーザー加工方法 |
JP2015230964A (ja) * | 2014-06-05 | 2015-12-21 | 株式会社ディスコ | ウエーハの加工方法 |
JP6559013B2 (ja) * | 2015-08-20 | 2019-08-14 | リンテック株式会社 | シート貼付装置および貼付方法 |
DE112015006857B4 (de) * | 2015-08-31 | 2023-10-05 | Disco Corporation | Verfahren zum Bearbeiten eines Wafers und Schutzabdeckung zur Verwendung in diesem Verfahren |
DE102015216619B4 (de) * | 2015-08-31 | 2017-08-10 | Disco Corporation | Verfahren zum Bearbeiten eines Wafers |
JP2017079291A (ja) * | 2015-10-21 | 2017-04-27 | 株式会社ディスコ | ウエーハの加工方法 |
JP6906843B2 (ja) * | 2017-04-28 | 2021-07-21 | 株式会社ディスコ | ウェーハの加工方法 |
-
2017
- 2017-05-11 JP JP2017094917A patent/JP6837717B2/ja active Active
-
2018
- 2018-04-12 TW TW107112475A patent/TWI754737B/zh active
- 2018-05-03 SG SG10201803743RA patent/SG10201803743RA/en unknown
- 2018-05-08 CN CN201810430170.1A patent/CN108878340B/zh active Active
- 2018-05-09 DE DE102018207252.3A patent/DE102018207252B4/de active Active
- 2018-05-09 KR KR1020180053234A patent/KR102445610B1/ko active IP Right Grant
- 2018-05-11 US US15/977,359 patent/US10332777B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
DE102018207252A1 (de) | 2018-11-15 |
US10332777B2 (en) | 2019-06-25 |
JP2018190938A (ja) | 2018-11-29 |
CN108878340A (zh) | 2018-11-23 |
KR102445610B1 (ko) | 2022-09-20 |
SG10201803743RA (en) | 2018-12-28 |
US20180330978A1 (en) | 2018-11-15 |
TWI754737B (zh) | 2022-02-11 |
TW201903874A (zh) | 2019-01-16 |
CN108878340B (zh) | 2024-02-20 |
DE102018207252B4 (de) | 2023-08-24 |
KR20180124758A (ko) | 2018-11-21 |
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